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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成22年度
	Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line Daiji Noda and Tadashi Hattori Advanced Robotics, Vol. 24, No. 10, 2010, pp.1461-1470. Fabrication of X-rays Mask with Carbon Membrane for Diffraction Gratings Naoki Takahashi, Hiroshi Tsujii, Megumi Katori, Kenji Yamashita, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1303-1307. Fabrication of High Precision X-ray Mask for X-ray Grating of X-ray Talbot Interferometer Daiji Noda, Hiroshi Tsujii, Naoki Takahashi and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1309-1313. Fabrication of High Hardness Ni Mold with Electroless Nickel-Boron Thin Layer Yashitaka Sawa, Kenji Yamashita, Takeshi Kitadani, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1369-1375. Fabrication of Micro Capacitive Inclination Sensor by Resin Molding Hiroaki Miyake, Kazufumi Nishimoto, Satoshi Nishida, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1431-1437. Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Lines Daiji Noda, Masaru Setomoto, Yuki Kobayashi and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1479-1483. Fabrication of UV Range Light Guide Plate Yuta Okayama, Kenji Yamashita, Yoshitaka Sawa, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol. 16, No. 8-9, 2010, pp.1625-1631. Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators Atsushi Tokuoka, Daiji Noda and Tadashi Hattori 2010 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2010), Nagoya, Japan, November 7-10, 2010 Fabrication of Carbon Mebrane X-ray Mask for X-ray Lithography Daiji Noda, Naoki Takahashi, Atsushi Tokuoka, Megumi Katori and Tadashi Hattori ASME International Mechanical Engineering Congress & Exposition (IMECE 2010), Vancouver, Canada, November 12-18, 2010 Fabrication of High Aspect Ratio Microcoils Using X-ray Lithography Daiji Noda, Masaru Setomoto and Tadashi Hattori ASME International Mechanical Engineering Congress & Exposition (IMECE 2010), Vancouver, Canada, November 12-18, 2010 Fabrication of High Performance Light Guide Plate and New Design for High Luminance Takaya Fujimoto, Kenji Yamashita, Satoshi Nishida, Daiji Noda and Tadashi Hattori ASME International Mechanical Engineering Congress & Exposition (IMECE 2010), Vancouver, Canada, November 12-18, 2010 Fabrication of New X-ray Mask Using Carbon Wafer Membrane Daiji Noda, Naoki Takahashi, Atsushi Tokuoka, Megumi Katori and Tadashi Hattori 2010 International Chemical Congress of Pacific Basin Societies (PACIFICHEM 2010), Honolulu, USA, December 15-20, 2010

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