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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成18年度
	Manufacture of Ni Microprobe Using X-Ray Lithography and Plating Method -Behavior of Ni-plated Materials at a Constant Temperature Under Stress- Teppei Kimura, Hajime Fukinbara and Tadashi Hattori 電気学会論文誌E，Vol.126, No.5, 2006, pp.195-199. マイクロ3次元構造体の加工と今後の展開 服部正 電気学会論文誌E，Vol.126, No.6, 2006, pp.211-215. 放射光を用いた3次元加工によるマイクロプローブの作製 木村哲平，石田友弘，服部正 電気学会論文誌E，Vol.126, No.6, 2006, pp.228-234. Phase Tomography by X-ray Talbot Interferometry for Biological Imaging Atsushi Momose, Wataru Yashiro, Yoshihiro Takeda, Yoshio Suzuki and Tadashi Hattori Japanese Journal of Applied Physics, Vol.45, No.6A, 2006, pp.5254-5262. マイクロアクチュエータの製造技術 服部正，野田大二 日本AEM学会誌，Vol.14, No.2, 2006, pp.174-179. 放射光高アスペクト加工とSi異方性エッチングの組み合わせによる3次元微細プローブの作製 木村哲平，石田友弘，服部正 日本設備管理学会誌，Vol.18, No.3, 2006, pp.114-119. X線リソグラフィーによる微細エンボスロールの開発 出井一義，服部正 日本設備管理学会誌，Vol.18, No.3, 2006, pp.120-125. Development of Micro Capacitive Inclination Sensor Hiroyasu Ueda, Hiroshi Ueno, Koichi Itoigawa and Tadashi Hattori 電気学会論文誌E，Vol.126, No.12, 2006, pp.637-642. LIGAプロセスの三次元化とスパイラル型マイクロコイルの作製 銘苅春隆，久住真治，佐藤憲昭，清水正己，山下満，嶋田修，服部正 電気学会論文誌C，Vol.127, No.2, 2007, pp.160-166. 次世代3次元X線リソグラフィーの提案と高輝度液晶バックライトユニット導光板への応用 内海裕一，岸本武文，服部正，南谷めぐみ 電気学会論文誌C，Vol.127, No.2, 2007, pp.185-191. Fabrication of Diffraction Grating with High Aspect Ratio Using X-ray Lithography Technique for X-ray Phase Imaging Daiji Noda, Makoto Tanaka, Kazuma Shimada and Tadashi Hattori Japanese Journal of Applied Physics, Vol.46, No.2, 2007, pp.849-851. Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration Harutaka Mekaru, Osamu Nakamura, Osamu Maruyama, Ryutaro Maeda and Tadashi Hattori Microsystem Technologies, Vol.13, No.3-4, 2007, pp.385-391. Fabrication of a spiral microcoil using a 3D-LIGA process Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada and Tadashi Hattori Microsystem Technologies, Vol.13, No.3-4, 2007, pp.393-402. Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generatic Micro Actuator Tadashi Hattori, Daiji Noda and Hiroyuki Ishigaki 1st International Symposium on Next-Generation Actuatorｓ Leading Breakthroughs, Chiba, Japan, April 20-21, 2006 Phase Tomography Using X-ray Talbot Interferometer Atsushi Momose, Wataru Yashiro, Yoshihiro Takeda, Masafumi Moritake, Kentaro Uesugi, Yoshio Suzuki and Tadashi Hattori 9th International Conference on Synchrotron Radiation Istrumentation (SRI 2006), Daegu, Korea, May 28 - June 2, 2006 Fabrication of High Aspect Ratio Micro Coil for Microactuators Using Three-Dimensional X-ray Lithography Technique Daiji Noda, Hiroaki Mochizuki, Yoshifumi Matsumoto, Tadashi Hattori, Shinji Kusumi, Osamu Shimada, Noriaki Sato, Masami Shimizu, Michiru Yamashita 10th International Conference on New Actuators (ACTUATOR 2006), Bremen, Germany, June 14-16, 2006 Fabrication of Cylindrical Microcoil Line through Surface Modification for Microactuators Shuhei Yamashita, Shinji Kusumi, Osamu Shimada, Kouichi Okuda, Daiji Noda and Tadashi Hattori 10th International Conference on New Actuators (ACTUATOR 2006), Bremen, Germany, June 14-16, 2006 Measurement of Friction Characteristics by an Inertia Drive System and Optimum Design of Piezoelectric Impact Drive Mechanism N. Shibano, Y. Konishi, H. Ishigaki and T. Hattori 10th International Conference on New Actuators (ACTUATOR 2006), Bremen, Germany, June 14-16, 2006 Fabrication of Local Micro Vacuum Package Incorporating Si Field Emitter Array and Ti Getter Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, Kazuaki Sawada and Makoto Ishida 19th International Vacuum Nanoelectronics Conference (IVNC), Guilin, China, July 17-20, 2006 Biomedical Imaging by Talbot-Type X-Ray Phase Tomography Atsushi Momose, Wataru Yashiro, Masafumi Moritake, Yoshihiro Takeda, Kentaro Uesugi, Akihisa Takeuchi, Yoshio Suzuki, Makoto Tanaka and Tadashi Hattori SPIE Optics & Photonics 2006, San Diego, California, USA, August 15-17, 2006 Diffential Phase Imaging Microscopy with X-ray Talbot Interferometer Yoshihiro Takeda, Masakazu Sawano, Wataru Yashiro, Tadashi Hattori, Akihisa Takeuchi, Kentaro Uesugi,Yoshio Suzuki and Atsushi Momose 16th International Microscopy Congress (IMC 2006), Sapporo, Japan, August 15-17, 2006 Development of Cavity Structure for Field Emission on Si Substrate Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, Kazuaki Sawada and Makoto Ishida 2006 International Microprocesses and Nanotechnology Conference, Kanagawa, Japan, October 25-27, 2006 An Electromagnetic Actuator Using a Cylindrical Coil Created with 3D X-ray Lithography and Metallization Techniques Yoshifumi Matsumoto, Shuhei Yamashita, Daiji Noda and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Development of Roll Metal Mold by Synchrotron Radiation Kazuyoshi Idei, Naoya Ishizawa, Daiji Noda and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Fabrication of a Tapered Structure by Means of Exposure to Diffracted UV Light Takanori Tanaka, Toshifumi Nomura, Yoichi Funabiki, Takeshi Kitadani, Kazuyoshi Idei, Kenji Yamashita, Daiji Noda and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Ni Electroforming of Large-area Micro Metal Molds Taro Kimura, Kenji Yamashita, Takeshi Kitadani, Teppei Kimura, Kazuyoshi Idei and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Fabrication of Gratings for an X-ray Talbot Interferometer Makoto Tanaka, Yoshihiro Takeda, Daiji Noda, Wataru Yashiro, Koichi Okuda, Atsushi Momose and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Best Poster Award　（平成18年11月8日） Fabrication of a Cylindrical Microcoil Line with High Aspect Ratio for Electromagnetic Actuators Shuhei Yamashita, Yoshifumi Matsumoto, Kazuyoshi Idei, Koichi Okuda, Daiji Noda and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Development of 3-Dimentional Micro Probe using X-Ray Lithography and High-Strength Electroformed Ni Teppei Kimura, Tomohiro Ishida, Hajime Fukinbara, Naoki Arita and Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Eletrostatic Capacity Type Micro Inclination Sensor Utilizing Dielectric Nano-Particles Hiroyasu Ueda, Hiroshi Ueno, Koichi Itoigawa, Tadashi Hattori 2006 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 5-8, 2006 Best Poster Award　（平成18年11月8日） Fabrication of High Aspect Ratio Coil for Microactuators using LIGA Process Daiji Noda, Yoshifumi Matsumoto, Shuhei Yamashita, Masaru Setomoto and Tadashi Hattori SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems, Adelaide, Australia, December 10-13, 2006

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