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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成20年度
	Fabrication of High Aspect Ratio Microcoil Using by Dipping Method Daiji Noda, Shuhei Yamashita, Yoshifumi Matsumoto, Masaru Setomoto and Tadashi Hattori Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2, 2008, pp.174-179. Fabrication of the 3Dimension Resist Microstructure Using X-ray Diffraction Kyo Tanabiki, Youichi Funabiki, Daiji Noda and Tadashi Hattori Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2, 2008, pp.191-196. Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion Kazufumi Nishimoto, Naoya Ishizawa, Hiroyasu Ueda, Daiji Noda and Tadashi Hattori Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2, 2008, pp.197-202. Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators Masaru Setomoto, Yoshifumi Matsumoto, Shuhei Yamashita, Daiji Noda and Tadashi Hattori Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2, 2008, pp.238-245. Fabrication of the X-ray Mask Using the Silicon Dry Etching Hiroshi Tsujii, Kazuma Shimada, Makoto Tanaka, Daiji Noda and Tadashi Hattori Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 2, No. 2, 2008, pp.246-251. Fabrication of Microcoils Using X-ray Lithography and Metallization Daiji Noda, Yoshifumi Matsumoto, Masaru Setomoto and Tadashi Hattori IEEJ Transactions on Sensors and Micromachines, Vol. 128, No. 5, 2008, pp.181-185. Fabrication of Large Area Diffraction Grating Using LIGA Process Daiji Noda, Makoto Tanaka, Kazuma Shimada, Wataru Yashiro, Atsushi Momose and Tadashi Hattori Microsystem Technologies, Vol.14, No. 9-11, 2008, pp.1311-1315. Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators Yoshifumi Matsumoto, Masaru Setomoto, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol.14, No. 9-11, 2008, pp.1373-1379. Resin Micromachining by Roller Hot Embossing Naoya Ishizawa, Kazuyoshi Idei, Taro Kimura, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol.14, No. 9-11, 2008, pp.1381-1388. Development of Lighting Panel Comprising Light Tube Fabricated by LIGA Process Yoshitake Sawa, Takanori Tanaka, Takeshi Kitadani, Hiroshi Ueno, Koichi Itoigawa, Kenji Yamashita, Daiji Noda and Tadashi Hattori Microsystem Technologies, Vol.14, No. 9-11, 2008, pp.1559-1565. Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography Daiji Noda, Hiroshi Tsujii, Kazuma Shimada, Wataru Yashiro, Atsushi Momose and Tadashi Hattori Journal of Solid Mechanics and Materials Engineering, Vol. 3, No. 2, 2009, pp.416-423. 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開 野田大二，松本吉史，瀬戸本勝，服部正 日本AEM学会誌, Vol. 17, No. 1, 2009, pp.162-167. Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generatic Micro Actuator Daiji Noda and Tadashi Hattori 2nd International Symposium on Next-Generation Actuatorｓ Leading Breakthroughs, Chiba, Japan, April 17, 2008 Fabrication of Narrow Pitch and High Aspect Ratio Microcoil for Electromagnetic Microactuators Daiji Noda, Yoshifumi Matsumoto, Masaru Setomoto, Daisuke Ochi and Tadashi Hattori 11th International Conference on New Actuators (Actuator 2008), Bremen, Germany, June 9-11, 2008 Fabrication of Spiral Micro Coil Lines for Micro Actuators Using X-ray Lithography and Metallization Masaru Setomoto, Yoshifumi Matsumoto, Daiji Noda and Tadashi Hattori 11th International Conference on New Actuators (Actuator 2008), Bremen, Germany, June 9-11, 2008 Fabrication of the Tapered Structure Using X-ray Diffraction and Applying to LIGA Process Kyo Tanabiki, Daiji Noda and Tadashi Hattori International Conference on Electrical Engineering 2008 (ICEE 2008), Okinawa, Japan, July 6-10, 2008 Fabrication of X-ray Mask with the Silicon Microstructure Hiroshi Tsujii, Daiji Noda and Tadashi Hattori International Conference on Electrical Engineering 2008 (ICEE 2008), Okinawa, Japan, July 6-10, 2008 Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography Daiji Noda, Hiroshi Tsujii, Kazuma Shimada, Wataru Yashiro, Atsushi Momose and Tadashi Hattori 3rd JSME/ASME International Conference on Material and Processing (ICM&P 2008), Evanston, USA, October 7-10, 2008 Processing on Hot Emboss Molding for a Small Capacitive Inclination Sensor Kazufumi Nishimoto, Naoya Ishizawa, Hiroaki Miyake, Toshiaki Sakai, Satoshi Nishida, Hiroyasu Ueda, Koichi Itoigawa, Daiji Noda and Tadashi Hattori 3rd JSME/ASME International Conference on Material and Processing (ICM&P 2008), Evanston, USA, October 7-10, 2008 Fabrication of the 3 Dimension Resist Microstructure Using X-ray Diffraction and Applying to LIGA Process Yoshitaka Sawa, Kyo Tanabiki, Daiji Noda and Tadashi Hattori 3rd JSME/ASME International Conference on Material and Processing (ICM&P 2008), Evanston, USA, October 7-10, 2008 Fabrication of X-ray Grating Using X-ray Lithography Technique Daiji Noda, Hiroshi Tsujii, Naoki Takahashi and Tadashi Hattori Pacific RIM Meeting on Electrochemical and Solid-State Science (PRiME 2008), Honolulu, USA, October 12-17, 2008 Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators Daiji Noda, Masaru Setomoto and Tadashi Hattori 2008 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2008), Nagoya, Japan, November 6-9, 2008 Fabrication of High Hardness Micro Mold Using Double Layer Nickel Electroforming Yoshitaka Sawa, Kenji Yamashita, Takeshi Kitadani, Daiji Noda and Tadashi Hattori 2008 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2008), Nagoya, Japan, November 6-9, 2008 Fabrication of Ultraviolet Range Light Guide Plate Yuta Okayama, Kenji Yamashita, Daiji Noda and Tadashi Hattori 2008 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2008), Nagoya, Japan, November 6-9, 2008 Suggestion of New X-ray Mask Using Carbon Substrate Naoki Takahashi, Hiroshi Tsujii, Daiji Noda and Tadashi Hattori 2008 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2008), Nagoya, Japan, November 6-9, 2008 Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil Daiji Noda, Masaru Setomoto, Yuki Kobayashi and Tadashi Hattori SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems, Melbourne, Australia, December 9-12, 2008

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