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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成17年度
	Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, and Hirotsugu Hara Japanese Journal of Applied Physics,Vol.44, No.7B, 2005, pp.5500-5504. Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada, and Tadashi Hattori Japanese Journal of Applied Physics, Vol.44, No.7B, 2005, pp.5749-575. Improvement of Capillary Electrophoresis Property for Microchannels Fabricated by Deep X-ray Lithography Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe, and Tadashi Hattori Microsystem Technologies, Vol.11, 2005, pp.235-239. 3D Microstructure Fabrication for a high Luminosity Lighting-Panel for LCD Using Synchrotron Radiation Megumi Minamitani, Yuichi Utsumi, and Tadashi Hattori Microsystem Technologies, Vol.11, 2005, pp.230-234. Precise Micro Pattern Replication by Hot Embossing Kazuyoshi Idei, Harutaka Mekaru, Hiroaki Takeda, and Tadashi Hattori JSME International Journal, Vol.49, No.1, 2006, pp.69-73. Fabrication of Spiral Micro-Coil Utilizing LIGA Process Osamu Shimada, Shinji Kusumi, Harutaka Mekaru, Noriaki Sato, Masami Shimizu, Michiru Yamashita, and Tadashi Hattori JSME International Journal, Vol.49, No.1, 2006, pp.74-78. Investigation of High-Strength Electroformed Ni for Microprobes Teppei Kimura, Naoki Arita, Hajime Fukinbara, and Tadashi Hattori JSME International Journal, Vol.49, No.1, 2006, pp.79-84. 次世代マイクロアクチュエータと超微細3次元加工技術 服部正 機械の研究，Vol.57, No.5, 2005, pp.527-534. マイクロアクチュエータの超微細三次元加工技術 服部正 月刊MATERIAL STAGE，Vol.5, No.12, 2006, pp.43-48. Fabrication of Spiral Microcoil Utilizing 3D-LIGA Process Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Design of Solenoidal Electromagnetic Microactuator utilizing 3D X-ray Lithography and Metalization Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Fabrication of diffraction grating for X-ray Talbot interferometer Masatake Matsumoto, Kinji Takiguchi, Makoto Tanaka, Yoichi Hunabiki, Hiroaki Takeda, Atsushi Momose, Yuichi Utsumi and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Large Area and Wide Dimensions X-ray Lithography using Energy Variable Synchrotron Radiation Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Development of Precise Transfer Technique for Atmospheric Hot Embossing by Ultrasonic Vibration Harutaka Mekaru, Osamu Nakamura, Osamu Maruyama, Ryutaro Maeda and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Development of Emboss Roll with Precise Micro Patterns by 3-D X-Ray Lithography Kazuyoshi Idei, Harutaka Mekaru, Shingo Kitamura, Yoichi Murakoshi, Ryutaro Maeda, Yuichi Utsumi and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2005, Gyeongju, Korea, June 10-13, 2005 Fabrication of Spiral Micro-Coil Utilizing LIGA Process Osamu Shimada, Shinji Kusumi, Harutaka Mekaru, Noriaki Sato, Masami Shimizu, Michiru Yamashita and Tadashi Hattori 2nd JSME/ASME International Conference on Materials and Processing 2005, Seattle, Washington, USA, June 19-22, 2005 Bonding Dissimilar Materials by Exposure to an H2O Ion Beam Yutaka Setomoto, Syuhei Yamashita, Hiroyasu Ueda, Koichi Itoigawa and Tadashi Hattori 2nd JSME/ASME International Conference on Materials and Processing 2005, Seattle, Washington, USA, June 19-22, 2005 Precise Micro Pattern Replication by Hot Embossing Kazuyoshi Idei, Harutaka Mekaru, Hiroaki Takeda and Tadashi Hattori 2nd JSME/ASME International Conference on Materials and Processing 2005, Seattle, Washington, USA, June 19-22, 2005 Investigation of high-strength electroformed Ni for microprobes Teppei Kimura, Naoaki Arita, Hajime Fukinbara and Tadashi Hattori 2nd JSME/ASME International Conference on Materials and Processing 2005, Seattle, Washington, USA, June 19-22, 2005 Phase Imaging with X-ray Talbot Interferometer Using Gratings Fabricated with LIGA Process W. Yashiro, A. Momose, Y. Suzuki and T. Hattori The 8th International Conference on X-ray Microscopy, Himeji, Japan, July 26-30, 2005 Phase Imaging With An X-Ray Talbot Interferometer A. Momose, I. Koyama, W. Yashiro, Y. Suzuki and T. Hattor Denver X-ray Conference, Colorado Springs, USA, August 1-5, 2005 Surface Integrity of Thick Photo Resist Finished by Ultra-Precision Diamond Cutting Koichi Okuda, Shusaku Nakagawa, Naoki Fujiwara, Yuichi Utsumi, Nobuji Sakai and Tadashi Hattori International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Nagoya, Japan, October 19-22, 2005 Manufacture of Ni Microprobe using X-Ray Lithography and Plating Method -Behavior of Ni-plated Materials at a Constant Temperature Under Stress- Teppei Kimura, Hajime Fukinbara and Tadashi Hattori 22nd SENSOR SYMPOSIUM 2005, Tokyo, Japan, October 20-21, 2005 Development of Micro Capacitive Inclination Sensor Hiroyasu Ueda, Hiroshi Ueno, Koichi Itoigawa and Tadashi Hattori 22nd SENSOR SYMPOSIUM 2005, Tokyo, Japan, October 20-21, 2005 The relationship between ground moisture and temperature distribution measured by non-contact method Daiji Noda, Takaichirou Itoh, Kazuaki Sawada and Makoto Ishida 22nd SENSOR SYMPOSIUM 2005, Tokyo, Japan, October 20-21, 2005 Micro Capacitive Inclination Sensor Utilizing Dielectric Nano-Particles Hiroyasu Ueda, Hiroshi Ueno, Koichi Itoigawa, and Tadashi Hattori 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, January 22-26, 2006

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