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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成21年度
	Fabrication of X-ray Grating Using X-ray Lithography Technique for X-ray Talbot Interferometer Daiji Noda, Hiroshi Tsujii, Naoki Takahashi and Tadashi Hattori Journal of the Electrochemical Society, Vol. 156, No. 5, 2009, pp.H299-H302. Fabrication of the 3 Dimension Resist Microstructure Using X-ray Diffraction and Applying to LIGA Process Yoshitaka Sawa, Kyo Tanabiki, Daiji Noda and Tadashi Hattori Journal of Solid Mechanics and Materials Engineering, Vol. 3, No. 5, 2009, pp.721-728. 二層ニッケル電鋳法による高硬度マイクロ金型の作製 佐和吉敬，山下健治，北谷武，野田大二，服部正 日本設備管理学会誌, Vol. 21, No. 1, 2009, pp.7-12. 論文賞　受賞　（平成22年6月3日） Fabrication of Micro Capacitive Inclination Sensor by Resin Molding Hiroaki Miyake Kazufumi Nishimoto, Hiroyasu Ueda, Hiroshi Ueno, Koichi Itoigawa, Satoshi Nishida, Daiji Noda and Tadashi Hattori IEEJ Transaction on Sensors and Micromachines, Vol. 129, No. 9, 2009, pp.283-288. 無電解ニッケル-ホウ素めっきによる高硬度マイクロ金型の作製 佐和吉敬，山下健治，北谷武，野田大二，服部正 日本設備管理学会誌, Vol. 21, No. 2, 2009, pp.21-25. 静電容量型小型傾斜角センサの作製 野田大二，西本和史，三宅弘晃，西田諭史，服部正 日本設備管理学会誌, Vol. 21, No. 2, 2009, pp.26-30. 紫外線面発光体の作製と光触媒光源への応用 山下健治，佐和吉敬，野田大二，服部正 日本設備管理学会誌, Vol. 21, No. 2, 2009, pp.38-42. MEMSプローブの作製と機械特性評価 木村哲平，石田友弘，服部正 日本設備管理学会誌, Vol. 21, No. 2, 2009, pp.49-53. 二層ニッケル電鋳法による高硬度マイクロ金型の作製 佐和吉敬，山下健治，北谷武，服部正 日本機会学会論文集C編, Vol. 75, No. 759, 2009, pp.3076-3081. Fabrication of High Precision X-ray Mask for X-ray Grating of X-ray Talbot Interferometer Daiji Noda, Hiroshi Tsujii, Naoki Takahashi and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Lines Daiji Noda, Masaru Setomoto, Yuki Kobayashi and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of High Hardness Ni Mold with Electroless Nickel-Boron Thin Layer Yashitaka Sawa, Kenji Yamashita, Takeshi Kitadani, Daiji Noda and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of Ultraviolet Range Light Guide Plate Yuta Okayama, Kenji Yamashita, Yoshitaka Sawa, Daiji Noda and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of X-rays Mask with Carbon Membrane for Diffraction Gratings Naoki Takahashi, Hiroshi Tsujii, Megumi Katori, Kenji Yamashita, Daiji Noda and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of Micro Capacitive Inclination Sensor by Resin Molding Hiroaki Miyake, Kazufumi Nishimoto, Satoshi Nishida, Daiji Noda and Tadashi Hattori 8th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2009, Saskatoon, Canada, June 25-28, 2009 Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators Daiji Noda, Masaru Setomoto and Tadashi Hattori 2009 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2009), Nagoya, Japan, November 8-11, 2009 Examination of High Luminance Light Guide Plate by Accumulating Method Takaya Fujimoto, Yuta Okayama, Kenji Yamashita, Satoshi Nishida, Yoshitaka Sawa, Daiji Noda and Tadashi Hattori 2009 IEEE International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2009), Nagoya, Japan, November 8-11, 2009

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