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	ナノマイクロシステム分野 SR-MEMS研究室

	研究業績リスト（学術論文および国際会議等）
	平成19年度
	Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara Microsystem Technologies, Vol.13, No.5-6, 2007, pp.417-423. Fabrication of diffraction grating for X-ray Talbot interferometer Masatake Matsumoto, Kinji Takiguchi, Makoto Tanaka, Yoichi Hunabiki, Hiroaki Takeda, Atsushi Momose, Yuichi Utsumi and Tadashi Hattori Microsystem Technologies, Vol.13, No.5-6, 2007, pp.543-546. Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada and Tadashi Hattori Microsystem Technologies, Vol.13, No.5-6, 2007, pp.547-550. Fabrication of local microvacuum package incorporating Si field emitter array and Ti getter Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, Kazuaki Sawada and Makoto Ishida Journal of Vacuum Science & Technology B, Vol.25, No.3, 2007, pp.931-934. 電磁型マイクロアクチュエータ用マイクロコイルの製作 服部正，野田大二 電気学会誌，Vol.127, No.5, 2007, pp.288-290. 電磁型マイクロアクチュエータ用マイクロコイルの製作 服部正，野田大二，嶋田修，佐藤憲昭，清水正己，山下満 日本設備管理学会誌，Vol.19, No.1, 2007, pp.9-14. UV-LIGAプロセスによる導光板の開発 出井一義，糸魚川貢一，北谷武，佐和吉敬，山下健治，野田大二，服部正 日本塑性加工学会誌，Vol.48, No.558, 2007, pp.640-644. Development of Cavity Structure for field emission on Si Substrate Daiji Noda, Masanori Hatakeyama, Kichinosuke Nishijyou, Kazuaki Sawada and Makoto Ishida Japanese Journal of Applied Physics, Vol.46, No.9B, 2007, pp.6433-6436. 表面改質による異種材料直接接合技術に関する研究 植田�ｪ康，上野洋，糸魚川貢一，服部正 日本設備管理学会誌，Vol.19, No.3, 2007, pp.198-203. Fabrication of Large Area Diffraction Grating Using LIGA Process Daiji Noda, Makoto Tanaka, Kazuma Shimada, Wataru Yashiro, Atsushi Momose and Tadashi Hattori 7th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2007, Besancon, France, June 7-9, 2007 Development of Lighting Panel Comprising Light Tube Fabricated by LIGA Process Yoshitake Sawa, Takanori Tanaka, Takeshi Kitadani, Hiroshi Ueno, Koichi Itoigawa, Kenji Yamashita, Daiji Noda and Tadashi Hattori 7th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2007, Besancon, France, June 7-9, 2007 Resin Micromachining by Roller Hot Embossing Naoya Ishizawa, Kazuyoshi Idei, Taro Kimura, Daiji Noda and Tadashi Hattori 7th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2007, Besancon, France, June 7-9, 2007 Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators Yoshifumi Matsumoto, Masaru Setomoto, Daiji Noda and Tadashi Hattori 7th Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2007, Besancon, France, June 7-9, 2007 Fabrication of High Aspect Ratio Microcoil Using by Dipping Method Daiji Noda, Shuhei Yamashita, Yoshifumi Matsumoto, Masaru Setomoto and Tadashi Hattori 2nd International Conference on Machine Design and Tribology, Sapporo, Japan, July 1-4, 2007 Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators Masaru Setomoto, Yoshifumi Matsumoto, Shuhei Yamashita, Daiji Noda and Tadashi Hattori 2nd International Conference on Machine Design and Tribology, Sapporo, Japan, July 1-4, 2007 Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion Kazufumi Nishimoto, Naoya Ishizawa, Hiroyasu Ueda, Daiji Noda and Tadashi Hattori 2nd International Conference on Machine Design and Tribology, Sapporo, Japan, July 1-4, 2007 Fabrication of the 3Dimension Resist Microstructure Using X-ray Diffraction Kyo Tanabiki, Youichi Funabiki, Daiji Noda and Tadashi Hattori 2nd International Conference on Machine Design and Tribology, Sapporo, Japan, July 1-4, 2007 Fabrication of the X-ray Mask Using the Silicon Dry Etching Hiroshi Tsujii, Kazuma Shimada, Makoto Tanaka, Daiji Noda and Tadashi Hattori 2nd International Conference on Machine Design and Tribology, Sapporo, Japan, July 1-4, 2007 Full-Body Phase Tomography of a Mouse by X-ray Talbot Interferometry Atsushi Momose, Yoshihiro Takeda, Masakazu Shinohara, Keshu Wan, Wataru Yashiro, Daiji Noda and Tadashi Hattori 9th International Conference on Biology and Synchrotron Radiation, Manchester, England, August 13-17, 2007 X-ray Talbot Interferometer Consisting of Two Transmission X-ray Gratings for X-ray Phase Imaging Atsushi Momose, Yoshihiro Takeda, Wataru Yashiro, Daiji Noda and Tadashi Hattori International 21st Century COE Symposium on Atomistic Febrication Technology 2007, Osaka, Japan, October 15-17, 2007 Fabrication of High Precision X-Ray Mask Using Silicon Dry Etching Daiji Noda, Hiroshi Tsujii, Wataru Yashiro, Kazuma Shimada and Tadashi Hattori 20th International Microprocesses and Nanotechnology Conference, kyoto, Japan, November 5-8, 2007 Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators Daiji Noda, Yoshifumi Matsumoto, Masaru Setomoto and Tadashi Hattori 2007 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 11-14, 2007 Fabrication of X-Ray Mask using Poly-Si Microstructure for Diffraction Grating Kazuma Shimada, Hiroshi Tsujii, Daiji Noda and Tadashi Hattori 2007 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 11-14, 2007 A Novel MEMS Probe for LSI Testing Teppei Kimura, Syohei Tajima, Tetsuhisa Sakamoto, Mitsuaki Tsuboi, Tomohiro Ishida and Tadashi Hattori 2007 International Symposium on Micro-Nano Mechatronics and Human Science, Nagoya, Japan, November 11-14, 2007 Best Poster Award　（平成19年11月14日）

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