兵庫県立大学
高度産業科学技術研究所 兵庫県立大学 UNIVERSITY OF HYOGO
ナノマイクロシステム分野
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ナノマイクロシステム分野 SR-MEMS研究室

研究業績リスト(学術論文および国際会議等)
平成14年度
  • Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography of synchrotron radiation
    Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori
    Microsystem Technologies, 9(1-2), (2002) 36-40
  • Chemiluminescence Detectionfora Microchip Capillary Electrophoresis System Fabricatedin Poly(dimethylsiloxane)
    Bi-FengLiu, Motoaki Ozaki, Yuichi Utsumi, Tadashi Hattori, and Shigeru Terabe
    Anal Chem, 75(1), (2003) 36-41
  • 放射光のナノ・マイクロ加工技術への応用
    服部正
    溶接学会誌,71(3),(2002) 135-144
  • 放射光化学反応によるナノレベル・エピタキシャル成長
    内海裕一,服部正
    溶接学会誌,71(3),(2002) 145-149
  • 放射光LIGAプロセスによるマイクロ金型の作製
    北谷武,内海裕一,服部正
    溶接学会誌,71(3), (2002) 150-153
  • ニュースバルの到達点
    安東愛之輔,服部正,細野和彦,神田一浩,木下博雄,松井真二,銘苅春隆,新部正人,内海裕一,渡邉健夫
    放射光学会誌,15(6),(2002) 336-346
  • Fabrication of PDMS Micro Capillary Electrophoresis Chips
    Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe, Tadashi Hattori and Etsuo Shinohara
    19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002
  • Surface Roughness of Microstructures Fabricated by LIGA Process
    Harutaka Mekaru, Takashi Yamada, Sho En and Tadashi Hattori
    19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002
  • Fabrication of Nickel Micro Mold Inserts by the LIGA Process Using Synchrotron Radiation from “NewSUBARU”
    Takeshi Kitatani, Yuichi Utsumi and Tadashi Hattori
    19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002
  • Fabrication of LIGA Masks and Applications for Optical Switch Molding
    X. C. Shan, R. Maeda, T. Ikehara, H. Mekaru and T. Hattori
    Pacific Rim Workshop on MEMS, Xiamen, China, July 22-24, 2002
  • Fabrication of plastic microchip for electrophoresis using UV polymerization
    Motoaki Ozaki, Yuichi Utsumi, Shigeru Terabe and Tadashi Hattori
    JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002
  • Optimization of Nickel Electroplating for High Aspect Ratio LIGA Mold Inserts Fabricated by Synchrotron Radiation from “NewSUBARU”
    Yuichi Utsumi, Takeshi Kitadani and Tadashi Hattori
    JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002
  • Current Status of LIGA Process at “NewSUBARU”
    Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori
    JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002
  • Microfabrication of Microstructure object by plastic injection molding
    Song Yan, Takashi Yamada, Harutaka Mekaru, Tsuyoshi Asano, Hattori Tadashi and Noriaki Sato
    JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002
  • Design of a new Hot Embossing equipment for fabrication of microstructures
    Takashi Yamada, Harutaka Mekaru, Hiroyuki Ishigaki, Ryutaro Maeda and Tadashi Hattori
    JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002
  • A deep X-ray Lithography in the “NewSUBARU”
    Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori
    2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002
  • Effects of improved microchannel structures to the separation characteristics of microchip capillary electrophoresis
    Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe and Tadashi Hattori
    2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002
  • Microfabrication by hot embossing and injection molding in LIGA process
    Harutaka Mekaru, Takashi Yamada, Sho En and Tadashi Hattori
    2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002
  • An Approach of High Efficiency Fuel Reformer Using High Aspect Metal Structure formed by Synchrotron Radiation LIGA Process
    Yuichi Utsumi and Tadashi Hattori
    International Workshop on Power MEMS, Tsukuba, Japan, Nov. 12-13, 2002
  • Promotion of New Industry in Kansai for Micro and Nano business
    Tadashi Hattori
    National Science Foundation Tri-National Workshop, Melbourne, Australia, December 12-14, 2002
  • Optimization of Au Mask Fabrication Process for LIGA Application
    X. C. Shan, R. Maeda, T. Ikehara, H. Mekaru and T. Hattori
    Materials, Processes, Packaging,and Systems, Melbourne, Australia, December 16-18, 2002
  • Analyses of ATP and ATP-conjugated metabolites by microchip-based capillary electrophoresis with bioluminescence detection
    Bi-Feng Liu, Motoaki Ozaki, Yuichi Utsumi, Tadashi Hattori and Shigeru Terabe
    16th International Symposium on Microscale Separations and Analysis (HPCE 2003), San Diego, USA, January 17-22, 2003
平成13年度
  • An approach to three-dimensional microstructure fabrication utilizing hard x-ray lithography of synchrotron radiation
    Tadashi Hattori, Harutaka Mekaru, and Yuichi Utsumi
    Rev Sci Instrum, 73(3), (2002) 1376-1378
  • Synthesis of ammonium and organic compounds from N2, H2O vapor, and CO2 gas mixtures by synchrotron radiation induced photochemical reactions at atmospheric pressure and at room temperature
    Yuichi Utsumi and Tadashi Hattori
    Rev Sci Instrum, 73(3), (2002) 1387-1389
  • Present status of synchrotron radiation facility "NewSUBARU"
    S.Hashimoto, A. Ando, S. Amano, Y. Haruyama, T. Hattori, K. Kanda, H. Kinoshita, S. Matsui, H. Mekaru, S. Miyamoto, T. Mochizuki, M. Niibe, Y. Shoji, Y. Utsumi, T. Watanabe and H. Tsubakino
    Trans. MRS-J, 26(2), (2001) 783-786
  • Application of Synchrotron Radiation to Microfabrication
    Yuichi Utsumi, Harutaka Mekaru and Tadashi Hattori
    Trans. MRS-J, 26(2), (2001) 763-766
  • A Study of X-ray Masks for Deep Lithography
    S. Iwamoto, K. Maenaka, Y. Utsumi, T. Hattori and T. Matsuda
    18th Sensor Symposium 2001, Kawasaki, Japan, May 29-30, 2001
  • A New Approach to Microfabrication Using Synchrotron Radiation Induced Photochemical Reaction
    Yuichi Utsumi and Tadashi Hattori
    18th Sensor Symposium 2001, Kawasaki, Japan, May 29-30, 2001
  • X-ray Masks for Deep Lithography
    K. Maenaka, S. Ioku, S. Iwamoto, Y. Utsumi and T. Hattori
    International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001
  • Quasi 3D Microstructure Fabrication Technique Utilizing Hard X-Ray Lithography of Synchrotron Radiation
    Tadashi Hattori, Harutaka Mekaru and Yuichi Utsumi
    International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001
  • A New Approach to Microfabrication and Synthesization using Synchrotron Radiation Excited Chemical Reaction
    Yuichi Utsumi and Tadashi Hattori
    International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001
  • A New Approach to 3D-Microstructure Fabrication Utilizing Hard X-ray Lithography of SR
    Tadashi Hattori, Harutaka Mekaru and Yuichi Utsumi
    12th U.S. National Synchrotron Radiation Instrumentation Conference, Madison, Wisconsin, USA, August 22-24, 2001
  • Synthesis of Ammonium and Organic Compounds from Air Component Gasses by Soft X-ray Induced Reactions at Atmospheric Pressure
    Yuichi Utsumi and Tadashi Hattori
    12th U.S. National Synchrotron Radiation Instrumentation Conference, Madison, Wisconsin, USA, August 22-24, 2001
  • Free Flow Electrophoresis Module For Rapid Sample Preparation
    Etsuo Shinohara, Nobuyoshi Tajima, Jun Funazaki, Koichi Tashiro, Shuichi Shoji, Yuichi Utsumi and Tadashi Hattori
    Micro Total Analysis Systems 2001, Monterey, California, USA, October 21-25, 2001
  • The Fabrication of Micro Molding Inserts by the LIGA Process using Synchrotron Radiation from NewSUBARU
    T. Kitadani, Y. Utsumi, S. Nakao and T. Hattori
    MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002
  • UV prototyping of PDMS micro capillary electrophoresis chips
    Yuichi Utsumi, Motoaki Ozaki, Sigeru Terabe and Tadashi Hattori
    MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002
  • Fabrication of X-ray Masks for Optical Switch Molding
    R. Maeda, X. C.shan, T. Ikehara, H. Mekaru and T. Hattori
    MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002
平成12年度
  • Beam line BL11 for LIGA process at the NewSUBARU
    Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori
    Nucl Instrum Methods Phys Res A, 467-468, (2001) 741-744
  • BMEにおける知的財産の強化
    服部正
    Bio Medical Enginnering,14(1),(2000) 51-54
  • Beam line BL11 for LIGA process at the NewSUBARU
    Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori
    7th International Conference on Synchrotron Radiation Instrumentation, Berlin, Germany, August 21-25, 2000
  • Application of Synchrotron Radiation to Microfabrication
    Yuichi Utsumi Harutaka Mekaru and Tadashi Hattori
    The 12th Symposium of The Materials Research Society of Japan, Kanagawa, Japan, December 7-8, 2000
  • Chemical application research using “NewSUBARU” 1.5Gev storage ring
    Yuichi Utsumi Harutaka Mekaru and Tadashi Hattori
    Symposium on Chemical Applications of Synchrotron Radiation, Honolulu, Hawaii, USA, December 14-19, 2000
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