SR-MEMS研究室 新着情報 研究設備 BL2 BL11 高度研 主な試作品 研究業績 　 平成22年度 　 平成21年度 　 平成20年度 　 平成19年度 　 平成18年度 　 平成17年度 　 平成15-16年度 　 平成12-14年度 リンク 兵庫県立大学 工学部・工学研究科 NewSUBARU その他 特定領域研究438 共同研究等の様式 CAST宿泊(減免書類) SPring-8 (株)ナノクリエート 現在位置：TOPページ >> 光応用・先端技術大講座 >> ナノマイクロシステム >> SR-MEMS研究室 ナノマイクロシステム分野 SR-MEMS研究室 研究業績リスト（学術論文および国際会議等） 平成16年度 Characterization of molecular transport in poly(dimethylsiloxane) microchannels for electrophoresis fabricated with synchrotron radiation-lithography and UV-photolithography Bi-Feng Liu, Motoaki Ozaki, Hideaki Hisamoto, Yuichi Utsumi, Tadashi Hattori, and Shigeru Terabe Lab on a Chip, 4(4), (2004) 368-371 Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada, and Tadashi Hattori Jpn. J. Appl. Phys, 43(6B), (2004) 4036-4040 Microfabrication by hot embossing and injection molding at LASTI H. Mekaru, T. Yamada and T. Hattori Microsystem Technologies, 10, (2004) 682-688 微細３次元加工技術の動向とその展開 服部正 日本設備管理学会誌，16(1)，(2004) 1-7 大気ホットエンボッシング成形での超音波振動による精密転写技術の開発 銘苅春隆，中村修，丸山修，服部正 日本設備管理学会誌，16(1)，(2004) 8-14 超感度厚膜レジストの新規開発 坂井信支，内海裕一，服部正 日本設備管理学会誌，16(1)，(2004) 15-19 放射光による大面積微細加工システム 内海裕一，岸本武文，銘苅春隆，服部正 日本設備管理学会誌，16(1)，(2004) 20-26 Study on microprobe processing by LIGA on Si Teppei Kimura and Tadashi Hattori IEEE Southwest Test Workshop, San Diego, CA, USA, June 6-9, 2004 Fabrication of Spiral Micro-Coil Utilizing LIGA Process Osamu Shimada, Shinji Kusumi, Harutaka Mekaru, Noriaki Sato, Michiru Yamashita and Tadashi Hattori The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004 Study on 3-dimentional Micro Probe Using X-ray Lithography Teppei Kimura and Tadashi Hattori The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004 The Large-area Deep X-ray Lithography System Using Synchrotron Radiation Yuichi Utsumi, Takefumi Kishimoto, Harutaka Mekaru and Tadashi Hattori The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004 Advanced X-ray Lithography System for Liga process Using Energy Variable Synchrotron Radiation Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara 4th International Workshop on Microfactories, Shanghai, China, October 15-17, 2004 Mechanical Characterization of Micron Thick UV LIGA Ni Films Using XRD Tensile Test Technique Takahiro Namazu, Shozo Inoue, Keiichi Takemura, Masaaki Ishibuchi, Keiji Koterazawa, Yuichi Utsumi and Tadashi Hattori 4th International Workshop on Microfactories, Shanghai, China, October 15-17, 2004 A New Micro Chemical Reactor Stack for Vertical Fluid Flow Operation Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, Katsuhiro Matsui, Masahiro Takeo and Seiji Negoro 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, October 27-29, 2004 Development of 3D-LIGA Process to Fabricate Spiral Microcoil Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, and Tadashi Hattori 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, October 27-29, 2004 平成15年度 A new approach to Microfabrication and synthesization using synchrotron radiation excited chemical reaction Yuichi Utsumi and Tadashi Hattori Microsystem Technologies, 9(5), (2003) 316-318 Fabrication of X-ray masks and applications for optical switch molding X.C.Shan, Ryutaro Maeda, Tuyoshi Ikehara, Harutaka Mekaru, and Tadashi Hattori Sensors and Actuators A, 108, (2003) 224-229 Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori Jpn. J. Appl. Phys., 42(6B), (2003) 3807-3810 Effects of Improved Microchannel Structures on the Separation Characteristics of Microchip Capillary Electrophoresis Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe, and Tadashi Hattori Jpn. J. Appl. Phys., 42(6B), (2003) 4098-4101 次世代アクチュエータの加工法 服部正 日本ロボット学会誌，21(7)，(2003) 748-751 超音波振動によるホットエンボッシングのアシスト処理 銘苅春隆，服部正，中村修，丸山修 超音波TECHNO，16(1)，(2004) 65-69 Advanced Ultra-Thick Negative Photoresist with High Sensitivity for X-Ray and UV Deep Lithography Nobuji Sakaia, Kentaro Tada, Yuichi Utsumi and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003 Microfabrication by Hot Embossing and Injection Molding at LASTI Harutaka Mekaru, Takashi Yamada, Song Yan and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003 3D Microstructure Fabrication for a High Luminosity Lighting-Panel Using Synchrotron Radiation Megumi Minamitani, Yuichi Utsumi, Yasutaro Tanaka and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003 Improvement of Capillary Electrophoresis Property for Microchannels Fabricated by Deep X-ray Lithography Yuichi Utsumi, Motoaki Ozaki, Sigeru Terabe and Tadashi Hattori Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003 The Fabrication of Nickel Micro Mold Inserts by the LIGA Process using Synchrotron Radiation from “NewSUBARU”(2) Takeshi Kitatani, Yuichi Utsumi and Tadashi Hattori 20th SENSOR SYMPOSIUM 2003, Tokyo, Japan, July 23-24, 2003 Fabrication of 3D microstructure by the X-ray intensity distribution control [6] Yoshihiro Fukuda, Hiroyasu Ueda, Kinji Takiguchi and Tadashi Hattori MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003 Comparison of the Performance of Polymer-Based Capillary Electrophoresis Microchips Fabricated by Using Resist Molds Prepared by Synchrotron Radiation Lithography and Ultraviolet Light Lithography Tsunemasa Saiki, Motoaki Ozaki, Yuichi Utsumi, Hideaki Hisamoto and Tadashi Hattori MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003 A High Luminosity Lighting-Panel for Liquid Crystal Displays fabricated by Deep X-ray Lithography Yuichi Utsumi, Megumi Minamitani and Tadashi Hattori MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003 3D Microstructure Fabrication for a Dot Array Micro-optics using Synchrotron Radiation Yuichi Utsumi, Megumi Minamitani, and Tadashi Hattori 2003 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, October 29-31, 2003 Fabrication of Mold Master for Spiral Micro-Coil Utilizing X-Ray Lithography of Synchrotron Radiation Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada and Tadashi Hattori 2003 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, October 29-31, 2003 ▲ページの先頭にもどる 　兵庫県立大学 高度産業科学技術研究所 　〒678-1205 　兵庫県赤穂郡上郡町光都３丁目１番２号　兵庫県立先端科学技術支援センター内 お問い合せ先 TEL:0791-58-0249 FAX:0791-58-0242