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research Fields

You can go ahead with various kinds of researches and developments using bright soft X-ray synchrotron lights in our facility. The major research fields in our facility are the following.

Research Fields

  • EUVL
  • Research and Development of Nano-micro fabrication and their Applications to MEMS, Nano-bio devices
  • Industrial use of material analysis
  • Applications of Laser Compton Gamma-ray
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