Using bright and high-quality soft X-ray of NewSUBARU, you can go ahead wih your researches.
The main research fields in our facility are as follows;
(1) Extreme Ultra Violet Lithography (EUVL)
(2) Research and development of Nano-micro fabricationn and their applications to MEMS, Nano-bio devices
(3) Industrial use of material analysis and surface modification using SR
(4) Applications of laser Compton γ-ray
How to use NewSUBARU facility:
contact us
advance arrangement with liaison
proposal submission
approval
etc.