For UsersFor Users

Operation Schedule

To check NewSUBARU operation schedule in Google Calendar, please click below button.

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Research Fields

Using bright and high-quality soft X-ray of NewSUBARU, you can go ahead wih your researches. The main research fields in our facility are as follows;
(1) Extreme Ultra Violet Lithography (EUVL)
(2) Research and development of Nano-micro fabricationn and their applications to MEMS, Nano-bio devices
(3) Industrial use of material analysis and surface modification using SR
(4) Applications of laser Compton γ-ray

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User Procedures

How to use NewSUBARU facility:
contact us
advance arrangement with liaison
proposal submission

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Calls for Research Proposals

Please submit your research proposal to study using NewSUBARU.

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Staff for User Support

We shall deliver all our support to facility users.
Please don't hesitate to ask us.

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