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Research Fields

Research and Development of Nano-micro fabrication and their Applications to MEMS, Nano-bio devices

We have research and development of Nano-micro system that is expected to be used in a wide range of high-tech industries such as manufacturing industry, advanced information and telecommunications, medical care, and environmental energy. We have experience in a number of large industry-academia collaboration projects. Our beam line is the only equipment that can be achieve three-dimensional microfabrication on A4-size at μm or less level. We have also established a series of production processes from precise mold inserts to plastic molding. We have also proposed and demonstrated the Bio-Devices which integrate the functionality using three-dimensional structure.

8x8 optical switch (Left photo)

The optical switch for terminal instruments. The most important parts such as mirrors to switch light path and electrostatic cantilevers were made by synchrotron radiation, and this achieves high-precision motion.

Integrated micro chip for DNA analysis (Right photo)

We have integrated the multi DNA analysis chip which consists of 96 electrophoresis units in an area of the world's smallest 9mm×9mm on the traditional microtiter plate format. Also we have succeeded to reduce diffusion of sample plug, and have increased the separating resolution to 20bp.

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