当施設では、放射光を用いた様々な研究活動を行っております。
ここで生まれる成果は、世界的にも評価を頂いております。
発表論文の一部を、ご紹介いたします。
2012年度 論文リスト
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1. D. Li, M. Hangyo, Y. Tsunawaki, Z. Yang, Y. Wei, S. Miyamoto, M. R. Asakawa, and K. Imasaki
“Growth rate and start current in Smith-Purcell free-electron lasers”
Appl. Phys. Lett. 100, 191101-1-3(2012). -
2. D. Li, M. Hangyo, Y. Tsunawaki, Z. Yang, Y. Wei, S. Miyamoto, M. R. Asakawa and K. Imasaki
“Theoretical Analysis on Smith-Purcell Free-Electron Laser”
“Free Electron Lasers”
Edited by Sandro Varro, INTECHWEB.ORG, Janeza Trdine 9, 51000 Rijeka, Croatia, March 2012,
ISBN:978-953-51-0279-3. Chapter 6, pp151-174 (2012). -
3. Tomoaki Inoue, Takayasu Mochizuki, Shuji Miyamoto, Kazuya Masuda, Sho Amano, and Kazuhiro
Kanda
“Characteristics of a Cylindrical Collector Mirror for Laser^Produced Xenon Plasma Soft X-Rays and
Improvement of Mirror Lifetime by Buffer Gas”
Review of Scientific Instruments, v.83, no.12, 123110-15 (2012). -
4. S. Amano, T. Inoue
“Laser-plasma extreme-ultraviolet source at 6.7nm using a rotating cryogenic Xe target”
Applied Physics B, Vol.108, 743-747(2012) -
5. Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi
“Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron
radiation to LIGA”
Microsystem Technologies, 19, 3, 301-307, (2013) -
6. Ryo Takahashi, Takao Fukuoka, Yuichi Utsumi, and Akinobu Yamaguchi
“Optofluidic Devices with Surface-Enhanced Raman Scattering Active Three- Dimensional Gold
Nanostructure”
Japanese Journal of Applied Physics, in press, (2013) -
7. 池内裕章，岸原充佳，内海裕一，河合正，太田勲
“放射光直接エッチングによるテフロン導波管横断回路の設計と試作”
電子情報通信学会論文誌(C), vol.J95-C, no.12, pp.531-534, Dec. 2012 -
8. Yasuharu Ohgoe, Kenji K. Hirakuri, Hidetoshi Saitoh, Takahiro Nakahigashi, Naoto Ohtake, Atsushi
Hirata, Kazuhiro Kanda, Masanori Hiratsuka, Yasuhiro Fukui
“Classification of DLC films in terms of biological response”
Surface & Coatings Technology, 207, 350-354 (2012) -
9. Tomoaki Inoue, Takayasu Mochizuki, Kazuya Masuda, Sho Amano, Tsugushima Sekioka, Kazuhiro
Kanda
“Effective collision cross section of xenon plasma debris in argon buffer gas”
J. Phys. B: At. Mol. Opt. Phys, 45, 115401 (2012) -
10. Akihiro Fujimoto, Makoto Okada, Yuji Kang, Masahito Niibe, Shinji Matsui,Kanda, Tsuneo Suzuki,
and Kazuhiro Kanda
“Effective collision cross section of xenon plasma debris in argon buffer gas”
Jpn. J. Appl. Phys., 51, 06FD07 (2012) -
11. Akira Wada, Katsuaki Koshimura, Masahito Niibe, Hidetoshi Saitoh, Kazuhiro Kanda, and Haruhiko
Ito
“Carbon-K NEXAFS measurements of a-CNx films formed from decomposition of BrCN in electron
cyclotron resonance plasma of He, Ne, and Ar”
Journal of Non-Crystalline Solids, 358, 124-128 (2012) -
12. Takeo Watanabe, Yuichi Haruyama, Daiju Shiono, Kazuya Emura, Takuro Urayama, Tetsuo Harada,
and Hiroo Kinoshita
“Chemical Reaction Analysis of EUV CA Resist using SR Absorption Spectroscopy”
J. Photopolymer Sci. Technol 25, 569, 2012. -
13. Yukiko Kikuchi, Eishi Shiobara, Hiroyuki Tanaka, Isamu Takagi, Kazuhiro Katayama, Norihiko
Sugie, Toshiya Takahashi, Soichi Inoue, Tekeo Watanabe, Tetsuo Harada, and Hiroo Kinoshita
“Study of EUV outgassing spatial distribution toward witness plate in the EUV outgas tester”
SPIE Proc. 8679, 86790M, 2012. -
14. Mitsunori Toyoda, Kenjiro Yamasoe, Tadashi Hatano, Mihiro Yanagihara, Akifumi Tokimasa,
Tetsuo Harada, Takeo Watanabe, and Hiroo Kinoshita “At-Wavelength Extreme Ultraviolet
Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer
Mirrors”
Appl. Phys. Exp. 5, 112501, 2012. -
15. Yutaka Nagata, Tetsuo Harada, Masato Nakasuji, Hiroo Kinoshita, Katsumi Midorikawa
“Development of highly spatial-coherent, 13.5-nm high-order harmonics for EUVL mask inspection
using coherent EUV scatterometry microscope”
IEEE, Photonics Conference Proceeding, 935-936, (2012). -
16. Tetsuo Harada, Masato Nakasuji, Takeo Watanabe, Yutaka Nagata, Hiroo Kinoshita
“Development of standalone coherent EUV scatterometry microscope with high-harmonic-generation
EUV source”
SPIE Proc. 8441, 8441-2, 2012. (invited paper) -
17. Masato Nakasuji, Akifumi Tokimasa, Tetsuo Harada, Yutaka Nagata, Takeo Watanabe, Katsumi
Midorikawa, Hiroo Kinoshita
“Development of Coherent Extreme-Ultraviolet Scatterometry Microscope with High-Order
Harmonic Generation Source for Extreme-Ultraviolet Mask Inspection and Metrology”
Jpn. J. Appl. Phys. 51, 06FB09, 2012. -
18. Tetsuo Harada, Masato Nakasuji, Akifumi Tokimasa, Takeo Watanabe, Youichi Usui, and Hiroo
Kinoshita
“Defect Characterization of an Extreme-Ultraviolet Mask Using a Coherent Extreme-Ultraviolet
Scatterometry Microscope”
Jpn. J. Appl. Phys. 51, 06FB08, 2012. -
19. 村松康司，潰田明信，原田哲男，木下博雄
ニュースバル多目的ビームラインBL-10における軟X線吸収分析（1）；分光特性評価と軽元素標準仕様
のXANES測定
X線分析の進歩 第43集，407, 2012. (in Japanese) -
20. 渡邊健夫，原田哲男，木下博雄
“EUVリソグラフィ研究開発センターにおけるリソグラフィ開発”
クリーンテクノロジー2012 年 6 月号, 2012. (in Japanese) -
21. Toshiya Takahashi, Norihiko Sugie, Kazuhiro Katayama, Isamu Takagi, Yukiko Kikuchi, Eishi
Shiobara, Hiroyuki Tanaka, Soichi Inoue, Takeo Watanabe, Tetsuo Harada, and Hiroo Kinoshita
“Resist outgassing characterization for qualification in high power EUV Lithography”
SPIE Proc. 8322, 83221E, 2012. -
22. 木下博雄
“ナノデバイス量産に向けた極端紫外線リソグラフィ技術の開発”
応用物理81, pp. 391-395, 2012. (in Japanese) -
23. M. Okada, M. Iwasa, H. Hiroshima, Y. Haruyama, K. Kanda, and S. Matsui
“Adhesion and frictional force measurements employing scanning probe microscopy in a
pentafluoropropane gas atmosphere”
J. Vac. Sci. Technol. B 30, 011601-3, 2012 -
24. S. Iyoshi, M. Okada, T. Katase, K. Tone, K. Kobayashi, S. Kaneko, Y. Haruyama, M. Nakagawa, H.
Hiroshima, and S. Matsui
“Step and Repeat Ultraviolet Nanoimprinting under Pentafluoropropane Gas Ambient”
Jpn. J. Appl. Phys. 51, 06FJ08-6, 2012 -
25. K Kanda, T Hasegawa, M Uemura, M Niibe, Y Haruyama, M. Motoyama, K Amemiya, S Fukushima,
and T Ohta
“Construction of a Wide-range High-resolution Beamline BL05 in NewSUBARU for Soft X-ray
Spectroscopic Analysis on Industrial Materials”
Journal of Physics: Conference Series 425, 132005, 2013 -
26. Masahito Niibe, Takuya Kotaka, Tohru Mitamura
”Investigation of analyzing depth of N-K absorption spectra measured using TEY and TFY method”
J. Phys.: Conf. Series, 425, 132008 (2013). -
27. Masahito Niibe, Keigo Koida, Yukinobu Kakutani
”Contamination expreiments for Mo/Si multilayer mirrors with the use of single-bunch synchrotron
radiation”
J. Phys.: Conf. Series,425, 132021 (2013). -
28. M. Niibe, K. Sano, T. Kotaka, R. Kawakami, K. Tominaga, Y. Nakano
”Etching Damage and Its Recovery by Soft X-ray Irradiation Observed in Soft X-ray Absorption
Spectra of TiO2 Thin Film”
J. Appl. Phys., 113, 126101 (2013). -
29. S. Hori, M. Niibe, T. Kotaka, K. Fujii, K. Yoshiki, T. Namazu and S. Inoue
”X-ray Absorption Studies on the Growth Process of RF Magnetron Sputtered BN Films: Bias
Voltage and Substrate Temperature Effects”
Jpn. J. Appl. Phys., 52, 045602 (2013). -
30. M. Niibe, T. Kotaka, R. Kawakami, Y. Nakano, T. Inaoka, K. Tominaga, T. Mukai
”Damage Analysis of n-GaN Crystal Etched with He and N2 Plasmas”
Jpn. J. Appl. Phys. 52, 01AF04 (2013). Ranked in the Top 20 Most Downloaded Articles in JJAP
(February 2013). -
31. Y. Nakano, K. Nakamura, M. Niibe, R. Kawakami, N. Ito, T. Kotaka, K. Tominaga
”Effect of UV Irradiation on Ar-Plasma Etching Characteristics of GaN”
ECS J. Solid State Sci. & Technol., 2, 110-113 (2013). -
32. R. Kawakami, A. Takeichi, M. Niibe, M. Konishi, Y. Mori, T. Kotaka, T. Inaoka, K. Tominaga, T.
Mukai
”Capacitively coupled radio frequency nitrogen plasma etch damage to N-type gallium nitride”
Vacuum 87, 136-140 (2013). -
33. S. Honda, S. Nanba, Y. Hasegawa, Y. Nosho, A. Tsukagoshi, M. Niibe, M. Terasawa, R. Hirase, H.
Izumi, H. Yoshioka, K-Y. Lee, K. Niwase, E. Taguchi, M. Oura
”Defect Evolution in Multiwalled Carbon Nanotube Films Irradiated by Ar Ions”
Jpn. J. Appl. Phys., 51 110202 (2012). -
34. R. Kawakami, M. Niibe, A. Takeichi, Y. Mori, M. Konishi, T. Kotaka, F. Matsunaga, T. Takasaki, T.
Kitano, T. Miyazaki, T. Inaoka, K. Tominaga
”Characteristics of TiO2 Thin Film Surfaces Treated by Helium and Air Dielectric Barrier Discharge
Plasma”
Jpn. J. Appl. Phys. 51, 08HB04 (2012). -
1. Yoshihiro ASANO, Shuji MIYAMOTO, and LEPS-II collaboration
"Shielding Design of Laser Electron Photon Beamlines at SPring-8"
"12th International Conference on Radiation Shielding(ICRS-12) & Topical Meeting of RPS Division
of American Nuclear Society (RPSD-2012)"
September 2-7, 2012, Nara Prefectural New Public Hall, Nara, Japan -
2. Shuji Miyamoto
"Gamma-ray Beambeamline on NewSUBARU"
"Science and Technology with MeV Photons at Canadian Light Source", Uiv. of Saskatuwan,
Jan. 18-19 (2013). -
3. S.Amano, and T.Inoue,
“Diamond-Like Carbon Sputtering by Laser Produced Xe Plasma”
8thInternational Symposium on Swift Heavy Ions in Matter (SHIM2012), Kyoto, Oct.24-27, 2012. -
4. T.Sekioka, S.Amano, T.Inoue, and T.Mochizuki
“Characteristics of Fast Ions from Laser-Induced Plasma and their Applicability to Shallow Junction
Doping”
8th International Symposium on Swift Heavy Ions in Matter (SHIM2012), Kyoto, Oct.24-27, 2012. -
5. Hiroki Nose, Masaki Ishizawa, Kazuhisa Kuroda, Takeshi Kunisada, Masatoshi Kataoka, Yuichi
Utsumi
“Blood separation chip for automated biological analysis”
RSC(Royal Society of Chemistry) Tokyo International Conference, pp12, September 6-7 (2012),
Chiba, Japan -
6. Ryo Takahashi, Takao Fukuoka, Yuichi Utsumi
“ERS Active Self-assembled Nanostructures toward Higher Dimension III: Sterically-bulky Self
Assembles Array”
RSC(Royal Society of Chemistry) Tokyo International Conference, p12, September 6-7 (2012),
Chiba, Japan -
7. Takao Fukuoka, Ryo Takahashi, Yuichi Utsumi, Motofumi Suzuki
“SERS Active Self-assembled Nanostructures toward Higher Dimension II : Physically Self
assembled Nanoparticles Array”
RSC(Royal Society of Chemistry) Tokyo International Conference, p11, September 6-7 (2012),
Chiba, Japan -
8. Ryo Takahashi, Takao Fukuoka, Yuichi Utsumi
“Three Dimensional Gold Nanostructure for Plasmonic Sensing”
Gold Science Technology and its Applications, the 6th International Conference, 2P-043, September
5-8 (2012), Tokyo, Japan -
9. Yuji Yoritama, T. Uchiyama , Akinobu Yamaguchi, Yuichi Utsumi
“Fabrication of Integrated Magneto Impedance Sensor for Medical Monitoring”
38th International Conference on Micro and Nano Engineering (MNE2012) , p298-378, September
16-20 (2012), Toulouse, France -
10. Masaki Ishizawa, Yuichi Utsumi
“Contamination-Free Internally-Triggered Automatic Flow Sequencing for Microfluidics”
38th International Conference on Micro and Nano Engineering (MNE2012) , p338-313, September
16-20 (2012), Toulouse, France -
11. Hideki Kido, Yuichi Utsumi, Toshihiko Asami, Hajime Mita
“Fabrication of fluorocarbon resin micro fluidic chip for processing of amino acid derivatization”
38th International Conference on Micro and Nano Engineering (MNE2012), p342-339, September
16-20 (2012), Toulouse, France -
12. Ryo Takahashi, Takao Fukuoka, Yuichi Utsumi
“SERS Active Three Dimensional Gold Nanostructure Fabrication for Optofluidic Device”
38th International Conference on Micro and Nano Engineering (MNE2012), p343-346, September
16-20 (2012), Toulouse, France -
13. Ryo Takahashi, Mitsuhiro Yoshida, Yuichi Utsumi
“Single Molecule Detection Using Sterically-bulky Self Assembles of Gold Nanoparticles”
38th International Conference on Micro and Nano Engineering (MNE2012), p123-546, September
16-20 (2012), Toulouse, France -
14. Tsunemasa Saiki, Yasuto Arisue, Kei Kuramoto, Hiroo Shizuka, Masahiro Takeo, Kazusuke
Maenaka, Yuichi Utsumi
“Direction Control of Powder Transport on Solid Substrate by Drive Frequency of Surface Acoustic
Wave Actuator”
38th International Conference on Micro and Nano Engineering (MNE2012), p279-022, September
16-20 (2012), Toulouse, France -
15. Yoshiaki Ukita, Takayuki Oguro, Masaki Ishizawa, Hiroki Nose, Yuichi Utsumi, Yuzuru Takamura
“Visualization of Biological Fluid Behaviour on Spinning Centrifugal Microfluidics using Coaxial
Micro-Stroboscope”
38th International Conference on Micro and Nano Engineering (MNE2012), p398-304, September
16-20 (2012), Toulouse, France -
16. Y. Kang, R. Takahashi, T. Fukuoka, Y. Utsumi, Y. Haruyama, and S. Matsui
“Self-assembly of gold nanoparticles using imprinted HSQ pattern for SERS measuremen”
11th International Conference on Nanoimprint and Nanoprint Technology (NNT12), October 24-26,
Napa, USA -
17. Masahiro Takeo, Isao Kawaji, Akihiro Nakasuji, Takaaki Tone, Yoshiaki Ukita, Dai-ichiro Kato,
Seiji Negoro, Shinichi Yusa, Makoto Katayama, Yuichi Utsumi
“Automatic ELISA Analytical System for a Trace Amount of Environmental Chemicals Using A
3-Dimensional Microreactor with a Novel Antigen-Bound Microfilter”
16th International Conference on Miniaturizes Systems for Chemistry and Life Sciene(μTAS).
p1192-1164, October 28-November 1 (2012), Okinawa, Japan -
18. Yoshiaki Ukita, Masaki Ishizawa, Yuzuru Takamura, Yuichi Utsumi
“Internally Triggerd Multistep Flow Sequencers Using Clepsydra”
16th International Conference on Miniaturized Systems for Chemistry and Life Science (μTAS),
p-1467, October 28- November 1 (2012), Okinawa, Japan -
19. Kyuya Nakagawa, Akihiro Tamura, Yuki Goto, Masahiro Takeo, Yuichi Utsumi
“Preparation of Freeze-Dried Porous Media in a Microchannel: A New Platform for Enzymatic
Reactions”
16th International Conference on Miniaturized Systems for Chemistry and Life Science (μTAS),
p1765-1767, October 28- November 1 (2012), Okinawa, Japan -
20. Hideki Kido, Ikuo Okada, Yuichi Utsumi, Toshihiko Asami, Hajime Mita
“Fabrication of PTFE micro fluidic chip for processing of amino acid derivatization”
25th International Microprocesses and Nanotechnology Conference (MNC2012), 2P-11-91, October
30-Nobember 2 (2012), Kobe, Japan -
21. Yasuto Arisue, Tsunemasa Saiki, Kei Kuramoto, Yutaka Hata, Hiroo Shizuka, Kazusuke Maenaka,
Yuichi Utsumi
“Proposal of Particle Size Sorting Method by Surface Acoustic Wave”
25th International Microprocesses and Nanotechnology Conference (MNC2012), 2P-11-96, October
30-Nobember 2 (2012), Kobe, Japan
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22. Masaki Ishizawa, Yuichi Utsumi
“Clepsydra-based Autonomous Flow Sequencer with Liquid Trap Reservoir”
25th International Microprocesses and Nanotechnology Conference (MNC2012), 2P-11-92, October
30-Nobember 2 (2012), Kobe, Japan -
23. Ryo Takahashi, Takao Fukuoka, Yuichi Utsumi
“Optofluidic Device with SERS Active Three Dimensional Gold Nanostructure”
25th International Microprocesses and Nanotechnology Conference (MNC2012), 2P-11-102, October
30-Nobember 2 (2012), Kobe, Japan -
24. Tetsuo Harada, Masato Nakasuji, Takeo Watanabe, Hiroo Kinoshita, Yutaka Nagata
“Development of Standalone Coherent EUV Scatterometry Microscope for EUV Mask Observation”
EIPBN2012, Hilton Waikoloa Village, Hawaii, USA, 2012/05/30. -
25. Mitsunori Toyoda, Kenji Yamasoe, Tadashi Hatano, Mihiro Yanagihara, Akifumi Tokimasa, Tetsuo
Harada, Takeo Watanabe, and Hiroo Kinoshita
“At-Wavelength EUV Lithography Mask Observation Using a High-Magnification Objective with
Three Multilayer Mirrors”
EIPBN2012, Hilton Waikoloa Village, Hawaii, USA, 2012/05/30. -
26. Takeo Watanabe, Yukiko Kikuchi, Toshiya Takahashi, Kazuhiro Katayama, Isamu Takagi, Norihiko
Sugie, Hiroyuki Tanaka, Eishi Shiobara, Soichi Inoue, Testuo Harada, and Hiroo Kinoshita
“Development of the Novel Evaluation Tool with an In-situ Ellipsometer for the Thickness
Measurement of the Contamination Originated by the High Power EUV Irradiation on EUV Resist”
2012 International Workshop on EUV Lithography, Maui, Hawaii, USA, 2012/6/6. -
27. Takeo Watanabe, Daiju Shiono, Yuichi Haruyama, Tetsuo Harada, and Hiroo Kinoshita
“Chemical Reaction Analysis based on the SR Absorption Spectroscopy for the High Sensitive EUV
Resist”
2012 International Workshop on EUV Lithography, Maui, Hawaii, USA, 2012/6/6. -
28. Hiroo Kinoshita
“Possibility of EUVL system at the Wavelength of 6.8 nm”
2012 International Workshop on EUV Lithography, Maui, Hawaii, USA, 2012/6/6. -
29. Hiroo Kinoshita, Tetsuo Harada, Yutaka Nagata, Mitsunori Toyoda, and Takeo Watanabe
“Development of Actinic Mask Inspection Systems”
2012 International Workshop on EUV Lithography, Maui, Hawaii, USA, 2012/6/6. -
30. K. Tsubakimoto, H. Yoshida, H. Fujita, N. Miyanaga, Y. Nagata, H. Kinoshita
“240W, 10kHz Green Laser from Harmonic Converted Nd:YAG MOPA”
Advanced Lasers and Photon Sources 2012, Yokohama, Japan, Apr. 25-27, 2012. -
31. Tetsuo Harada, Masato Nakasuji, Takeo Watanabe, Yutaka Nagata, Hiroo Kinoshita
“Development of Coherent EUV Scatterometry Microscope with High Harmonic Generation EUV
Source”
2012 International Symposium on Extreme Ultraviolet Lithography, Brussel, Belgium,
Sept. 30 ? Oct. 4, 2012. -
32. Takeo Watanabe, Daiju Shiono, Yuuichi Haruyama, Kazuya Emura, Takuro Urayama, Katsumi
Ohmori, Kazufumi Sato, Tetsuya Harada, and Hiroo Kinoshita
“The Mitigation of EUV Resist for the High Sensitivity and the Effect of Acid Diffusion for LWR on
the basis of the Chemical Reaction Analysis”
2012 International Symposium on Extreme Ultraviolet Lithography, Brussel, Belgium, Sept. 30 ?
Oct. 4, 2012. -
33. Yukiko Kikuchi, Toshiya Takahashi, Norihiko Sugie, Takeo Watanabe, Tetsuo Harada, Hiroo
Kinoshita, Kazuhiro Katyama, Isamu Takagi, Eishi Shiobara, Hiroyuki Tanaka, and Soichi Inoue
“The Characterization of the Witness Sample Testing for the Outgassing Qualification of EUV
Resists”
2012 International Symposium on Extreme Ultraviolet Lithography, Brussel, Belgium, Sept. 30 ?
Oct. 4, 2012. -
34. Isamu Takagi, Toshiya Takahashi, Norihiko Sugie, Takeo Watanabe, Tetsuo Harada, Hiroo
Kinoshita, Kazuhiro Katayama, Yukiko Kikuchi, Eishi Shiobara, Hiroyuki Tanaka, and Soichi Inoue
“Study of Contamination due to EUV Resist Outgassing”
2012 International Symposium on Extreme Ultraviolet Lithography, Brussel, Belgium, Sept. 30 ?
Oct. 4, 2012. -
35. Hiroo Kinoshita, Takeo Watanabe, Tetsuo Harada
“Recent Activities on EUVL in NewSUBARU”
Micro Nano Conference, Kobe, Japan, Nov. 1, 2012. -
36. Tetsuo Harada, Masato Nakasuji, Yutaka Nagata, Takeo Watanabe, and Hiroo Kinoshita
“Phase Imaging of EUV Mask using Coherent EUV Scatterometry Microscope”
Micro Nano Conference, Kobe, Japan, Nov. 1, 2012. -
37. Takeo Watanabe, Daiju Shiono, Yuichi Haruyama, Kazuya Emura, Takuro Urayama, Katsumi
Ohmori, Kazufumi Sato, Tetsuo Harada, and Hiroo Kinoshita
“The Analytical Mitigation of EUV Resist for the High Sensitivity and the Low LWR using SR
Absorption Spectroscopy”
Micro Nano Conference, Kobe, Japan, Nov. 1, 2012. -
38. Mitsunori Toyoda, Kenji Yamasoe, Tadashi Hatano, Mihiro Yanagihara, Akifumi Tokimasa Tetsuo
Harada, Hiroo Kinoshita, Tsuyoshi Amano, and Tsuneo Terasawa “An EUV mask-imaging
microscope for lithography generations with sub-16 nm half pitch”
Micro Nano Conference, Kobe, Japan, Nov. 1, 2012. -
39. Y. Kang, R. Takahashi, T. Fukuoka, Y. Utsumi, M. Okada, Y. Haruyama, S. Matsui
“Gold nanoparticles self-assembly assisted with imprinted HSQ pattern for SERS measurement”
25th International Microprocesses and Nanotechnology Conference (MNC2012), 2P-11-78, October
30-Nobember 2 (2012), Kobe, Japan -
40. Hiroki Nose, Masaki Ishizawa, Takeshi Kunisada, Kazuhisa Kuroda, Akinobu Yamaguchi, Yuichi
Utsumi
“Blood separation lab-on-a-CD with controlled surface”
7th International Conference on Molecular Electronics and Bioelectronics (M&BE7), pp89, March
17-19 (2013), Fukuoka, Japan -
41. Yuji Yoritama, S. Yamamoto, T. Uchiyama , Akinobu Yamaguchi, Yuichi Utsumi
“Three-Dimensional Magneto Impedance Sensor using a Multi Layers Electroplating technique”
7th International Conference on Molecular Electronics and Bioelectronics (M&BE7), pp178, March
17-19 (2013), Fukuoka, Japan -
42. Mitsuyoshi Kishihara, M. Yamashima, Yuichi Utsumi
“A Chip-Size Structure for Continuous Microwave Irradiation by Post-Wall Waveguide”
Proc. of 2012 Asia-Pacific Microwave Conference, 2D3-01, pp.265-267, December 4-7 (2012),
Kaohsiung, Taiwan -
43. Ryo Imai, Kazuhiro Fukuda, Masaharu Uemura, Takayuki Hasegawa, Muneyuki Motoyama, Mititaka
Terasawa, Kazuhiro Kanda
“The Classification of Diamond-Like Carbon Thin Films Using BL05 in NewSUBARU”
Royal Society of Chemistry-Tokyo International Conference 2012 (RSC-TIC 2012), Chiba,
2012/9/6-7 -
44. M.Uemura, T.Hasegawa, M.Sawa, N.Yokoi, N.Fukada, M.Shimizu, T.Tsurui, K.Amemiya, T.Ohta,
M.Motoyama, K.Kanda, S.Fukushima
“L-edge for the 1st period transition elements”
The 14th European Conference on X-Ray Spectrometry (EXES 2012), Vienna, 2012/6/18-22 -
45. T.Hasegawa, M.Uemura, T. Tanigawa, M.Sawa, N.Yokoi, N.Fukada, M.Shimizu, T.Tsurui,
K.Amemiya, T.Ohta, M.Motoyama, K.Kanda, S.Fukushima
“K and L-edge Spectra of Several Sulfur Compounds”
The 14th European Conference on X-Ray Spectrometry (EXES 2012), Vienna, 2012/6/18-22 -
46. K. Kanda, T. Hasegawa, M. Uemura, M. Niibe, Y. Haruyama, M. Motoyama, K. Amemiya,
S. Fukushima, and T. Ohta
“Construction of a Wide-range High-resolution Beamline BL05 in NewSUBARU for Soft X-ray
Spectroscopic Analysis on Industrial Materials”
The 11th International Conference on Synchrotron Radiation Instrumentation (SRI 2012), Lyon,
2012/7/9-13 -
47. Y. Nakano, K. Nakamura, M. Niibe, R. Kawakami, N. Ito, T. Kotaka, K. Tominaga
”Effect of UV Irradiation on Ar-Plasma Etching Characteristics of GaN”
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and
Nanomaterials, January 28-February1 (2013), Nagoya, Japan. -
48. Y Nakano, M. Niibe, M. Lozac’h, L. Sang, M. Sumiya
”Deep level investigation of thick InGaN films”
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and ,
Nanomaterials, January 28-February1 (2013), Nagoya, Japan. -
49. S. Honda, Y. Nosho, A. Tsukagoshi, H. Okada, M. Niibe, M. Terasawa, R. Hirase, H. Yoshioka, H.
Izumi, K. Niwase, E. Taguchi, K.-Y. Lee and M. Oura
”Change of Diameters of Multi-walled Carbon Nanotubes by Multiply Charged Ar Ion Irradiation”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
50. S. Honda, Y. Nosho, A. Tsukagoshi, S. Miyamoto, M. Niibe, M. Terasawa, T. Tokushima, Y.
Horikawa, R. Hirase, H. Yoshioka, H. Izumi, K. Niwase, E. Taguchi, K.-Y. Lee and M. Oura: -
51. ”Analysis of the C1s X-ray photoelectron Spectrum and C K? X-ray Emission Spectrum of Multi
walled Carbon Nanotubes Irradiated by Multiply Charged Ar Ion”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
52. R. Kawakami, M. Niibe, H. Takeuchi, M. Konishi, Y. Mori, T. Shirahama, T. Yamada K. Tominaga
”SiC Surface Damage Originating from Synergy Effect of Ar Plasma Ion and Plasma-Induced
Ultraviolet Light Irradiations”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
53. A. Tsukagoshi, R. Osugi, H. Okada, S. Honda, M. Niibe, M. Terasawa, R. Hirase, H. Yoshioka,
H. Izumi, K. Niwase, E. Taguchi, K.-Y. Lee and M. Oura
”Spectroscopic Characterization of Ion-irradiated Multi-layer Graphenes”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
54. S. Honda, Y. Nosho, A. Tsukagoshi, R. Mukouda, M. Niibe, M. Terasawa, R. Hirase, H. Yoshioka,
H. Izumi, K. Niwase, E. Taguchi, K.-Y. Lee and M. Oura
”Raman and X-ray Absorption Spectroscopic Study on Defects in Vartically Aligned Multi-walled
Carbon Nanotubes irradiated with Ar Ions”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
55. M. Niibe, T. Kotaka, K. Sano, R. Kawakami, K. Tominaga, Y. Nakano
”Etching Damage Analysis of TiO2 Thin Film with Soft X-ray Absorption Spectroscpy”
25th International Conf. on Atomic Collisions in Solids, Oct. 21-25 (2012), Kyoto, Japan. -
56. Y. Nakano, K. Nakamura, M. Niibe, R. Kawakami, N. Ito, T. Kotaka, K. Tominaga
”Effect of UV irradiation on Ar-plasma etching of GaN”
International Workshop on Nitride Semiconductors 2012, October 14-19 (2012), Sapporo, Japan. -
57. S.Honda, Y.Nosho, A.Tsukagoshi, S.Miyamoto, M.Niibe, M.Terasawa, T.Tokushima, Y.Horikawa,
R.Hirase, H.Yoshioka, H.Izumi, K.Niwase, E.Taguchi, K,-Y.Lee, and M.Oura
“Electronic Structure of Multi-walled Carbon Nanotubes Irradiated by Multiply Charged Ar Ions”
12th International Conference on Electronic Spectroscopy and Structure (ICESS 2012), Sait-Malo,
France, September 16-21, 2012. -
58. M. Niibe, T. Kotaka, T. Mitamura
”Investigation of analyzing depth of N-K absorption spectra measured by TEY and TFY metthods.,
11th Int’l. Conf. on Syncrotron Rad. Instrum., 9-13 July (2012), Lyon, France. -
59. M. Niibe, K. Koida, Y. Kakutani
”Contamination Experiment for Mo/Si Multilayer Mirrors with the use of Single-bunch Synchrotron
Radiation”
11th Int’l. Conf. on Syncrotron Rad. Instrum., 9-13 July (2012), Lyon, France. -
60. Y. Kang, Y. Nakai, M. Okada, Y. Haruyama and S. Matsui
“Characteristics of mechanical vibration in imprinted nanostructures”
The 56th International Conference on electron, ion, photon beam technology and fabrication,
Hawaii, 2012/5/30 -
61. M. Okada, M. Kurita, E. Nishioka, M. Kondo, Y. Haruyama, A. Emoto, H. Ono, N. Kawatsuki and S.
Matsui
“Pattern-size Effect of Reorientation of Photoinduced Liquid Crystalline Polymer by Thermal
Nanoimprinting”
The 56th International Conference on electron, ion, photon beam technology and fabrication,
Hawaii, 2012/5/30 -
62. M. Okada, M. Kurita, E. Nishioka, M. Kondo, Y. Haruyama, A. Emoto, H. Ono, N. Kawatsuki and S.
Matsui
“Reorientation Evaluation of Bidirectional Line Pattern on Photoinduced Liquid Crystalline Polymer
Fabricated by Thermal Nanoimprinting”
The 56th International Conference on electron, ion, photon beam technology and fabrication,
Hawaii, 2012/5/30 -
63. S. Iyoshi, M. Okada, Y. Haruyama, S. Matsui, K. Kobayashi, S. Kaneko, M. Nakagawa, H.
Hiroshima
“Study of demolding Characteristics in continuous UV nanoimprinting”
The 56th International Conference on electron, ion, photon beam technology and fabrication,
Hawaii, 2012/5/30 -
64. K. Kanda, T. Hasegawa, M. Uemura, M. Niibe, Y. Haruyama, K. Amemiya, S. Fukushima, T. Ohta
“Construction of a Wide-range High-resolution Beamline BL05 in NewSUBARU for Soft X-ray
Spectroscopic Analysis on Industrial Materials”
The 11th International Conference on Synchrotron Radiation Instrumentation, Lyon, France,
2012/7/12 -
65. Y. Haruyama, M. Okada, T. Ishida, S. Matsui
“Evaluation of the fluorinated self-assemble monolayer by using photoemission and absorption
spectroscopy”
Asian Conference on Nanoscience & Nanotechnology 2012, Lijiang, China, 2012/9/7 -
66. Y. Haruyama, M. Okada, and S. Matsui
“The electronic structure of the fluorinated self-assemble monolayer by photoemission and
absorption spectroscopy”
The 12th International Conference on Electron Spectroscopy and Structure, Saint-Malo, France,
2012/9/17 -
67. M. Okada, E. Nishioka, M. Kondo, Y. Haruyama, T, Sasaki, H. Ono, N. Kawatsuki and S. Matsui
“Reorientation Pattern Of Photoinduced Liquid Crystalline Polymer Imprinted By Thermal
Nanoimprinting Using A Dot Pattern Mold”
The 38th International Micro & Nano Engineering Conference, Toulouse, France, 2012/9/17 -
68. Y. Kang, M. Okada, Y. Haruyama and S. Matsui
“Residual Layer Removal By Reactive Ion Etching”
The 38th International Micro & Nano Engineering Conference, Toulouse, France, 2012/9/17 -
69. M. Okada, Y. Haruyama, and S. Matsui
“Frictional Force Measurement By Scanning Probe Microscopy Using Cantilever With And Without
Antisticking Layer”
The 38th International Micro & Nano Engineering Conference, Toulouse, France, 2012/9/17 -
70. M. Okada, E. Nishioka, M. Kondo, Y. Haruyama, T, Sasaki, H. Ono, N. Kawatsuki and S. Matsui
“Reorientation of Photoinduced Liquid Crystalline Polymer Induced by Thermal Nanoimprinting with
Linearly Polarized UV Irradiation”
The 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, USA,
2012/10/25 -
71. M. Okada, Y. Haruyama, and S. Matsui
“Evaluation of interaction between antisticking layer and UV nanoimprint resin by scanning
probe microscopy”
The 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, USA,
2012/10/25 -
72. Y. Kang, R. Takahashi, T. Fukuoka, Y. Utsumi, M. Okada, Y. Haruyama, and S. Matsui
“Self-assembly of gold particles using imprinted HSQ pattern for SERS measurement”
The 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, USA,
2012/10/26 -
73. S. Iyoshi, M. Okada, K. Kobayashi, S. Kaneko, T. Katase, K. Tone, Y. Haruyama, M. Nakagawa, H.
Hiroshima and S. Matsui
“ Study of the Resistance of Antisticking Layer on Repeated UV Nanoimprint”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/1 -
74. T. Watanabe, D. Shiono, Y. Haruyama, K. Emura, T. Urayama, K. Ohmori, K. Sato, T. Harada and
H.Kinoshita
“The Analytical Mitigation of EUV Resist for the High Sensitivity and the Low LWR using SR
Absorption Spectroscopy”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/1 -
75. M. Okada, E. Nishioka, M. Kondo, Y. Haruyama, T. Sasaki, H. Ono, N. Kawatsuki and S. Matsui
”Optical Evaluation of Photoinduced Liquid Crystalline Polymer Pattern fabricated by Thermal
Nanoimprinting with Linearly Polarized UV Irradiation”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/1 -
76. Y. Sawada, H. Miyake, T. Ohsaki, M. Okada, S. Iyoshi, Y. Haruyama, H. Hiroshima and S. Matsui
“Thickness Dependency of Polymerization Efficiency on UV-nanoimprint Resins”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/1 -
77. Y. Kang, R. Takahashi, T. Fukuoka, Y. Utsumi, M. Okada, Y. Haruyama and S. Matsui
“Gold Nanoparticles Self-assembly assisted with Imprinted HSQ Pattern for SERS Measurement”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/2 -
78. M. Chinen, Y. Kang, M. Okada, Y. Haruyama, H. Hiroshima and S. Matsui
“Evaluation of Interaction Force between UV Resin and F-SAMs by Dynamic Contact Angle
Measurement in PFP Gas Ambient”
25th International Microprocesses and Nanotechnology Conference, Kobe, 2012/11/2
(2)International Meetings
