NewSUBARU synchrotron radiation facility
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BL01: Laser Compton γ-ray
BL02: LIGA (larfe area exposure)
BL03: Extreme Ultra Violet lithography
BL05: Analysis for Industrial Applications
BL06: New Materials
BL07: Short Undulator
BL09: Long Undulator
BL10: General Purpose for EUV
BL11: LIGA
ELectron Storage Ring
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Extreme Ultra Violet Lithography
Research and development of Nano-micro fabrication and their applications to MEMS, Nano-bio devices
Industrial use of material analysis and surface modification using SR
Applications of laser Compton γ ray
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NewSUBARU synchrotron radiation facility
About us
For Users
Publications
Events
Contact us
Access
Privacy policy
Links
Site map
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