NewSUBARU synchrotron radiation facility

To check NewSUBARU operation schedule in Google Calendar, please click below button.

Using bright and high-quality soft X-ray of NewSUBARU, you can go ahead wih your researches. The main research fields in our facility are as follows;
(1) Extreme Ultra Violet Lithography (EUVL)
(2) Research and development of Nano-micro fabricationn and their applications to MEMS, Nano-bio devices
(3) Industrial use of material analysis and surface modification using SR
(4) Applications of laser Compton γ-ray

How to use NewSUBARU facility:
contact us
advance arrangement with liaison
proposal submission
approval
etc.

Please submit your research proposal to study using NewSUBARU.

We shall deliver all our support to facility users.
Please don't hesitate to ask us.