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研究業績リスト(学術論文および国際会議等) |
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平成16年度 |
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Characterization of molecular transport in poly(dimethylsiloxane) microchannels for electrophoresis fabricated with synchrotron radiation-lithography and UV-photolithography
Bi-Feng Liu, Motoaki Ozaki, Hideaki Hisamoto, Yuichi Utsumi, Tadashi Hattori, and Shigeru Terabe
Lab on a Chip, 4(4), (2004) 368-371
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Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada, and Tadashi Hattori
Jpn. J. Appl. Phys, 43(6B), (2004) 4036-4040
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Microfabrication by hot embossing and injection molding at LASTI
H. Mekaru, T. Yamada and T. Hattori
Microsystem Technologies, 10, (2004) 682-688
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微細3次元加工技術の動向とその展開
服部正
日本設備管理学会誌,16(1),(2004) 1-7
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大気ホットエンボッシング成形での超音波振動による精密転写技術の開発
銘苅春隆,中村修,丸山修,服部正
日本設備管理学会誌,16(1),(2004) 8-14
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超感度厚膜レジストの新規開発
坂井信支,内海裕一,服部正
日本設備管理学会誌,16(1),(2004) 15-19
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放射光による大面積微細加工システム
内海裕一,岸本武文,銘苅春隆,服部正
日本設備管理学会誌,16(1),(2004) 20-26
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Study on microprobe processing by LIGA on Si
Teppei Kimura and Tadashi Hattori
IEEE Southwest Test Workshop, San Diego, CA, USA, June 6-9, 2004
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Fabrication of Spiral Micro-Coil Utilizing LIGA Process
Osamu Shimada, Shinji Kusumi, Harutaka Mekaru, Noriaki Sato, Michiru Yamashita and Tadashi Hattori
The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004
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Study on 3-dimentional Micro Probe Using X-ray Lithography
Teppei Kimura and Tadashi Hattori
The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004
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The Large-area Deep X-ray Lithography System Using Synchrotron Radiation
Yuichi Utsumi, Takefumi Kishimoto, Harutaka Mekaru and Tadashi Hattori
The International Conference on Electrical Engineering 2004 (ICEE2004), Sapporo, Japan, July 4-6, 2004
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Advanced X-ray Lithography System for Liga process Using Energy Variable Synchrotron Radiation
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara
4th International Workshop on Microfactories, Shanghai, China, October 15-17, 2004
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Mechanical Characterization of Micron Thick UV LIGA Ni Films Using XRD Tensile Test Technique
Takahiro Namazu, Shozo Inoue, Keiichi Takemura, Masaaki Ishibuchi, Keiji Koterazawa, Yuichi Utsumi and Tadashi Hattori
4th International Workshop on Microfactories, Shanghai, China, October 15-17, 2004
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A New Micro Chemical Reactor Stack for Vertical Fluid Flow Operation
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, Katsuhiro Matsui, Masahiro Takeo and Seiji Negoro
2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, October 27-29, 2004
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Development of 3D-LIGA Process to Fabricate Spiral Microcoil
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, and Tadashi Hattori
2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, October 27-29, 2004
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平成15年度 |
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A new approach to Microfabrication and synthesization using synchrotron radiation excited chemical reaction
Yuichi Utsumi and Tadashi Hattori
Microsystem Technologies, 9(5), (2003) 316-318
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Fabrication of X-ray masks and applications for optical switch molding
X.C.Shan, Ryutaro Maeda, Tuyoshi Ikehara, Harutaka Mekaru, and Tadashi Hattori
Sensors and Actuators A, 108, (2003) 224-229
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Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography
Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori
Jpn. J. Appl. Phys., 42(6B), (2003) 3807-3810
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Effects of Improved Microchannel Structures on the Separation Characteristics of Microchip Capillary Electrophoresis
Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe, and Tadashi Hattori
Jpn. J. Appl. Phys., 42(6B), (2003) 4098-4101
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次世代アクチュエータの加工法
服部正
日本ロボット学会誌,21(7),(2003) 748-751
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超音波振動によるホットエンボッシングのアシスト処理
銘苅春隆,服部正,中村修,丸山修
超音波TECHNO,16(1),(2004) 65-69
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Advanced Ultra-Thick Negative Photoresist with High Sensitivity for X-Ray and UV Deep Lithography
Nobuji Sakaia, Kentaro Tada, Yuichi Utsumi and Tadashi Hattori
Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003
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Microfabrication by Hot Embossing and Injection Molding at LASTI
Harutaka Mekaru, Takashi Yamada, Song Yan and Tadashi Hattori
Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003
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3D Microstructure Fabrication for a High Luminosity Lighting-Panel Using Synchrotron Radiation
Megumi Minamitani, Yuichi Utsumi, Yasutaro Tanaka and Tadashi Hattori
Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003
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Improvement of Capillary Electrophoresis Property for Microchannels Fabricated by Deep X-ray Lithography
Yuichi Utsumi, Motoaki Ozaki, Sigeru Terabe and Tadashi Hattori
Iternational Workshop on High-Aspect-Ratio Micro-Structure Technology 2003, Monterey, California, USA, June 15-17, 2003
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The Fabrication of Nickel Micro Mold Inserts by the LIGA Process using Synchrotron Radiation from “NewSUBARU”(2)
Takeshi Kitatani, Yuichi Utsumi and Tadashi Hattori
20th SENSOR SYMPOSIUM 2003, Tokyo, Japan, July 23-24, 2003
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Fabrication of 3D microstructure by the X-ray intensity distribution control
[6] Yoshihiro Fukuda, Hiroyasu Ueda, Kinji Takiguchi and Tadashi Hattori
MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003
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Comparison of the Performance of Polymer-Based Capillary Electrophoresis Microchips Fabricated by Using Resist Molds Prepared by Synchrotron Radiation Lithography and Ultraviolet Light Lithography
Tsunemasa Saiki, Motoaki Ozaki, Yuichi Utsumi, Hideaki Hisamoto and Tadashi Hattori
MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003
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A High Luminosity Lighting-Panel for Liquid Crystal Displays fabricated by Deep X-ray Lithography
Yuichi Utsumi, Megumi Minamitani and Tadashi Hattori
MICRO SYSTEM Technologies 2003, Munich, Germany, October 7-8, 2003
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3D Microstructure Fabrication for a Dot Array Micro-optics using Synchrotron Radiation
Yuichi Utsumi, Megumi Minamitani, and Tadashi Hattori
2003 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, October 29-31, 2003
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Fabrication of Mold Master for Spiral Micro-Coil Utilizing X-Ray Lithography of Synchrotron Radiation
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Michiru Yamashita, Osamu Shimada and Tadashi Hattori
2003 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, October 29-31, 2003
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兵庫県立大学 高度産業科学技術研究所 |
〒678-1205
兵庫県赤穂郡上郡町光都3丁目1番2号 兵庫県立先端科学技術支援センター内 |
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お問い合せ先 |
TEL:0791-58-0249 |
FAX:0791-58-0242 |
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