SR-MEMS研究室 新着情報 研究設備 BL2 BL11 高度研 主な試作品 研究業績 　 平成22年度 　 平成21年度 　 平成20年度 　 平成19年度 　 平成18年度 　 平成17年度 　 平成15-16年度 　 平成12-14年度 リンク 兵庫県立大学 工学部・工学研究科 NewSUBARU その他 特定領域研究438 共同研究等の様式 CAST宿泊(減免書類) SPring-8 (株)ナノクリエート 現在位置：TOPページ >> 光応用・先端技術大講座 >> ナノマイクロシステム >> SR-MEMS研究室 ナノマイクロシステム分野 SR-MEMS研究室 研究業績リスト（学術論文および国際会議等） 平成14年度 Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography of synchrotron radiation Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori Microsystem Technologies, 9(1-2), (2002) 36-40 Chemiluminescence Detectionfora Microchip Capillary Electrophoresis System Fabricatedin Poly(dimethylsiloxane) Bi-FengLiu, Motoaki Ozaki, Yuichi Utsumi, Tadashi Hattori, and Shigeru Terabe Anal Chem, 75(1), (2003) 36-41 放射光のナノ･マイクロ加工技術への応用 服部正 溶接学会誌，71(3)，(2002) 135-144 放射光化学反応によるナノレベル・エピタキシャル成長 内海裕一，服部正 溶接学会誌，71(3)，(2002) 145-149 放射光LIGAプロセスによるマイクロ金型の作製 北谷武，内海裕一，服部正 溶接学会誌，71(3)， (2002) 150-153 ニュースバルの到達点 安東愛之輔，服部正，細野和彦，神田一浩，木下博雄，松井真二，銘苅春隆，新部正人，内海裕一，渡邉健夫 放射光学会誌，15(6)，(2002) 336-346 Fabrication of PDMS Micro Capillary Electrophoresis Chips Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe, Tadashi Hattori and Etsuo Shinohara 19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002 Surface Roughness of Microstructures Fabricated by LIGA Process Harutaka Mekaru, Takashi Yamada, Sho En and Tadashi Hattori 19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002 Fabrication of Nickel Micro Mold Inserts by the LIGA Process Using Synchrotron Radiation from “NewSUBARU” Takeshi Kitatani, Yuichi Utsumi and Tadashi Hattori 19th SENSOR SYMPOSIUM 2002, Kyoto, Japan, May 30-31, 2002 Fabrication of LIGA Masks and Applications for Optical Switch Molding X. C. Shan, R. Maeda, T. Ikehara, H. Mekaru and T. Hattori Pacific Rim Workshop on MEMS, Xiamen, China, July 22-24, 2002 Fabrication of plastic microchip for electrophoresis using UV polymerization Motoaki Ozaki, Yuichi Utsumi, Shigeru Terabe and Tadashi Hattori JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002 Optimization of Nickel Electroplating for High Aspect Ratio LIGA Mold Inserts Fabricated by Synchrotron Radiation from “NewSUBARU” Yuichi Utsumi, Takeshi Kitadani and Tadashi Hattori JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002 Current Status of LIGA Process at “NewSUBARU” Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002 Microfabrication of Microstructure object by plastic injection molding Song Yan, Takashi Yamada, Harutaka Mekaru, Tsuyoshi Asano, Hattori Tadashi and Noriaki Sato JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002 Design of a new Hot Embossing equipment for fabrication of microstructures Takashi Yamada, Harutaka Mekaru, Hiroyuki Ishigaki, Ryutaro Maeda and Tadashi Hattori JMSE/AMSE International Conference on Materials and Processing 2002, Hawaii, USA, October 15-18, 2002 A deep X-ray Lithography in the “NewSUBARU” Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori 2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002 Effects of improved microchannel structures to the separation characteristics of microchip capillary electrophoresis Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe and Tadashi Hattori 2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002 Microfabrication by hot embossing and injection molding in LIGA process Harutaka Mekaru, Takashi Yamada, Sho En and Tadashi Hattori 2002 International Microproceesses and Nanotechnology Conference, Tokyo, Japan, November 6-8, 2002 An Approach of High Efficiency Fuel Reformer Using High Aspect Metal Structure formed by Synchrotron Radiation LIGA Process Yuichi Utsumi and Tadashi Hattori International Workshop on Power MEMS, Tsukuba, Japan, Nov. 12-13, 2002 Promotion of New Industry in Kansai for Micro and Nano business Tadashi Hattori National Science Foundation Tri-National Workshop, Melbourne, Australia, December 12-14, 2002 Optimization of Au Mask Fabrication Process for LIGA Application X. C. Shan, R. Maeda, T. Ikehara, H. Mekaru and T. Hattori Materials, Processes, Packaging,and Systems, Melbourne, Australia, December 16-18, 2002 Analyses of ATP and ATP-conjugated metabolites by microchip-based capillary electrophoresis with bioluminescence detection Bi-Feng Liu, Motoaki Ozaki, Yuichi Utsumi, Tadashi Hattori and Shigeru Terabe 16th International Symposium on Microscale Separations and Analysis (HPCE 2003), San Diego, USA, January 17-22, 2003 平成13年度 An approach to three-dimensional microstructure fabrication utilizing hard x-ray lithography of synchrotron radiation Tadashi Hattori, Harutaka Mekaru, and Yuichi Utsumi Rev Sci Instrum, 73(3), (2002) 1376-1378 Synthesis of ammonium and organic compounds from N2, H2O vapor, and CO2 gas mixtures by synchrotron radiation induced photochemical reactions at atmospheric pressure and at room temperature Yuichi Utsumi and Tadashi Hattori Rev Sci Instrum, 73(3), (2002) 1387-1389 Present status of synchrotron radiation facility "NewSUBARU" S.Hashimoto, A. Ando, S. Amano, Y. Haruyama, T. Hattori, K. Kanda, H. Kinoshita, S. Matsui, H. Mekaru, S. Miyamoto, T. Mochizuki, M. Niibe, Y. Shoji, Y. Utsumi, T. Watanabe and H. Tsubakino Trans. MRS-J, 26(2), (2001) 783-786 Application of Synchrotron Radiation to Microfabrication Yuichi Utsumi, Harutaka Mekaru and Tadashi Hattori Trans. MRS-J, 26(2), (2001) 763-766 A Study of X-ray Masks for Deep Lithography S. Iwamoto, K. Maenaka, Y. Utsumi, T. Hattori and T. Matsuda 18th Sensor Symposium 2001, Kawasaki, Japan, May 29-30, 2001 A New Approach to Microfabrication Using Synchrotron Radiation Induced Photochemical Reaction Yuichi Utsumi and Tadashi Hattori 18th Sensor Symposium 2001, Kawasaki, Japan, May 29-30, 2001 X-ray Masks for Deep Lithography K. Maenaka, S. Ioku, S. Iwamoto, Y. Utsumi and T. Hattori International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001 Quasi 3D Microstructure Fabrication Technique Utilizing Hard X-Ray Lithography of Synchrotron Radiation Tadashi Hattori, Harutaka Mekaru and Yuichi Utsumi International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001 A New Approach to Microfabrication and Synthesization using Synchrotron Radiation Excited Chemical Reaction Yuichi Utsumi and Tadashi Hattori International Workshop on High Aspect Ratio Micro Structure Technology 2001, Barden-Barden, Germany, June 17-20, 2001 A New Approach to 3D-Microstructure Fabrication Utilizing Hard X-ray Lithography of SR Tadashi Hattori, Harutaka Mekaru and Yuichi Utsumi 12th U.S. National Synchrotron Radiation Instrumentation Conference, Madison, Wisconsin, USA, August 22-24, 2001 Synthesis of Ammonium and Organic Compounds from Air Component Gasses by Soft X-ray Induced Reactions at Atmospheric Pressure Yuichi Utsumi and Tadashi Hattori 12th U.S. National Synchrotron Radiation Instrumentation Conference, Madison, Wisconsin, USA, August 22-24, 2001 Free Flow Electrophoresis Module For Rapid Sample Preparation Etsuo Shinohara, Nobuyoshi Tajima, Jun Funazaki, Koichi Tashiro, Shuichi Shoji, Yuichi Utsumi and Tadashi Hattori Micro Total Analysis Systems 2001, Monterey, California, USA, October 21-25, 2001 The Fabrication of Micro Molding Inserts by the LIGA Process using Synchrotron Radiation from NewSUBARU T. Kitadani, Y. Utsumi, S. Nakao and T. Hattori MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002 UV prototyping of PDMS micro capillary electrophoresis chips Yuichi Utsumi, Motoaki Ozaki, Sigeru Terabe and Tadashi Hattori MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002 Fabrication of X-ray Masks for Optical Switch Molding R. Maeda, X. C.shan, T. Ikehara, H. Mekaru and T. Hattori MSE Workshop Key Issues for Commercialization of MEMS, Tsukuba, Japan, February 20-22, 2002 平成12年度 Beam line BL11 for LIGA process at the NewSUBARU Harutaka Mekaru, Yuichi Utsumi, and Tadashi Hattori Nucl Instrum Methods Phys Res A, 467-468, (2001) 741-744 BMEにおける知的財産の強化 服部正 Bio Medical Enginnering，14(1)，(2000) 51-54 Beam line BL11 for LIGA process at the NewSUBARU Harutaka Mekaru, Yuichi Utsumi and Tadashi Hattori 7th International Conference on Synchrotron Radiation Instrumentation, Berlin, Germany, August 21-25, 2000 Application of Synchrotron Radiation to Microfabrication Yuichi Utsumi Harutaka Mekaru and Tadashi Hattori The 12th Symposium of The Materials Research Society of Japan, Kanagawa, Japan, December 7-8, 2000 Chemical application research using “NewSUBARU” 1.5Gev storage ring Yuichi Utsumi Harutaka Mekaru and Tadashi Hattori Symposium on Chemical Applications of Synchrotron Radiation, Honolulu, Hawaii, USA, December 14-19, 2000 ▲ページの先頭にもどる 　兵庫県立大学 高度産業科学技術研究所 　〒678-1205 　兵庫県赤穂郡上郡町光都３丁目１番２号　兵庫県立先端科学技術支援センター内 お問い合せ先 TEL:0791-58-0249 FAX:0791-58-0242