＜研究業績＞

＜公表論文　2002〜現在＞

 

＜2019年＞

1. Ryuki Tsuji, Hideaki Masutani, Yuich Haruyama, Masahito Niibe, Satoru Suzuki, Shin-ichi Honda, Yoshiaki Matsuo, Akira Heya, Naoto Matsuo, and Seigo Ito:

”Water Electrolysis using Flame-Annealed Pencil-Graphite Rods”

Sustainable Chem. Eng., 7, 5681-5689 (2019) .

 

1. I. Tateishi, N. T. Cuong, C. A. S. Moura, M. Cameau, R. Ishibiki, A. Fujino, S. Okada, A. Yamamoto, M. Araki, S. Ito, S. Yamamoto, M. Niibe, T. Tokushima, D. E. Weibel, T. Kondo, M. Ogata, and I. Matsuda:

“Semimetallicity of free-standing hydrogenated monolayer boron from MgB2”
Phys. Rev. Mater., 3, 024004 (2019) DOI: 10.1103/PhysRevMaterials.3.024004.

 

1. Masahito Niibe,Tetsuo Harada, Akira Heya, Takeo Watanabe, Naoto Matsuo:

“Removal of carbon contamination on oxidation-prone metal-coated mirrors using atomic hydrogen“,

AIP Conf. Proc. 2054, 060010 (2019).  DOI: 10.1063/1.5084641

 

1. Satoru Suzuki, Yuichi Haruyama, Masahito Niibe, Takashi Tokushima, Akinobu Yamaguchi,　Yuichi Utsumi, Atsushi Ito, Ryo Kadowaki, Akane Maruta and Tadashi Abukawa:

” Quasi-free-standing monolayer hexagonal boron nitride on Ni”
Mater. Res. Express 6, 016304 (2019). doi.org/10.1088/2053-1591/aae5b4

 

＜2018年＞

1. Retsuo Kawakamia,∗, Masahito Niibeb, Yoshitaka Nakanoc, Shin-ichiro Yanagiyaa, Yuki Yoshitania, Chisato Azumaa, Takashi Mukaid:  “Effects of ultraviolet wavelength and intensity on AlGaN thin film surfaces irradiated simultaneously with CF4 plasma and ultraviolet”

Vacuum, 159, 45-50 (2018).  doi.org/10.1016/j.vacuum.2018.10.017

 

1. Masahito Niibe, Noritaka Takehira, Takashi Tokushima:

” Electron Structure of Boron Doped HOPG: Selective Observation of Carbon and Trace Dope Boron by Means of X-ray Emission and Absorption Spectroscopy”
e-J. Surf. Sci. Nanotech, 16, 122-126 (2018).  doi: 10.1380/ejssnt.2018.122

 

1. Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Yuma Araki, Yuki Yoshitani, Chisato Azuma, Takashi Mukai: ”Characteristics of TiO2 thin film surfaces treated by O2 Plasma in dielectric barrier discharge with the assistance of external heating”

Vacuum, 152, 265-271 (2018).   doi: 10.1016/j.vacuum.2018.03.051

 

1. Mititaka Terasawa, Shin-ichi Honda, Keisuke Niwase, Masahito Niibe, Tomohiko Hisakuni, Tadao Iwata, Yuji Higo, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune:  ”Nano-polycrystalline diamond synthesized from neutron-irradiated highly oriented pyrolytic graphite (HOPG)”

Diamond & Related Materials, 82, 132-136 (2018).

 

1. Keisuke Niwase, Mititaka Terasawa, Shin-ichi Honda, Masahito Niibe, Tomohiko Hisakuni, Tadao Iwata, Yuji Higo, Takeshi Hirai, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune:

”Quenchable compressed graphite synthesized from neutron-irradiated highly oriented pyrolytic graphite in high pressure treatment at 1500°C”
J. Appl. Phys. 123, 161577 (2018).

 

＜2017年＞

1. Hiroki Takamatsu, Masahito Niibe, XiaoLong Zhou, Kenji Kamatsu, Hidetoshi Saitoh, Hiroki Akasaka, Akihiko Saiga, Koji Tamada, Masahito Tagawa, Kumiko Yokota, Yuichi Furuyama, Kazuhiro Kanda:

”Soft X-ray irradiation effect on the fluorinated DLC film”
Diamond & Related Materials, 79, 14-20 (2017).

 

1. Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Ryo Tanaka, Chisato Azuma, Takashi Mukai:

”Characteristics of N2 and O2 Plasma-Induced Damages on AlGaN Thin Film Surfaces”
Phys. Status Solidi, A214, 1700393 (2017).

 

1. Yoshitaka Nakano, Retsuo Kawakami, Masahito Niibe:

”Generation of electrical damage in n-GaN films following treatement in a CF4 plasma”
Appl. Phys. Express, 10, 1162021 (2017).

 

1. Retsuo Kawakami, Kengo Fijimoto, Masahito Niibe, Yuma Araki, Yoshitaka Nakano, Takashi Mukai:

”TiO2 Thin Film Surfaces Treated by O2 Plasma in Dielectric Barrier Discharge with Assistance of Heat Treatment”

Proc. 14th Int’l Symp. Sputtering & Plasma Processes (ISSP 2017), 274-277 (2017).

 

1. Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, Hidetoshi Saitoh:

”Modification Processes fof Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation”

Sensors and Materials, 29, 812-826 (2017).

 

1. 竹平徳崇，新部正人，荒木佑馬，徳島高

“結晶配向性と励起エネルギーを変化させたグラファイトにおけるC-K発光スペクトルの入／出射角度依存性”，　

Ｘ線分析の進歩，48, 129-136 (2017).

 

1. Shin-ichi Honda,∗, Fumiya Ideno, Yasuji Muramatsu, Masahito Niibe, Mititaka Terasawa, Eric M. Gullikson, Kuei-Yi Lee:

”Soft X-ray absorption spectroscopy study of chemical states, orientation, and oxygen content of ion-irradiated vertically aligned multiwalled carbon nanotubes”
J. Electron Spectrosc. Relat. Phonom., 220, 91-95 (2017).

 

1. Masahito Niibe, Takashi Tokushima, Noritaka Takehira, and Yuma Araki:

”Large take-off angle dependence of C-K emission spectra observed in highly oriented pyrolytic graphite”

J. Electron Spectrosc. Relat. Phonom., 220, 118-120 (2017).

 

1. Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Takashi Mukai:

”AlGaN surfaces etched by CF4 plasma with and without the assistance of near-ultraviolet irradiation”
Vacuum, 136, 28-35 (2017).

 

＜2016年＞

1. Masahito Niibe:

”Low energy soft X-ray emission spectrometer at BL-09A in NewSUBARU”
SPring-8/SACLA Research Frontiers 2015, 149-150 (2016).

 

1. Masahito Niibe and Takashi Tokushima:

”Low Energy Soft X-ray Emission Spectrometer at BL-09A in NewSUBARU”
Proc. SRI2015, AIP Conf. Proc., 1741, 030042 (2016).

 

1. Takumi Yonehara, Junji Iihara, Shigeki Uemura, Koji Yamaguchi, and Masahito Niibe:

”Developement of the Surface-sensitive Soft X-ray Absorption Fine Structure Measuremant Technique for Bulk Insulator”

Proc. SRI2015, AIP Conf. Proc., 1741, 050025 (2016).

 

1. Haruhito Ito, Motoki Kamakura, Tsuneo Suzuki, Masahito Niibe, Kazuhito Kanda, Hidetoshi Saito:

”Fabrication of hydrogenated amorphous sillicon carbide films by decomposition Of hexamethyldisilane with microwave discharge flow of Ar”
Jpn. J. Appl. Phys., 55, 06HC01 (2016).

 

1. M. Terasawa, H. Kurishita, T. Sakamoto, M. Niibe, H. Takahashi, S. Nishikawa, A. Yamamoto, M. Yamashita, T. Mitamura, T. Yamasaki, M. Kawai:

”Fabrication and characterization of fine-grained 316L steel with 2.0 mass% TiC”
J. Nuclear Sci. Technol., 53, 1951-1959 (2016), DOI:10.1080/00223131.2016.1175390

 

1. Y. Suzuki, Y. Kurokawa, T. Suzuki, K. Kanda, M. Niibe, M. Nakano, N. Ohtake, H. Akasaka:

”Structure and physical properties of stable isotopic amorphous carbon films”
Diamond & Relat. Materials, 63, 115-119 (2016).

 

1. Masahito Niibe, Takuya Kotaka, Retsuo Kawakami, Yoshitaka Nakano, Takashi Mukai:
2. ” Damage Characteristics of n-GaN Crystal Etched with N2 Plasma by Soft X-ray Absorption Spectroscopy”

e-J. Surf. Sci. Nanotech, 14, 9-13 (2016).

 

＜2015年＞

1. Shodai Hirai, Masahito Niibe, Retsuo Kawakami, Tatsuo Shirahama, Yoshitaka Nakano, Takashi Mukai:
2. ” Surface Analysis of AlGaN Treated with CF4 and Ar Plasma Etching”

e-J. Surf. Sci. Nanotech, 13, 481-487 (2015).

 

1. K. Kidena, M. Endo, H. Takamatsu, M. Niibe, M. Tagawa, K. Yokota, Y. Furuyama, K. Komatsu, H. Saitoh and K. Kanda:

”Resisrance of Hydrogenated Titanium-doped Diamond-Like-Carbon Film to Hyperthermal Atomic Oxygen”  

Metals. 5, 1957-1970 (2015).

 

1. K. Kidena, M. Endo, H. Takamatsu, R. Imai, M. Niibe, K. Yokota, M. Tagawa, Y. Furuyama, K. Komatsu, H. Saitoh, K. Kanda:

”Hyperthermal Atomic Oxygen Beam Irradiation Effect on the Hydrogenated Si-doped DLC Film”
Trans Mat. Res. Soc. Jpn. 40, 353-358 (2015).

 

1. Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Tatsuo Shirahama, Shodai Hirai, Takashi Mukai: ”Comparison between AlGaN surfaces etched by carbon tetrafluoride and argon plasma: Effect of the fluorine impurities incorprated in the surface”

Vacuum, 119 264-269 (2015).

 

1. Yoshitaka Nakano, Daisuke Ogawa, Keiji Nakamura, Retsuo Kawakami, and Masahito Niibe:

”Ar+-irradiation-induced damage in hydride vapor-phase epitaxy GaN films”

J. Vac. Sci. Technol. A33, 043002 (2015).

 

3. Keiji Sano, Masahito Niibe, Retsuo Kawakami and Yoshitaka Nakano:

”Recovery of x-ray absorption spectral profile in etched TiO2 thin films”

J. Vac. Sci. Technol. A33, 031403 (2015).

 

1. R. Kawakami, Y. Nakano, M. Niibe, T. Shirahama, and T. Mukai: 
2. ”Electrical Investigation of Deep-Level Defects Induced in AlGaN/GaN Heterostrucutures by CF4 Plasma Treatments”

ECS Solid State Letters, 4 36-38 (2015).

 

1. A. Takarada, T. Suzuki, K. Kanda, M. Niibe, M. Nakano, N. Ohtake, H. Akasaka:

”Structure dependence of corrosion resistance of amorphous carbon films against nitric acid”
Diamond and Related Materials, 51, 49-54 (2015).

 

＜2014年＞

1. M-G. Chen, K. Nakamura, Y-Q. Qiu, D. Ogawa, R. Kawakami, M. Niibe, and Y. Nakano:

“Optical and electrical investigation of Ar+-irradiated GaN”
Appl. Phys. Express, 7, 111003, (2014).

 

1. R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, K. Aoki, K. Oba, M. Takabatake, T. Mukai: 
2. ”Damage Characteristics of n-GaN Thin Film Surfaces Etched by Ultraviolet Light-Assisted Helium Plasmas”

Thin Solid Films, 570, 81-86, (2014).

 

1. S. Honda, R. Tamura, Y. Nosho, A. Tsukagishi, M. Niibe, M. Terasawa, R. Hirase, H. Izumi, H. Yoshioka, K. Niwase, E. Taguchi, K-Y. Lee, M. Oura:
2. ”Transformation of multiwalled carbon nanotubes to amorphous carbon nanorods under ion irradiation”,

Jpn. J. Appl. Phys. 53 02BD06 (2014).

 

1. K. Kanda, K. Fukuda, K. Kidena, R. Imai, M. Niibe, S. Fujimoto, K. Yokota, M. Tagawa:

“Hyperthermal atomic oxygen beam irradiation effect on the Ti-containing DLC film”
Diamond Related Materials, 41 49-52 (2014).

 

＜2013年＞

1. R. Kawakami, M. Niibe, H. Takeuchi, M. Konishi, Y. Mori, T. Shirahama, T. Yamada, and K. Tominaga:
2. “Surface damage of 6H-SiC originating from argon plasma irradiations”,

Nucl. Instrum. Methods in Phys. Res., B 315 213-217 (2013).

 

1. A. Tsukagishi, S. Honda, R. Osugi, H. Okada, M. Niibe, M. Terasawa, R. Hirase, H. Izumi, H. Yoshioka, K. Niwase, E. Taguchi, K-Y. Lee, M. Oura:
2. ”Spectroscopic characterization of ion-irradiated multi-layer graphenes”,
3. Nucl. Instrum. Methods in Phys. Res., B 315 64-67 (2013).

 

1. R. Kawakami, M. Niibe, Y. Nakano, T. Shirahama, T. Yamada, K. Aoki, M. Takabatake, K. Tominaga, and T. Mukai:
2. ”Damage characteristics of n-GaN thin film surfaces etched by N2 Plasmas”,

Physica Status Solidi, C 10, 1553-1556 (2013) .

 

1. K. Kanda, M. Niibe, A. Wada, H. Ito, T. Suzuki, T. Ohana, H. Saito:

“Comprehensive Classification of Near-Edge X-ray Absorption Fine Structure Spectra of Si-Containing Dianond-Like Carbon Thin Films”
Jpn. J. Appl. Phys. 52, 095504 (2013).

 

4. R. Kawakami, M. Niibe, Y. Nakano, M. Konishi, Y. Mori, A. Takeichi, K. Tominaga, and T. Mukai:
5. ”Comparison between Damage Characteristics of p- and n-GaN Surfaces Etched by Capacitively Coupled Radio Frequency Argon Plasmas”,

Jpn. J. Appl. Phys. 52, 05EC05 (2013) .

 

1. H. Ito, S. Onitsuka, R. Gappa, H. Saitoh, R. Roacho, K. H. Pannell, T. Suzuki, M. Niibe, K. Kanda:

“Fabrication of Amorphous Silicon Carbide Films from Decomposition of Tetramethylsilane using ECR plasma of Ar”,
J. Phys.: Conf. Series, 441, 012039 (2013) .

 

1. R. Kawakami, M. Niibe, Y. Nakano, M. Konishi, Y. Mori, H. Takeuchi, T. Shirahama, T. Yamada, and K. Tominaga:
2. “Characteristics of TiO2 Surfaces Etched by Capacitively Coupled Radio Frequency N2 and He Plasmas”,

J. Phys.: Conf. Series, 441, 012038 (2013) .

 

1. Masahito Niibe, Takuya Kotaka, Tohru Mitamura:

”Investigation of analyzing depth of N-K absorption spectra measured using TEY and TFY method”
J. Phys.: Conf. Series, 425, 132008 (2013).

 

1. Masahito Niibe, Keigo Koida, Yukinobu Kakutani:
2. ”Contamination expreiments for Mo/Si multilayer mirrors with the use of single-bunch synchrotron radiation”

J. Phys.: Conf. Series, 425, 132021 (2013).

 

1. K. Kanda, T. Hasegawa, M. Uemura, M. Niibe, Y. Haruyama, M. Motoyama, K. Amemiya, S. Fukushima, T. Ohta:
2. ”Construction of Wide-range High-resolution Beamline BL05 in NewSUBARU for Soft X-ray Spectroscopic Analysis on Industrial Materials”

J. Phys.: Conf. Series, 425, 132005 (2013).

 

1. M. Niibe, K. Sano, T. Kotaka, R. Kawakami, K. Tominaga, Y. Nakano:
2. ”Etching Damage and Its Recovery by Soft X-ray Irradiation Observed in Soft X-ray Absorption Spectra of TiO2 Thin Film”

J. Appl. Phys., 113, 126101 (2013).

 

1. S. Hori, M. Niibe, T. Kotaka, K. Fujii, K. Yoshiki, T. Namazu and S. Inoue:

”X-ray Absorption Studies on the Growth Process of RF Magnetron Sputtered BN Films: Bias Voltage and Substrate Temperature Effects”
Jpn. J. Appl. Phys., 52, 045602 (2013).

 

1. M. Niibe, T. Kotaka, R. Kawakami, Y. Nakano, T. Inaoka, K. Tominaga, T. Mukai:

”Damage Analysis of n-GaN Crystal Etched with He and N2 Plasmas”
Jpn. J. Appl. Phys. 52, 01AF04 (2013).

Ranked in the Top 20 Most Downloaded Articles in JJAP (February 2013).

 

1. Y. Nakano, K. Nakamura, M. Niibe, R. Kawakami, N. Ito, T. Kotaka, K. Tominaga:

”Effect of UV Irradiation on Ar-Plasma Etching Characteristics of GaN”
ECS J. Solid State Sci. & Technol., 2, 110-113 (2013).

 

1. K. Ozeki, D. Sekiba, T. Suzuki, K. Kanda, M. Niibe, K. K. Hirakuri, T. Masuzawa:

”Influence of the source gas ratio on the hydrogen and deuteriun content of a-C:H and a-C:D films: Plasma-enhanced CVD with CH4/H2, CH4/D2, CD4/H2 and CD4/D2”
Appl. Surface Sci. 265, 750-757 (2013).

 

1. R. Kawakami, A. Takeichi, M. Niibe, M. Konishi, Y. Mori, T. Kotaka, T. Inaoka, K. Tominaga, T. Mukai:
2. ”Capacitively coupled radio frequency nitrogen plasma etch damage to N-type gallium nitride”

Vacuum 87, 136-140 (2013).

 

＜201２年＞

1. S. Honda, S. Nanba, Y. Hasegawa, Y. Nosho, A. Tsukagoshi, M. Niibe, M. Terasawa, R. Hirase, H. Izumi, H. Yoshioka, K-Y. Lee, K. Niwase, E. Taguchi, M. Oura:

”Defect Evolution in Multiwalled Carbon Nanotube Films Irradiated by Ar Ions”
Jpn. J. Appl. Phys., 51 110202 (2012).

 

1. R. Kawakami, M. Niibe, A. Takeichi, Y. Mori, M. Konishi, T. Kotaka, F. Matsunaga, T. Takasaki, T. Kitano, T. Miyazaki, T. Inaoka, K. Tominaga:
2. ”Characteristics of TiO2 Thin Film Surfaces Treated by Helium and Air Dielectric Barrier Discharge Plasma”

Jpn. J. Appl. Phys. 51, 08HB04 (2012).

 

3. A. Fujimoto, M. Okada, Y. Kang, M. Niibe, S. Matsui, T. Suzuki, K. Kanda:

”Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition”
Jpn. J. Appl. Phys., 51, 06FD07 (2012).

 

1. 新部正人，小高拓也，堀聡子，井上尚三

“NEXAFS法を用いたスパッタリングc-BN薄膜の評価”
Ｘ線分析の進歩，43, 153-160 (2012).

 

1. 小高拓也，新部正人，三田村徹

“N-K吸収スペクトルにおけるTEY法およびTFY法での分析深さの評価”
Ｘ線分析の進歩，43, 175-180 (2012).

 

1. M. Niibe, T. Kotaka, R. Kawakami, T. Inaoka, K. Tominaga, and T. Mukai:

”Damage Analysis of Plasma-etched n-GaN Crystal Surface by Nitrogen K-edge NEXAFS Spectroscopy”
Jpn. J. Appl. Phys., 51, 01AB02 (2012).

 

1. A. Wada, K. Koshimura, M. Niibe, H. Saitoh, K. Kanda, H. Ito:

”Carbon-K NEXAFS measurements of a-CNx films formed from decomposition of BrCN in electron cyclotron resonance plasmas of He, Ne, and Ar”
J. Non-crystal. Solids, 358, 124-128 (2012).

 

1. Y. Nakano, R. Kawakami, M. Niibe, A. Takeichi, T. Inaoka and K. Tominaga:

“Photoluminescence Study of Damage Introduced in GaN by Ar- and Kr-Plasmas Etching,”
Material Research Society Symposium Proceedings Vol. 1396, mrsf11-1396-o07-36 (2012).

 

＜2011年＞

1. R. Kawakami, A. Takeichi, M. Niibe, T. Inaoka, and K. Tominaga:

”Damage Characteristics of TiO2 Thin Film Surfaces Etched by Capacitively Coupled Radio Frequency Helium Plasmas”
Jpn. J. Appl. Phys., 50, 08KD01 (2011).

 

1. A. Wada, T. Suzuki, M. Niibe, H. Ito, and K. Kanda:

”Annealing Effect og W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition”
Jpn. J. Appl. Phys., 50, 06GG05-1~4 (2011).

 

1. M. Niibe, K. Koida, Y. Kakutani, T. Nakayama, S. Terashima, A. Miyake, H. Kubo, S. Matsunari, T. Aoki, and S. Kawata:

”Nonlinear behavior of decrease in reflectivity of multilayer mirrors for extreme ultraviolet lithography optics by high-flux extreme ultraviolet irradiationin various vaccum environment”
Jpn. J. Appl. Phys., 50, 06GB05-1~6 (2011).

 

1. K. Kanda, N. Yamada, K. Yokota, M. Tagawa, M. Niibe, M. Okada, Y. Haruyama, S. Matsui:

”Fabrication of Fluorine-terminated diamond-like carbon thin film using a hyperthermal atomic fluorine beam”,

Diamond & Related Materials, 20 703-706 (2011).

 

1. R. Kawakami, M. Niibe, T. Fukudome, A. Takeichi, T. Inaoka, and K. Tominaga:

“Effect of DBD Air Plasma Treatment on TiO2 Thin Film Surfaces,”
Jpn, J. Appl. Phys., 50 01BE02 pp. 1-5 (2011).

 

1. R. Kawakami, T. Inaoka, K. Tominaga, M. Niibe, T. Mukai, A. Takeichi, and T. Fukudome:

“Synergy Effect of Xenon Plasma Ions and Ultraviolet Lights on GaN Etch Surface Damage and Modification,”
Trans. Materials Res. Soc. Japan, 36, 75-78 (2011).

 

1. M. Niibe, K. Koida, Y. Kakutani:

”Inhibition of carbon growth and removal of carbon deposits on extreme ultraviolet lithography mirrors by extreme ultraviolet irradiation in the presence of water, oxygen, or oxygen/ozone mixtures”
J. Vac. Sci. Technol. B 29 011030-1~5 (2011).

 

1. M. Niibe, Y. Maeda, R. Kawakami, T. Inaoka, K. Tominaga, and T. Mukai:

   ”Surface analysis on n-GaN crystal damaged by RF-plasma-etching with Ar, Kr, and Xe gases”
   Physica status solidi, C 8, 435-437 (2010).

 

1. R. Kawakami, T. Inaoka, K. Tominaga, M. Niibe T. Mukai, A. Takeichi, and T. Fukudome:

   ”Etch-induced damage characteristics of n-GaN surfaces by capacitively coupled radio frequency He and Ar plasmas”
   Physica status solidi, C 8, 441-443 (2010).

 

＜2010年＞

1. Masahito Niibe, Kazuyoshi Miyamoto, Tohru Mitamura:

    “Identification of B-K NEXAFS peaks of boron nitride thin film prepared by sputtering deposition”
    J. Vac. Sci. Technol. A 28, 1157-1160 (2010).

 

1. K. Kanda, M. Okada, Y. Kang, M. Niibe, A. Wada, H. Ito, T. Suzuki, and S. Matsui:

    “Structure Canges in Diamond-Like Carbon Films Fabricated by Ga Focused-Ion-Beam-Assisted Deposition Caused by Annealing”
    Jpn. J. Appl. Phys., 49, 06GH06-1~5 (2010).

 

＜2009年＞

1. Keigo Koida and Masahito Niibe:

“Study on contamination of projection optics surface for extreme ultraviolet lithography”
Appl. Surf. Sci., 256, 1171-1175 (2009).

 

1. Masahito Niibe and Keigo Koida:

“Competitive reaction of carbon deposition and oxidation on the surface of Mo/Si multilayer mirrors by EUV irradiation”
SPIE Vol.7361, 73610L-1-8 (2009).

 

＜2008年＞

1. M. Niibe, K. Miyamoto, T. Mitamura, K. Mochiji:

“Identification of B-K XANES Peaks of BN Thin Film Prepared by Sputtering Deposition”
Bulletin Soc. Discrete Variational Xα, 21, 179-182 (2008).
 

1. N. Yamada, K. Kanda, A. Saikubo, M. Niibe, Y. Haruyama, S. Matsui:

“Fabrication of fluorocarbon terminated DLC thin film using soft X-ray”,
Diamond and Related Materials 17, 655-658 (2008).

 

1. M. Niibe, K. Koida and Y. Kakutani: ”Protection and reduction of surface oxidation of Mo/Si multilayers for extreme ultraviolet lithography projection optics by control of hydrocarbon gas atmosphere”,

J. Vac. Sci Technol. B 26, 2230-2235 (2008)

 

1. H. Ito, T. Nozaki, A. Saikubo, N. Yamada, K. Kanda, M. Niibe, H. Saitoh:

”Hydrogen-storage characteristics of hydrogenated amorphous carbon nitrides”
Thin Solid Films 516 6575-6579 (2008).

 

1. K. Koida, M. Niibe, Y. Kakutani, S. Matsunari, T. Aoki, S. Terashima, T. Nakayama, H. Takase, Y. Fukuda: “Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas”,

SPIE Vol.6921, 6921125-1 (2008).

 

1. T. Nakayama, H. Takase, S. Terashima, S. Sudo, T. Watanabe, Y. Fukuda, K. Murakami, S. Kawata, T. Aoki, S. Matsunari, Y. Kakutani, M. Niibe:

“Phenomemological analysis of carbon deposition rate on the multilayer mirror”,
SPIE Vol.6921, 6921124-1 (2008).

 

1. K. Sugisaki, M. Okada, K. Otaki, Y. Zhu, J. Kawakami, K. Murakami, C. Ouchi, M. Hasegawa, S. Kato, T. Hasegawa, H. Yokota, T. Honda M. Niibe:

“EUV wavefront measurement of six-mirror optics using EWMS”,
SPIE Vol.6921, 6921106-1 (2008).

 

1. 新部正人，古井田啓吾，角谷幸信，松成秀一，青木貴史，寺島茂，高瀬博光：「In situ軟Ｘ線吸収分光法を用いた極紫外線用多層膜ミラーのコンタミネーション防止機構の研究」、

放射光 21, 26-33 (2008).

 

＜2007年＞

1. M. Niibe, Y. Kakutani, K. Koida, S. Matsunari, T. Aoki, S. Terashima, H. Takase, K. Murakami, and Y. Fukuda: “In situ x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination”,

J. Vac. Sci. Technol. B 25 2118-2122 (2007).

 

1. Y. Kakutani, M. Niibe, Y. Gomei, H. Takase, S. Terashima, S. Matsunari, T. Aoki, K. Murakami, and Y. Fukuda: “Inhibition of Contamination of Ru-Capped Multilayer Mirrors for Extreme Ultraviolet Lithograpy Projection Optics by Ethanol”,

Jpn. J. Appl. Phys., 46, 6155-6160 (2007).

 

Y. Zhu, K. Sugisaki, M. Okada, K. Otaki, Z. Liu, J. Kawakami, M. Ishii, J. Saito, K. Murakami, M. Hasegawa, C. Ouchi, S. Kato, T. Hasegawa, A. Suzuki, H. Yokota, M. Niibe: "Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography."
Appl. Opt. 46, 6783 -6792 (2007).
 
Kakutani, M. Niibe, Y. Gomei, Terashima, H. Takase, S. S. Matsunari, T. Aoki, and Y. Fukuda: “Long-term durability of a Ru capping layer for EUVL projection optics by introducing ethanol”,
SPIE Vol.6517, 651731-1 (2007).

 

1. S. Matsunari, T. Aoki, K. Murakami, Y. Gomei, S. Terashima, H. Takase, M. Tanabe, Y. Kakutani, M. Niibe, Y. Fukuda: “Carbon deposition on multi-layer mirrors by extreme ultra violet ray irradiation”,

SPIE Vol.6517, 651731-1 (2007).

 

1. M, Niibe, K. Sugisaki, M. Okada, S. Kato, C. Ouchi, T. Hasegawa:

“Wavefront Metrology for EUV Projection Optics by Soft X-ray interferometry in the NewSUBARU”,
J-Y Choi and S Rah ed. Synchrotron Radiation Instrumentation, AIP Conf. Proc. 879, 1520-1523 (2007).

 

＜2006年＞

1. K. Otaki, K. Sugisaki, M. Okada, Y. Zhu, Z. Liu, J. Saito, K. Murakami, C. Ouchi, S. Kato, M. Hasegawa, T. Hasegawa, A. Suzuki, H. Yokota, M. Niibe:

”Accuracy Evaluation of the X-ray Interferometer for Extreme Ultraviolet Lithography Optics”, S. Aoki, sY. Kagoshima and Y. Suzuki ed. X-ray Microscopy, IPAP Conf. Proc. 7, 183-185 (2006).

 

1. A. Saikubo, K. Kanda, M. Niibe and S. Matsui:

”Near-Edge X-ray Absorption Fine-Structure Characterization of Diamond-like Carbon Thin Film Formed by Various Methods”
New Diamond and Frontier Carbon Technology, 16, 235-244 (2006).

 

"A New Extreme Ultraviolet Irradiation and Multilayer Evaluation System for Extreme Ultraviolet Lithography Mirror Contamination in the NewSUBARU"
M. Niibe, Y. Kakutani, S. Terashima, H. Takase, Y. Gomei, S. Matsunari, T. Aoki, K. Murakami, and Y. Fukuda:
Jpn. J. Appl. Phys., 45, 5373-5377 (2006).

 

"The role of ambient hydrocarbon species to reduce oxidation in Ru capping layers for EUVL optics mirrors"
Y. Gomei, Y. Kakutani, H. Takase, M. Niibe, S. Terashima, T. Aoki, S. Matsunari:
Microelectronics Eng., 83, 676-679 (2006).

 

"Effect of residual gas atmosphere on lifetime of Ru-capped EUVL projection optics mirror",
Y. Kakutani, M. Niibe, Y. Gomei, H. Takase, S. Terashima, S. Matsunari, T. Aoki, K. Murakami, and Y. Fukuda:
SPIE Vol.6151, 61510H (2006).

 

"New contamination experimental equipment in the NewSUBARU and evaluation of Si-capped multilayer mirrors using it",
M. Niibe, Y. Kakutani, H. Takase, S. Terashima, Y. Gomei, S. Matsunari, T. Aoki, K. Murakami, and Y. Fukuda:
SPIE Vol.6151, 615134-1 (2006).

 

"Study of ruthenium-capped multilayer mirror for EUV irradiation durability",
S. Terashima, H. Takase, Y. Gomei, S. Matsunari, Y. Watanabe, M. Tanabe, K. Murakami, T. Aoki, S. Matsunari, M. Niibe, Y. Kakutani:
SPIE Vol.6151, 615135-1 (2006).

 

"EUV Wavefront Metrology at EUVA",
C. Ouchi, S. Kato, M, Hasegawa, T. Hasegawa, H, Yokota, K. Sugisaki, M. Okada, K. Murakami, J. Saito, M, Niibe, M. Takeda:
SPIE, Vol. 6152 (2006).

 

"Stress control of a-SiC films deposited by dual source dc magnetron sputtering"
S. Inoue, T. Namazu, H. Tawa, M. Niibe, K. Koterazawa:
Vacuum, 80, 744-747 (2006).

 

「軟Ｘ線干渉法によるＥＵＶ投影光学系の波面計測」、新部　正人：
放射光 19, 20-26 (2006).

 

＜2005年＞

"EUVA's challenges toward 0.1nm accuracy in EUV at-wavelength interferometry,"
K. Sugisaki, M. Hasegawa, M. Okada, Y. Zhu, K. Otaki, Z. Liu, M. Ishii, J. Kawakami, K. Murakami, J. Saito, S. Kato, C. Ouchi, A. Ohkubo, Y. Sekine, T. Hasegawa, A. Suzuki, M. Niibe, M. Takeda:
Proc on Fringe 2005 P252 (2005).

 

K. Sugisaki, M. Okada, Y. Zhu, K. Otaki, Z. Liu, J. Kawakami, M. Ishii, J. Saito, K. Murakami, M. Hasegawa, C. Ouchi, S. Kato, T. Hasegawa, A. Suzuki, H. Yokota, M. Niibe, M. Takeda:
SPIE Vol.5921, 81 (2005).

 

"Scaling law in acceleration test of extreme ultraviolet lithography projection optics mirror contamination",
Y. Gomei, H. Takase, T. Aoki, S. Matsunari, and S. Terashima:
J. Vac. Sci. Technol. B23, 2846-2851 (2005).

 

"Contamination Evaluation System for Extreme Ultraviolet Mirrors with the Use of Undulator Radiation",
M. Niibe, Y. Kakutani, K. Kakiuchi, S. Terashima, H. Takase, Y. Gomei, T. Aoki, S. Matsunari, H. Kondo, Y. Fukuda:
Jpn. J. Appl. Phys. 44, 5552-5555 (2005).

 

"Reflectance change of Si- and Ru-capped Mo/Si multilayer mirrors caused by intense EUV irradiation",　
Y. Kakutani, M. Niibe, H. Takase, S. Terashima, H. Kondo, S. Matsunari, T. Aoki, Y. Gomei, Y. Fukuda:
SPIE Vol.5751, 1077-1083 (2005).

 

"Characterization of capped multilayer mirrors using XPS, AES and SIMS",　
H. Takase, Y. Gomei, S. Terashima, H. Kondo, T. Aoki, S. Matsunari, M. Niibe, Y. Kakutani:　
SPIE Vol.5751, 1084-1091 (2005).

 

"Comparison of EUV interferometry methods in EUVA project",　
S. Kato, C. Ouchi, M. Hasegawa, A. Suzuki, T. Hasegawa, K. Sugisaki, M. Okada, Z. Yucong, K. Murakami, J. Saito, M. Niibe and M. Takeda:
SPIE Vol.5751, 110-117 (2005).

 

"Double-grating shearing interferometer for EUV optics at-wavelength measurement",
Z. Liu, M. Okada, K. Sugisaki, M. Ishii, Y. Zhu, J. Saito, A. Suzuki, M. Hasegawa, C. Ouchi, S. Kato, M. Niibe, K. Murakami:　
SPIE Vol.5752, 663-672 (2005).

 

＜2004年＞

"A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU",　
Y. Kakutani, M. Niibe, K. Kakiuchi, H. Takase, S. Terashima, H. Kondo, S. Matsunari, T. Aoki, Y. Gomei, Y. Fukuda:
SPIE Vol.5533, 47-57 (2004).

 

"Recent Progress of EUV wavefront metrology in EUVA",
M. Hasegawa, C. Ouchi, T. Hasegawa, S. Kato, A. Ohkubo, A. Suzuki, K. Sugisaki, M. Okada, K. Otaki, K. Murakami, J. Saito, M. Niibe:
SPIE Vol.5533, 27-36 (2004).

 

"Evaluation of contamination deposition on pinholes used in EUV at-wavelength PDI",
K. Sugisaki, M. Hasegawa, S. Kato, C. Ouchi, J. Saito, M. Niibe, A. Suzuki, K. Murakami:　
SPIE Vol.5374, 702-709 (2004).

 

"EUV wavefront metrology system in EUVA",
T. Hasegawa, C. Ouchi, M. Hasegawa, S. Kato, K. Sugisaki, A. Suzuki, K. Murakami, J. Saito, M. Niibe:
SPIE Vol.5374, 797-807 (2004).

 

"Lateral shearing interferometry for EUVL: theoretical analysis and experiment",
Y. Zhu, K. Sugisaki, C. Ouchi, T. Hasegawa, M. Hasegawa, S. Kato, J. Saito, M. Niibe, A. Suzuki, K. Murakami:
SPIE Vol.5374, 824-832 (2004).

 

2. ”NewSUBARU Strage Ring : Operational Progress in these three Years”
3. Y. Shoji, A. Ando, S. Hashimoto, S. Hisao, T. Matsubara, S. Miyamoto, M. Niibe, T. Asaka, H. Ego, Y. Kawashima, H. Kitamura, N. Kumagai, H. Ohkuma, T. Ohshima, M. Oishi, S. Suzuki, M. Takao, T. Takashima, T. Tanaka:

Proc. APAC 2004, 549-551 (2004).

 

"Characterization of Light Radiated from 11m Long Undulator",
M. Niibe, M. Mukai, S. Miyamoto, Y. Shoji, S. Hashimoto, A. Ando, T. Tanaka, M. Miyai, and H. Kitamura:
Synchrotron Radiation Instrumentation, AIP Conf. Proc. 705, 576-579 (2004).

 

"Polarization Property Measurement of the Long Undulator Radiation Using Cr/C Multilayer Polarization Elements",　
M. Niibe, M. Mukai, H. Kimura, and Y. Shoji:
Synchrotron Radiation Instrumentation, AIP Conf. Proc. 705, 243-246 (2004).

 

"Beam Based Search for Linear Imperfection Field in 11m Long Undulator at NewSUBARU",
Y. Shoji, S. Miyamoto, M. Niibe, S. Hashimoto, A. Ando:
Synchrotron Radiation Instrumentation, AIP Conf. Proc. 705, 247-250 (2004).

 

＜2003年＞

1. Y. Shoji, S. Miyamoto, M. Niibe, T. Tanaka, H. Kitamura:

”Magnetic Field Adjustment of 11 m Long Undulator”
Proc. 14th Symp. on Accelerator Sci. and Technol. 14 596-598 (2003).

 

1. Y. Shoji, S. Miyamoto, M. Niibe, S. Hashimoto, and A. Ando:

”Beam Base Search for Linear Imperfection Fields in 11 m Long Undulator at NewSUBARU”
Proc. 14th Symp. on Accelerator Sci. and Technol. 14 599-601 (2003).

 

＜2002年＞

"ニュースバルの到達点"
安東愛之輔、服部正、細野和彦、神田一浩、木下博雄、松井真二、銘苅春隆、新部正人、内海裕一、渡邊健夫
放射光、15, 366-346 (2002).

 

"Polarizing elements for soft X-rays with use of Cr/C multilayers."
M. Niibe, M. Mukai and H. Kimura
Int'l. Symp. Thech. & Appl. Photoelectron Microscopy with Laser-based VUV sources, CD-ROM, P-17 (2002).

 

"Development of EUV point diffraction interferometry using NewSUBARU undulator radiation,"
M. Niibe, M. Mukai, T. Tanaka, K. Sugisaki, Y. Zhu, and Y. Gomei :
SPIE Vol. 4782, 204-211 (2002).

 

"ASET development of at-wavelength phase-shifting point diffraction interferometer,"
K. Sugisaki, Y. Zhu, Y. Gomei, and M. Niibe,
SPIE Vol. 4688, 695-701 (2002).

 

"Proposal of at-wavelength PDI for EUVL optics alignment by using a compact undulator."
Y. Gomei, K. Sugisaki, Y. Zhu, and M. Niibe,
Microelectronic Eng., 61-62, 1077-1082 (2002).

 

"Metal surface swelling by heavy charged particle irradiation"
M. Terasawa, T. Mitamura, L. Liu, H. Tsubakino, M. Niibe
Nucl. Instr. Meth. In Phys. Res. B, 193, 329-335 (2002).

 

"Electronic excitation effects on secondary ion emission from a foil of conduction metal bombarded by high energy ions"
T. Sekioka, M. Terasawa, M. Sataka, S. Kitazawa, M. Niibe
Nucl. Instr. Meth. In Phys. Res. B, 193, 751-754 (2002).

 

「極端紫外線露光技術」
木下博雄、渡邊健夫、新部正人
応用物理、71, 190-194 (2002)

 

"スパッタリング法によって作製したTi/C多層膜の構造と機械的性質"
井上尚三、長井健志、新部正人、小寺澤啓司、岩佐美喜男
日本金属学会誌、66, 778-783 (2002).

 

"Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering"
H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe and H. Kinoshita:
Jpn. J. Appl. Phys., 41, 5338-5341 (2002).

 

"Stress changes and stability of sputter-deposited Mo/B4C multilayer films for extreme ultraviolet mirrors"
M. Niibe, H. Nii, and Y. Sugie
Jpn. J. Appl. Phys., 41, 3069-3075 (2002).

　　　　　　 　　　　

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