(97) Saki Kondo, Yoshiaki Ukita, Kuniyo
Fujihara, and Yuichi Utsumi, “Cross-linked
Capillary Micromixer for High-sensitive Immunoassay
” 2008 International Microprocess and Nanotechnology
Conference (MNC2008), pp90-91, Oct 27-30,
2008
(96) Daisuke Fukuoka, and Yuichi Utsumi,
“Micro Fluid Device of PMMA for DNA Sequence
by Using LIGA process and Fusion Bonding” International Conference on Electronics
Packaging 2008 (ICEP2008), pp387-390, JAPAN,
June 10-12, 2008.
(95) Shigeaki Yamamoto, Takefumi Kishimoto,
and Yuichi Utsumi, “Enhancement of the Adhesive
Force of Metal films on PTFE Surface Achieved
by Fast-Atom-Beam Surface Modification”
International Coference on Electronics Packaging
2008 (ICEP2008), pp36-39, JAPAN, June 10-12,
2008.
(94) Tsunemasa Saiki, Katsuhide Okada, and
Yuichi Utsumi “PROPOSAL OF A MICRO LIQUID ROTOR OPERATED
BY SURFACE-ACOUSTIC-WAVE” Twelfth International Conference on Miniaturized
Systems for Chemistry and Life Sciences 2008
(μTAS2008), October 12-16, 2008, San Diego, California,
USA.
(93) Yuichi Utsumi, Tsunemasa Saiki, and
Katsuhide Okada “PROPOSAL OF A NOVEL CONTINUOUS FLOW PUMPING
OPERATED BY SURFACE ACOUSTIC WAVE”, Twelfth International Conference on Miniaturized
Systems for Chemistry and Life Sciences 2008(μTAS2008), October 12-16, 2008, San Diego, California,
USA.
(92) <<Keynote Speech>>Yuichi
Utsumi “Development of 3D Micro Prototyping
using Synchrotron Radiation and Its Application
to Bio Micro Systems” The 7th International
Conference on Machine Automation 2008 (ICMA2008),
JAPAN ,September 24(Wednesday)-26(Friday),
2008.
(91) Yoshiaki Ukita, Tomoya Omukai, Saki Kondo,
and Yuichi Utsumi, “The Advantages of Vertical
Microreactor with Multifunctional Fluid Filter
for Immunoassay”, International Coference
on Electronics Packaging 2008, 12B1-3, JAPAN,
June 10- 12, 2008.
(90) Yoshiaki Ukita, Shigeaki Yamamoto, and Yuichi
Utsumi, “The Polytetrafluoroethylene Processing
Characteristics of High-Energy (2keV-12keV)
X-Ray and its Application to Microfluidics”,
International Coference on Electronics Packaging
2008, 12B1-2, JAPAN, June 10- 12, 2008.
(89) Yoshiaki Ukita, Shigeaki Yamamoto, Mitsuyoshi
Kishihara, Kozo Mochiji, and Yuichi Utsumi,
“Smoothing of poly-(tetrafluoroethylene)
by high-energy x-ray induced photo-chemical
reactions”, 34th International Conference on Micro and Nano
Engineering 2008, OL-P07, Greece, September
15- 18, 2008.
(88) Yoshiaki Ukita, Saki Kondo, and Yuichi Utsumi,
“Vertical microreactor stack with cross-linked
capillary structure for high-sensitive ELISA”,
34th International Conference on Micro and
Nano Engineering 2008, 7C-2, Greece, September
15- 18, 2008.
(87) Mitsuyoshi Kishihara, Yoshiaki Ukita,
Yuichi Utsumi, and Isao Ohta, “Fabrication
of a PTFE-Filled Waveguide for Millimeter-Wave
Components Using SR Direct Etching Process”,
p.301., 7th International Workshop on High-Aspect-Ratio
Micro-Structure Technology 2007, FRANCE,
June 2007.
(86) Harutaka Mekaru, T. Takano, Yoshiaki
Ukita, Yuichi Utsumi, and M. Takahashi, “A
Si stencil mask for X-ray lithography fabricated
by MEMS technology”, p.273., 7th International
Workshop on High-Aspect-Ratio Micro-Structure
Technology 2007, FRANCE, June 2007.
(85) Katsuhide Okada, Daisuke Fukuoka Tsunemasa
Saiki, Yuichi Utsumi, “One-Chip Microfluidics
System by using Surface Acoustic Wave Pumping
and Mixer”, p.151., 7th International
Workshop on High-Aspect-Ratio Micro-Structure
Technology 2007, FRANCE, June 2007.
(84) Tsunemasa Saiki, Katsuhide Okada, Yuichi
Utsumi, “Proposal of a Novel Liquid Flow
Actuator for Lab-on-a-Chip Operated by Surface-Acoustic-Wave”,
International Conference on Microprocess
and Nanotechnology 2007, November 2007.
(83) Daisuke Fukuoka, Katsuhide Okada, Tsunemasa
Saiki, Yoshiaki Ukita, and Yuichi Utsumi,
“Proposal of Continuous Flow Pumping by
the Use of Surface Acoustic Wave Devices”,
p. 147., 7th International Workshop on High-Aspect-Ratio
Micro-Structure Technology 2007, FRANCE,
June 2007.
(82) Kuniyo Fujiwara, Yoshiaki Ukita, Masahiro
Takeo, Seiji Negoro, Tomohiko Kanie, Makoto
Katayama, and Yuichi Utsumi, “High Efficiency
Mixing by the Use of Cross-Linked Micro
Capillary Fluid Filter”, p.297., 7th International
Workshop on High-Aspect-Ratio Micro-Structure
Technology 2007, FRANCE, June 2007.
(81) Kuniyo Fujiwara, Yoshiaki Ukita, Masahiro
Takeo, Seiji Negoro, Tomohiko Kanie, Makoto
Katayama, and Yuichi Utsumi, “High-Efficiency
Mixing by the Use of Cross-Linked Microcapillary
Fluid filter”, JSME Leading Edge Manufacturing
21st, JAPAN, November 2007.
(80) Yoshiaki Ukita, Toshifumi Asano, Kuniyo
Fujiwara, Katsuhiro Matsui, Masahiro Takeo,
Seiji Negoro, Makoto Katayama, Tomohiko Kanie,
and Yuichi Utsumi, “Enzyme-Linked Immuno
Sorvent Assay using Vertical Microreactor
Stack with Microbeads”, p153. 7th International
Workshop on High-Aspect-Ratio Micro-Structure
Technology 2007, FRANCE, June 2007.
(80) Yoshiaki Ukita, Kazuhiro Kanda, Shinji
Matsui, Mitsuyoshi Kishihara, and Yuichi
Utsumi, “Polytetrafluoroethylene Processing
Characteristics using High-Energy X-ray”,
p.291., 7th International Workshop on High-Aspect-Ratio
Micro-Structure Technology 2007, FRANCE,
June 2007.
(79) Yoshiaki Ukita, Seiji Negoro, and Yuichi
Utsumi, “Application of Vertical Microreactor
Stack with Polystylene Microbeads to Ummuno
Assay”, p.859., The 14th International
Conference on Solid-State sensors, Actuators
and Microsystems (Tranceducers 2007), FRANCE,
June 2007.
(78) Yoshiaki Ukita, Toshifumi Asano, Kuniyo
Fujiwara, Katsuhiro Matsui, Masahiro Takeo,
Siji Negoro, Tomohiko Kanie, Makoto Katayama,
and, Yuichi Utsumi, “Vertical microreactor
with fluid filters characterized by 3D-capillary-bundle
for high-throughput immunoassay”, p.373.,
11th International Coference on Miniatuarized
Systems for Chemistry and Life Science(?TAS2007), FRANCE, Oct.ober 2007.
(77) Yuichi Utsumi, Tomohiro Ikeda, Megumi
Minamitani, Kazuo Suwa, “Integrated Structure
of PMMA Microchannels for DNA Separation
Fabricated by Deep X-ray Lithography and
Fusion Bonding”, 51st International Conference
on Electron Ion and Photon Beam Technology
and Nanofabrication, PD-7.4,USA, May 2007.
(76) Yuichi Utsumi, Yoshiaki Ukita, and
Toshifumi Asano, “High Sensitive Immunoassay
using Antibody Immobilized Micro Capillaries Fabricated
by Deep X-ray Lithography”, 51st International
Conference on Electron Ion and Photon Beam
Technology and Nanofabrication, 6A.4, USA,
May 2007.
(75) Yuichi Utsumi, Takefumi Kishimoto,
“Enhancement of the Adhesive Force of Metal
films on PTFE Surface Achieved by Fast-Atom-Beam
Surface Modification”, p.127., 7th International
Workshop on High-Aspect-Ratio Micro-Structure
Technology 2007, FRANCE, June 2007.
(74) Yuichi Utsumi, Tomohiro Ikeda, Megumi
Minamitani, Kazuo Suwa, “Integrated Structure
of PMMA Microchannels for DNA Separation
by Microchip Capillary Electrophoresis”,
p.125., 7th International Workshop on High-Aspect-Ratio
Micro-Structure Technology 2007, FRANCE,
June 2007.
(73) Yuichi Utsumi, Toshifumi Asano, Yoshiaki
Ukita, Katsuhiro Matsui, Masahiro Takeo,
and Seiji Negoro, “High Sensitive Immunoassay
using Antibody Immobilized Micro Capillaries”,
p.205., 7th International Workshop on High-Aspect-Ratio
Micro-Structure Technology 2007, FRANCE,
June 2007.
(72) Yuichi Utsumi, Tomohiro Ikeda, Megumi
Minamitani, Kazuo Suwa, “Stacked Structure
of PMMA Microchannels for DNA Separation
Fabricated by Deep X-ray Lithography and
Fusion Bonding”, p.1161., 11th International
Coference on Miniatuarized Systems for Chemistry
and Life Science (?TAS2007), FRANCE, October 2007.
(71) Makoto Fukuda, Kimiyoshi. Deguchi,
M.asanori Suzuki, and Yuichi Utsumi, “Three-Dimensional
Patterning Using Fine Step Motion in SR Lithography”
The 50th International Conference on Electron,
Ion and Photon Beam Technology and Nanofabrication,
2006, pp.507-508.
(70) Yoshiaki Ukita, Kazuhiro Kanda, Shinji
Matsui, and Yuichi Utsumi,” Fabrication of Micro Mold by Synchrotron Radiation Direct
Etching of CYTOP for UV polymerization
Embossing” The 50th International Conference on Electron, Ion
and Photon Beam Technology and Nanofabrication,
2006, pp.146-147.
(69) Yoshiaki Ukita, Kazuhiro Kanda, Shinji
Matsui, and Yuichi Utsumi,” Fabrication of PTFE Microstructure using Synchrotron Radiation
Direct Etching for Microfluidics Application” The 50th International Conference on Electron, Ion
and Photon Beam Technology and Nanofabrication,
2006, pp.509-510.
(68) Yoshiaki Ukita, Kazuhiro Kanda, Shinji
Matsui, Mitsuyoshi Kishihara, and Yuichi
Utsumi,” Fabrication of Polytetrafluoroethylene Microparts
by High-Energy X-ray Induced Etching” International Microprocess and Nanotechnology
Conference, 2006, pp306-307.
(67) Yuichi Utsumi, Toshifumi Asano, Yoshiaki
Ukita, Katsuhiro Matsui, Masahiro Takeo,
and Seiji Negoro, ” Enzyme-Linked Immunosorbent Assay Using
Vertical Micro Reactor Stack for the Detection
of Biomolecules” International Microprocess and Nanotechnology
Conference, 2006, pp304-305.
(66) Yuichi Utsumi, Takefumi Kishimoto, Koichi
Okuda, Tadashi Hattori, Yoshiaki Ukita, and
Toshifumi Asano, Leading Edge Manufacturing 21st, JAPAN, Oct. 19-22, 2005.
(65) Yoshiaki Ukita, Kuniyo Fujiwara, Toshifumi
Asano, Takuya Yokoyama, Tsunemasa Saiki and
Yuichi Utsumi, Novel Characteristics of Multifunctional
Fluid Filter Fabricated by High Energy
SR Lithography, MNC2005, 26B-3-4, JAPAN,
Oct. 26-28, 2005.
(64) Yuichi Utsumi, Takefumi Kishimoto, Tadashi
Hattori, and Hirotsugi Hara, “Large Area
and Wide Dimensions X-ray Lithography Using
Energy Variable Synchrotron Radiation”,
High Aspect Radio Micro Structure Technology,
2005, pp.84-85.
(63) Yuichi Utsumi, Yusuke Hitaka, and Yoshiaki
Ukita, “Planar Micro Reactor for Biochemical
Application made from Silicon and Polymer”,
High Aspect Radio Micro Structure Technology,
2005, pp.194-195.
(62) Yuichi Utsumi, Toshifumi Asano, Yoshiaki
Ukita, Katsuhiro Matsui, Masahiro Takeo and
Seiji Negoro, “Proposal of a New Micro Reactor
for Vertical Chemical Operation”, The
49th International Conference on Electron, Ion
and Photon Beam Technology and Nanofabrication,
2005, pp.123-124.
(61) Yoshiaki Ukita, Toshifumi Asano, Yuichi Utsumi,
“Fluid Filter Fabricated by Deep X-ray Lithography
for Micro Fluidics”, High Aspect Radio Micro Structure Technology,
2005, pp.88-89.
(60) Toshifumi Asano, Katsuhiro Matsui, Yoshiaki
Ukita, Masahiro Takeo, Seiji Negoro and Yuichi
Utsumi, “Proposal of A New Micro Reactor
for Vertical Chemical Operation”, High Aspect Radio Micro Structure Technology,
2005, pp.14-15.
(59) Toshifumi Asano, Yoshiaki Ukita, Katsuhiro
Matsui, Masahiro Takeo, Seiji Negoro and
Yuichi Utsumi, “Study of Vertical Fluid
Flow Control for 3D Bio-micro Reactor”,
International Symposium on Molecule-Based
Information Transmission and Reception, 2005
, pp.6-12.
(58) Masatake Matsumoto, Kinji Takiguchi, Makoto
Tanaka, Yoichi Hunabiki, Hiroaki Takeda,
Atsushi Momose, Yuichi Utsumi, and Tadashi Hattori, “Fabrication
of Diffraction Grating for X-ray Talbot
Interferometer”, High Aspect Radio Micro Structure Technology,
2005, pp.22-23.
(57) Kazuyoshi Idei, Harutaka Mekaru, Shingo Kitamura,
Yoichi Murakoshi, Ryutaro Maeda, Yuichi Utsumi, and Tadashi Hattori, “Development
of Emboss Roll with Precise Micro Patterns
by 3D X-ray Lithography”, 2005, pp.242-243.
(56) Yuichi Utsumi, Toshifumi Asano, Tadashi Hattori,
Katsuhiro Matsui, Masahiro Takeo, and Seiji
Nerogo, “A New Micro Chemical Reactor Stack
for Vertical Fluid Flow Operation”, International
Microprocess and Nanotechnology Conference,
2004, pp.248-249.
(55) Yuichi Utsumi, Takefumi Kishimoto, Tadashi
Hattori, and Hirotsugi Hara, “Proposal of
Large Exposure Area and Wide Dimensional
X-ray Lithography for LIGA Process using
Energy Variable Synchrotron Radiation”,
International Microprocess and Nanotechnology
Conference, 2004, pp.104-105.
(54) Yuichi Utsumi, Takefumi Kishimoto, Harutaka
Mekaru, and Tadashi Hattori, “The Large-area
Deep X-ray Lithography System Using Synchrotron
Radiation”, International Conference on
Electrical Engineering, 2004, pp.608-613.
(53) Yuichi Utsumi, Takefumi Kishimoto, Tadashi
Hattori, and Hirotsugi Hara, “Advanced X-ray
Lithography System for LIGA process Using
Energy Variable Synchrotron Radiation”,
4th International Workshop on Microfactories,
2004, pp.275-280.
(52) Yuichi Utsumi, Megumi Minamitani, and Tadashi
Hattori, “A High Luminosity Lighting-Panel
for Liquid Crystal Displays fabricated by
Deep X-ray Lithography”, MICRO SYSTEM
Technologies 2003, pp.535-537.
(51) Yuichi Utsumi, Motoaki Ozaki, Sigeru Terabe,
and Tadashi Hattori, “Improvement of Capillary
Electrophoresis Property for Microchannels
Fabricated by Deep X-ray Lithography”,
High Aspect Radio Micro Structure Technology, 2003, pp.231-232.
(50) Nobuji Sakai, Kentaro Tada, Yuichi Utsumi,
and Tadashi Hattori “Advanced Ultra-Thick
Negative Photoresist with High Sensitivity
for X-Ray and UV Deep Lithography, High Aspect Radio Micro Structure Technology,
2003, pp.15-16.
(49) Megumi Minamitani, Yuichi Utsumi, and Tadashi
Hattori, “3D Microstructure Fabrication for a High
Luminosity Lighting-Panel for LCD Using Synchrotron
Radiation”, High Aspect Radio Micro Structure
Technology, 2003, pp.213-214.
(48) Takeshi Kitadani, Yuichi Utsumi, and Tadashi
Hattori, “Fabrication of Nickel Micro Mold
Inserts by The LIGA Process Using Synchrotron
Radiation from “NewSUBARU””,
Technical Digest of the 20th Sensor Symposium
2003, pp.231-236.
(47) Tsunemasa Saiki, Motoaki Ozaki, Yuichi Utsumi,
Hideaki Hisamoto, and Tadashi Hattori, “Comparison
of the Performance of Polymer-Based Capillary
Electrophoresis Microchips Fabricated by
Using Resist Molds Prepared by Synchrotron
Radiation Lithography and Ultraviolet Light
Lithography”, MICRO SYSTEM Technologies
2003, pp.517-519.
(46) Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe,
and Tadashi Hattori, “Effects of Improved
Microchannel Structures to The Separation
Characteristics of Microchip Capillary
Electrophoresis, International Microproceesses
and Nanotechnology Conference, 2002, pp.154-155.
(45) Yuichi Utsumi and Hattori Tadashi, “An Approach
of High Efficiency Fuel Reformer Using High
Aspect Metal Structure formed by Synchrotron
Radiation LIGA Process”, Power MEMS International
Workshop on Power MEMS, 2002, , pp.84-85.
(44) Yuichi Utsumi, Takeshi Kitadani, and Tadashi
Hattori, “Optimization of Nickel Electroplating
for High Aspect Ratio LIGA Mold Inserts Fabricated
by Synchrotron Radiation from “NewSUBARU””,
JMSE/AMSE International Conference on Materials
and Processing 2002, pp.585-588.
(43) Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe,
and Tadashi Hattori, “Prototyping of PDMS
Micro Capillary Electrophoresis Chips”,
Proceedings of The 1st Pacific Rim Meeting of Techno-Linkage
of Microfabrication, 2002, pp.79-83.
(42) Yuichi Utsumi, Motoaki Ozaki, Shigeru Terabe,
Tadashi Hattori, and Etsuo Shinohara, “Fabrication
of PDMS Micro Capillary Electrophoresis Chips”,
Technical Digest of the 19th Sensor Symposium
2002, pp.43-46.
(41) Takeshi Kitadani, Yuichi Utsumi, and Tadashi
Hattori, “Fabrication of Nickel Micro Mold
Inserts by The LIGA Process Using Synchrotron
Radiation from “NewSUBARU”, Technical
Digest of the 19th Sensor Symposium 2002,
pp.74-77.
(40) Takeshi Kitadani, Yuichi Utsumi, and Tadashi
Hattori, “Fabrication of The Micro Molding
Inserts by The LIGA Process Using Synchrotron
Radiation from “NewSUBARU”, Proceedings
of The 1st Pacific Rim Meeting of Techno-Linkage of
Microfabrication, 2002, pp.75-78.
(39) Motoaki Ozaki, Yuichi Utsumi, Shigeru Terabe,
and Tadashi Hattori, “Fabrication of Plastic
Microchip for Electrophoresis Using UV Polymerization”,
JMSE/AMSE International Conference on Materials
and Processing 2002, pp.490-493.
(38) Harutaka Mekaru, Yuichi Utsumi, and Tadashi
Hattori, “Current Status of LIGA Process
at “NewSUBARU””, JMSE/AMSE International
Conference on Materials and Processing,
2002, pp.589-592.
(37) Harutaka Mekaru, Yuichi Utsumi, and Tadashi
Hattori, “A deep X-ray Lithography in the
“NewSUBARU””, International Microproceesses
and Nanotechnology Conference, 2002, pp.156-157.
(36) Yuichi Utsumi and Tadashi Hattori, “Synthesis
of Ammonium and Organic Compounds from Air
Component Gasses by Soft X-ray Induced Reactions
at Atmospheric Pressure”, 12th U.S. National
Synchrotron Radiation Instrumentation Conference,
2001, pp.70.
(35) Yuichi Utsumi and Tadashi Hattori, “A New
Approach to Microfabrication and Synthesization
Using Synchrotron Radiation Excited Chemical
Reaction”, High Aspect Radio Micro Structure
Technology 2001, pp.187-188.
(34) Yuichi Utsumi and Tadashi Hattori, “A New
Approach to Microfabrication Using Synchrotron
Radiation Induced Photochemical Reaction”,
Technical Digest of the 18th Sensor Symposium
2001, pp.77-80.
(33) S. Iwamoto, K. Maenaka, Y. Utsumi, T. Hattori
and T. Matsuda, “A Study of X-ray Masks
for Deep Lithography”, Technical Digest
of the 18th Sensor Symposium 2001, pp.69-72.
(32) K. Maenaka, S. Ioku, S. Iwamoto, Y. Utsumi
and T. Hattori, “X-ray Masks for Deep Lithography:”,
High Aspect Radio Micro Structure Technology,
2001, pp.19-20.
(31) Tadashi Hattori, Harutaka Mekaru, and Yuichi
Utsumi, “A New Approach to 3D-Microstructure
Fabrication Utilizing Hard X-ray Lithography
of SR”, 12th U.S. National Synchrotron
Radiation Instrumentation Conference, 2001,
pp.64.
(30) Tadashi Hattori, Harutaka Mekaru and Yuichi
Utsumi, “Quasi 3D Microstructure Fabrication
Technique Utilizing Hard X-Ray Lithography
of Synchrotron Radiation ”, High Aspect
Radio Micro Structure Technology 2001, pp.
21-22.
(29) Etsuo Shinohara, Nobuyoshi Tajima, Jun Funazaki,
Koichi Tashiro, Shuichi Shoji, Yuichi Utsumi
and Tadashi Hattori, “Free Flow Electrophoresis
Module For Rapid Sample Preparation”,
Micro Total Analysis Systems 2001, pp.125-126.
(28) Yuichi Utsumi, Tomoaki Kawamura, Yoshio Watanabe,
Kunihiko Uwai, Hiroki Hibino, Toshiro Ogino,
Junji Matsui, Yoshiyuki Tsusaka, and Yasushi kagoshima, ”Grazing
Incidence Surface X-ray Diffractometer for
Gas Phase Crystal Growth Using High Brilliance
X-ray of SPring-8”, The 65th Okazaki International
Conference, 2000, pos34.
(27) Yuichi Utsumi, Harutaka Mekaru, Tadashi Hattori,
“Application of Synchrotron Radiation to
Microfablication”, 12th The Material Research Society Japan,
2000, K1-014.
(26) Yuichi Utsumi, Harutaka Mekaru, Tadashi Hattori,
Shinji Matsui and Takayasu Mochizuki, “Chemical
Application Research Using "New SUBARU
" 1.5 GeV Storage Ring” International Chemical Congress of Pacific Basin Societies,
2000, PHYS 127.
(25) Tomoaki Kawamura, Yuichi Utsumi, Kunihiko Uwai, Yoshio Watanabe, Junji Matsui, Yasushi Kagoshima, Yoshiyuki
Tsusaka, and Seiji Fujikawa, “In Situ Observation of InP(001) Surface
under Hydrogen Atmospheric Environment Using
Grazing X-ray Diffraction”, The 10th International
Conference on Metalorganic Vapor Phase
Epitaxy 2000, pp.45-47.
(24) Harutaka Mekaru, Yuichi Utsumi, and Tadashi
Hattori, “Beamline BL11 for LIGA Process
at The New SUBARU”, The 7th International
Conference on Synchrotron Radiation Instrumentation,
2000, POS2-151.
(23) Yuichi Utsumi, Tomoaki Kawamura, Yoshio Watanabe,
Kunihiko Uwai, Muneyuki Sugiyama, Junji Matsui,
Yoshiyuki Tsusaka, and Yasushi kagoshima, “ Development
of Grazing-Incidence X-ray Scattering Apparatus
for In Situ Analysis of Surface Structure
During MOVPE”, The 1st UK-Japan International
Seminar of Application of Synchrotron Radiation
to Studies of Nano-Structured Materials,
1999, pp.80-84.
(22) Jun-ichi Takahashi, Hitomi Masuda, Takeo
Kaneko, Kensei Kobayashi, Takeshi Saito,
Teruo Hosokawa, and Yuichi Utsumi, “Abiotic
Synthesis of Amino Acid Precursors by X-ray
and Vacuum Ultraviolet Irrdiation from Synchrotron
Radiation”,12th International Conference
on Vacuum Ultra Violet Radiation Physics
(VUV12), 1998, Mo035.
(21) Jun-ichi Takahashi,Yuichi Utsumi, and Teruo
Hosokawa, “Particle Precipitation on X-ray
Mask Surfaces by SR-induced Fixation of Atmospheric Gas Molecules”, 12th International
Conference on Vacuum Ultra Violet Radiation
Physics (VUV12) , 1998, Tu127.
(20) Tsuneyuki Haga,Yuichi Utsumi, and Seiichi
Itabashi, “Soft X-ray Ellipsometer using
Transmission Multilayer Polarizers”, International
Symposium on Optical Science, Engineering,
and Instrumentation (SPIE 43rd Annual Meeting),
1998, pp.117-127.
(19) Tomoaki Kawamura, Yuichi Utsumi, Muneyuki
Sugiyama, Yoshio Watanabe, Kunihiko Uwai, Junji Matsui, Yasushi Kagoshima,
Yoshiyuki Tsusaka, and Seiji Fujikawa, “Surface X-ray Diffractometer for MOVPE
Growth at Spring-8”, American Vacuum Society 45th International
Symposium, 1998, pp. 167-171.
(18) Yuichi Utsumi, “Si Photoepitaxy Induced by Synchrotron Radiation”
(INVITED) , SPIE Conference -Laser applications in micrtoelectronic
and Optoelectronic Manufacturing II, (1997),
pp.78- 89.
(17) Yuichi Utsumi, Jun-ichi Takahashi, and Teruo
Hosokawa, “Synchrotron Radiation-Induced
Formation of Salt Particles on X-ray Lithography
Mask in The Atmosphere”, 6th International Conference on Synchrotron
Radiation Instrumentation, 1997, pp.234.
(16) Jun-ichi Takahashi , Yuichi Utsumi,, and
Teruo Hosokawa, “The Beamline for SR-Induced
Photochemical Reaction Using Synchrotron
Radiation”, 6th International Conference
on Synchrotron Radiation Instrumentation, 1997, pp.235.
(15) Housei Akazawa, and Yuichi Utsumi, “ Photodesorption
and Photolysis during Synchrotron Radiation
Excited Boron Film Deposition from Decaborane”,
11th International Conference on Vacuum
Ultra Violet Radiation Physics (VUV11), 1995, pp.M40.
(14) Housei Akazawa, and Yuichi Utsumi, “Temperature
Effect in Synchrotron Radiation Excited Si
Atomic Layer Epitaxy Using Disilane”, Atomic
Layer Epitaxy and Related Surface Processes
(ALE-3), 1994, pp. 114-115.
(13) Yuichi Utsumi, Housei Akazawa, and Masao
Nagase, “Perfect Selective Si Epitaxial
Growth Realized by Synchrotron Radiation
Irradiation during Disilane Molecular Beam
Epitaxy”, Material Research Society Fall
Meeting, 1993, pp 525-531.
(12) Housei Akazawa, Yuichi Utsumi, and Masao
Nagase, “Specific Growth kinetics and Film
Properties in Synchrotron Radiation Excited
Silicon Epitaxy with Disilane”, 1st International
Conference on Photo-Excited Processes and
Applications, 1993, pp53-58.
(11) Housei Akazawa, Masao Nagase, and Yuichi Utsumi, “Synchrotron Radiation-Stimulated
Evaporation and Defect Formation of a-SiO2”, 7th International Conference on Radiation
Effects in Insulators, 1993, pp.36-41.
(10) Tsuneo Urisu, Junichi Takahashi, Yuichi Utsumi,
Tetsuo Akutsu, and Kozo Kuchitsu, “Synchrotron Radiation Assisted Si Epitaxial
Growth Using Si2H6 and Si2H2 Cl2 Gases -Properties in the Low Temperature Region-“,
Second International Symposium on Electrochemical
Processing of Tailored Materials, 1993, pp.
1562-1565.
(9) Masao Nagase, Yuichi Utsumi, Housei Akazawa,
and Tsuneo Urisu, “ Site Specific Oxygen
Desorption from Molybdenum Oxide by SR Irradiation
and Surface Cleaning Applications”, Micro
Process Conference, 1992, pp.182-183.
(8) Yuichi Utsumi, Jun-ichi Takahashi, Housei
Akazawa, and Tsuneo Urisu, “The Crystallinity
Improvement by the SR Irradiation in the
Low Temperature Si Epitaxial Growth Using
Disilane”, International Micro Process Conference,
1991, pp.260-261.
(7) Tsuneo Urisu, Jun-ichi Takahashi, Housei
Akazawa, and Yuichi Utsumi, “Low Temperature
Semiconductor Process by Synchrotron Radiation”,
The First International Meeting on Optoelectronic and Technology Development, 1991, pp. 48-55.
(6) Jun-ichi Takahashi, Yuichi Utsumi and Tsuneo
Urisu, “Photochemical Area-Selective Etching
of Si and SiO2 Using Synchrotron Radiation”, Materials
Research Society Fall Meeting 1990, 158,
pp.53-58.
(5) Housei Akazawa, Yuichi Utsumi, Jun-ichi Takahashi
and Tsuneo Urisu, “Photo-Stimulated Evaporation
of SiO2 Films by Synchrotron Radiation and Application
to Low Temperature Cleaning of Si (100)”,
22nd Conference on Solid State Devices and
Materials, 1990, pp.1171-1172.
(4) Yuichi Utsumi, Jun-ichi Takahashi, Tsuneo
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