
The beam line 7 (BL-07) was constructed for the research of new material creation by SR-nanotechnology. For the investigation of the new-material development using SR, two kinds of light source are demanded in the soft X-ray region. One is a high-photon flux and energy tunable beam line for the SR-stimulated processes, such as an inner-shell excitation leading to selective photochemical reaction. Another is a high-resolution beamline for the analysis on the produced materials, such as photoelectron spectroscopy and fluorescent X-ray emission spectroscopy. BL-07 consists of two-branch lines. At the high-flux beamline (BL7A), Multilayered-mirror (MLM) monochromator, which has high reflectivity in the soft X-ray region, was installed. On the other hand, on the material-analysis beamline (BL7B), a constant-deviation monochromator, consisting of a demagnifying spherical mirror and varied line spacing plane grating (VLSPG), which can provide to high resolution, simple wavelength scanning with fixed slits was mounted.
a) Optical Layout
b) Acceptances: 2.2 mrad (horizontal), 3.8 mrad (vertical)
c)Incident angle: 3 deg., Radius R=312400 mm、Size: 400x40x40mm3
d)Material: Si, Coating: Pt
Al 100nm、Ag 100nm Cr 500nm, Ni 500nm
a) Irradiation experiment, Inner-shell excitation process
b) Sample size: 20(W)x16(H)mm2
c) Exposure area: 20(W)x16(H)mm2
d) Vacuum:< 10-6Pa
e) Photon Flux
2x1016photon/s (at 95eV, 100mA)
4x1013photon/s (at 300eV, 100mA)
a)Acceptance angle, horizontal:2.2mrad, vertical:2.4mrad
b)Incidence angle 3°, R=125189mm, r=356mm, size=400× 40× 40mm3
c)Ni coated Si
a)incidence angle=2°, R=100288mm, size=220× 30× 18.6mm3
b)Ni coated Si
a)incidence angle=4°, R=20856mm, size=150× 30× 17.8mm3
b)Ni coated Si
a)Constant-deviation monochromator
b)Specification of the grating
Groove density (lines/mm) |
Groove depth (nm) |
Duty ratio | Energy (eV) |
|
---|---|---|---|---|
G1 | 600 | 18.0 | 0.4 | 50-150 |
G2 | 1200 | 9.0 | 0.4 | 150-300 |
G3 | 2400 | 4.5 | 0.4 | 300-800 |
a)Photoemission spectroscopy, Absorption
b)Sample size: Solid at the size of 5× 5mm2
c)Exposure area:1×3mm2
d)Ultra high Vacuum:solid samples, which do not pollute the vacuum vessel, are possible to measure the photoemission and absorption spectra.
e)The number of photons: 1011~1013photon/s
Quadrupole mass analyzer