○Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays
Japanese Journal of Applied Physics 57, 045501 (2018)
Kazuhiro Kanda, Hiroki Takamatsu, Eri Miura-Fujiwara, Hiroki Akasaka,
Akihiro Saiga, and Koji Tamada
○ Low-temperature activation of boron ion in silicon substrate
using B10H14+ cluster and by soft X-ray irradiation
Akira Heya, Naoto Matsuo, and Kazuhiro Kanda
Japanese Journal of Applied Physics 57 (2018) 116502,
https://doi.org/10.7567/JJAP.57.116502. |