発表論文 2017



○Structural analysis of amorphous carbon films by BEMA theory based on spectroscopic ellipsometry measurement
 Diamond & Related Materials 79C (2017) 46-59
 XiaoLong Zhou, Satoru Arakawa, Sarayut Tunmee, Keiji Komatsu, Kazuhiro Kanda, Haruhiko Ito, Hidetoshi Saitoh
○Soft X-ray irradiation effect on the fluorinated DLC film
 Diamond & Related Materials 79C (2017) 14-20
 Hiroki Takamatsu, Masahito Niibe, XiaoLong Zhou, Keiji Komatsu, Hidetoshi Saitoh,   Hiroki Akasaka, Akihiro Saiga, Koji Tamada, Masahito Tagawa, Kumiko Yokota, Yuichi  Furuyama, Kazuhiro Kanda
○ ダイヤモンドをよく知るために 〜量子ビーム利用測定技術(1)
X線吸収分光を用いた局所構造解析
NEW DIAMOND 第126号 37-40 (2017)
神田 一浩
Formation of nanocrystalline silicon in SiOx by soft X-ray irradiation
  at low temperature

    Japanese Journal of Applied Physics 56, 035501 (2017)
    Akira Heya, Fumito Kusakabe, Naoto Matsuo, Kazuhiro Kanda, Kazuyuki Kohama,
    Kazuhiro Ito
○ Modification Processes of Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation
Sensors and Materials, 29 817-826 (2017)
Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh
○Structural analysis of amorphous carbon films by spectroscopic ellipsometry,   RBS/ERDA, and NEXAFS
 Journal: Appl. Phys. Lett. 110, 201902 (2017).
 XiaoLong Zhou,  Tsuneo Suzuki,  Hideki Nakajima,  Keiji Komatsu, Kazuhiro Kanda,   Haruhiko Ito, and  Hidetoshi Saitoh
○DLC膜構造分析とISO規格化
 応用物理 86, 558-564 (2017)
 神田 一浩
                                                                  研究業績