○ Comprehensive Classification of Near-Edge X-Ray Absorption Fine Structure Spectra of
Si-Containing Diamond-Like Carbon Thin Films.
Jpn. J. Appl. 52 (2013) 095504
K.Kanda, M.Niibe, A.Wada, H.Ito, T.Suzuki, T.Ohana, N.Ohtake, and H.Saitoh
○ Influence of the source gas ratio on the hydrogen and deuterium
content of a-C:H and a-C:D films: Plasma-enhanced CVD with
CH4/H2, CH4/D2, CD4/H2 and CD4/D2
Applied Surface Science, 265 (2013) 750
K. Ozeki, D. Sekiba, T. Suzuki, K. Kanda, M. Niibe, K.K. Hirakuri, T.
Masuzawa
○ Crystallization of Si1-xGex Multilayer by soft X-ray Irradiation
Applied Physics Express, 6 (2013) 065501
A. Heya, N. Matsuo, M. Takahashi, K. Ito, and K.Kanda
○ Low-temperature crystallization of amorphus silicon and amorphous germanium
by soft X-ray irradiation
Thin Solid Films, 534 (2013) 334-340
A. Heya, K. Kanda, K. Toko, T. Sadoh, S. Amano, N. Matsuo, S. Miyamoto,
M. Miyao, T. Mochizuki
○ Construction of a Wide-range High-resolution Beamline BL05 in NewSUBARU
for X-ray
Spectroscopic Analysis on Industrial Materials.
J. Phys..: Conf. Ser. 425 (2013) 132005
K. Kanda, T. Hasegawa, M. Uemura, M. Niibe, Y. Haruyama, M. Motoyama,
K. Amemiya,
S. Fukushima and T. Ohta
○ Fabrication of Amorphous Silicon Carbide Films from Decomposition of
Tetramethylsilane useing ECR plasma of Ar.
J. Phys.: Conf. Ser. 441 (2013) 012039
H. Ito, S. Onitsuka, R. Gappa, H. Saitoh, R. Roacho, K. H. Pannell,
T. Suzuki,
M, Niibe, K.Kanda
○ レーザープラズマからの5-17nm軟X線の集光用Ruミラーの研究
レーザー研究 41(1) 59-62 (2013)
井上智章, 望月孝晏, 宮本修治, 増田和也, 天野壮, 神田一浩 |