発表論文 2011

○ Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated
  by Ga Focused Ion Beam Chemical Vapor Deposition
   Japanese Journal of Applied Physics 50 (2011) 06GG05
   Akira Wada, Tsuneo Suzuki, Masahito Niibe, Haruhiko Ito, and Kazuhiro Kanda

○ Soft X-ray Conversion Efficiencies in Laser-Produced Xenon and Tin Plasmas
  in a 5-17 nm Wavelength Range.
   Japanese Journal of Applied Physics 50 (2011) 098001
   Tomoyuki Inoue, Takayasu Mochizuki, Shuji Miyamoto, Takeo Watanabe,
   and Kazuhiro Kanda

○ Departure Process of Ga from DLC Films Fabricated Using Ga Focused Ion Beam Assisted
  Deposition by Heat Treatment.
   Transactions of Materials Research Society of Japan 36 (2011) 71
   Kazuhiro Kanda, Makoto Okada, Yuji Kang, Tsuneo Suzuki, and Shinji Matsui

○ Inhibition of Electrochemical Fouling against Biomolecules on a Diamond-Like Carbon Electrode.
   Analytical Sciences 27 (2011) 91-94
   Takuya Goto, Tomoyuki Yasukawa, Kazuhiro Kanda, Shinji Matsui, and Fumio Mizutani.

○ Local structural analysis of a-SiCx:H films formed by decomposition of tetramethylsilane
  in microwave discharge flow of Ar
   Diamond and Related Materials 20 (2011) 364-367
   Akira Wada, Takeshi Ogaki, Masahito Niibe, Masahito Tagawa, Hidetoshi Saitoh,
   Kazuhiro Kanda and Haruhiko Ito

○ Fabrication of Fluorine-terminated Diamond-Like Carbon Thin Film Using a Hyperthermal
  Atomic Fluorine Beam.
   Diamond and Related Materials 20 (2011) 703-706
   Kazuhiro Kanda, Noriko Yamada, Kumiko Yokota, Masahito Tagawa, Masahito Niibe,
   Mokoto Okada, Yuich Haruyama, and Shinji Matsui

○ Effect of the Soft X-rays on Highly Hydrogenated Diamond-Like Carbon Films
   Japanese Journal of Applied Physics 50 (2011) 055801
   Kazuhiro Kanda, Kumiko Yokota, Masahito Tagawa, Mayumi Tode, Yuden Teraoka,
   and Shinji Matsui

○ .Room temperature nanoimprinting using spin-coated hydrogen silsesquioxane with
   high boiling point solven
   Journal of Vacuum Sience and Technology B 29(6) (2011) 06FC03
   Yuji Kang, Makoto Okada, Shinya omoto, Yuichi Haruyama, Kazuhiro Kanda
   and Shinji Matsui

○ Nanoimprint replication of nonplanar nanostructure fabricated by
   focused-ion-beam chemical vapor depositon
   Journal of Vacuum Sience and Technology B 29(1) (2011) 011005
   Yuji Kang, Shinya Omoto, Yasuki Nakai, Makoto Okada, Kazuhiro Kanda,
   Yuichi Haruyama,and Shinji Matsui


研究実績