○ Deposition Yield and Physical Property of Carbon Films Deposited by Focused
Ion Beam
Chemical Vapor Deposition.
Japanese Journal of Applied Physics 49 (2010) 06GH08
Takashi Kaito, Hiroshi Oba, Yasuhiko Sugiyama, Anto Yasaka, Jun-ichi
Fujita, Tsuneo Suzuki,
Kazuhiro Kanda, and Shinji Matsui.
○ Cross-sectional observation of nanoimprint resins filled in SiO2/Si mold
pattern
using scanning electron microscopy.
Microelectronic Engineering, 87 (2010) 1159
Makoto Okada, Mayuko Shibata, Yuichi Haruyama, Kazuhiro Kanda, Yoshihiko
Hirai,
and Shinji Matsui
○ Structural Changes in Diamond-Like Carbon Films Fabricated by Ga Focused-Ion-Beam-Assisted
Deposition Caused by Annealing.
Japanese Journal of Applied Physics 49 (2010) 06GH06
Kazuhiro Kanda, Makoto Okada, Yuji Kang, Masahito Niibe, Akira Wada,
Haruhiko Ito,
Tsuneo Suzuki, and Shinji Matsui
○ Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam
Chemical Vapor Deposition Using Ferrocene Source Gas.
Japanese Journal of Applied Physics 49 (2010) 06GH07
Yasuki Nakai, Yuji Kang, Makoto Okada, Yuichi Haruyama, Kazuhiro Kanda,
Tetsuya Ichihashi, and Shinji Matsui
○ Direct Patterning on Sol-Gel Low-k Porous Silica by Thermal Nanoimprinting.
Japanese Journal of Applied Physics 49 (2010) 06GL08
Makoto Okada, Takahiro Nakayama, Yuji Kang, Yuichi Haruyama, Kazuhiro
Kanda,
and Shinji Matsui.
○ Room-Temperature Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane
with Hard Poly(dimethylsiloxane) Mold.
Japanese Journal of Applied Physics 49 (2010) 06GL13
Yuji Kang, Makoto Okada, Chiaki Minari, Kazuhiro Kanda, Yuichi Haruyama,
and Shinji Matsui.
○ Synchrotron Radiation Photoelectron Spectroscopy and Near-Edge X-Ray
Absorption Fine Structure Study on Oxidative Etching of Diamond Like
Carbon Films
by Hyperthermal Atomic Oxygen.
Applied Surface Science 256 (2010) 7678-7683.
Masahito Tagawa, Kumiko Yokota, Akira Kitamura, Koji Matsumoto,
Akitaka Yoshigoe, Yuden Teraoka, Kazuhiro Kanda, Masahito Niibe
○ UV Irradiation Effect on Pattern Size Shrinkage of Sol-gel Indium Tin
Oxide Replicated by
Nanoimprint Lithography
Journal of Photopolymer Science and Technology 23 (2010 ) 39-43
Yuji Kang, Makoto Okada, Yuichi Haruyama, Kazuhiro kanda, and Shinji
Matsui.
○ Themal Nanoimprinting on Prealigned Photoreactive Polymer Liquid Crystal
for Molecular Reorientation.
Japanese Journal of Applied Physics 49 (2010) 128004
M. Okada, S. Manabe, M. Kurita, M. Kondo, Y. Haruyama, K. Knada, A.
Emoto, H. Ono
N. Kawatsuki and S. Matsui.
○ "Evaluation of Heat Durability of Fluorinated Antisticking Layers"
Y. Nakai, S. Omoto, M. Okada, K. Kanda, Y. Haruyama, S. Matsui
Journal of Photopolymer Science and Technology, 23 (2010) 55-58.
10.2494/photopolymer.23.55
○ "Comparison of EB Exposure Characteristics between HSQ and Calix Arene of High Resolution
Negative Resist"
S. Omoto, M. Okada, Y. Kang, K. Kanda, Y. Haruyama, S. Tono, S. Matsui
Journal of Photopolymer Science and Technology, 23 (2010) 97-100.
10.2494/photopolymer.23.97
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