○ Graphitization of thin films formed by focused-ion-beam chemical-vapor-deposition.
Diamond & Related Materials 18 (2009) 490-492.
Kazuhiro Kanda, Jun-ya Igaki, Noriko Yamada, Reo Kometani, and Shinji
Matsui
○ Nanostructure Analysis of Nanosprings Fabricated by Focused-Ion-Beam
Chemical Vapor Deposition.
Japanese Journal of Applied Physics 48 (2009) 105001
Ken-ichiro Nakamatsu, Toshinari Ichihashi, Kazuhiro Kanda, Yuichi Haruyama,
Takashi Kaito,
and Shinji Matsui
○ Characteristics of Antisticking Layer Formed by CHF3 Plasma Irradiation
for Nanoimprint Molds.
Japanese Journal of Applied Physics 48 (2009) 06FH15
Makoto Okada, Ken-ichiro Nakamatsu, Yuji Kang, Kazuhiro Kanda, Yuichi
Haruyama,
and Shinji Matsui.
○ Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen
Silsesquioxane.
Applied Physics Express 2 (2009) 016502
Makoto Okada, Ken-ichiro Nakamatsu, Masayuki Iwasa, Kazuhiro Kanda,
Yuichi Haruyama,
and Shinji Matsui
○ Durability of antisticking layer against heat in nanoimprinting evaluated
using
scanning probe microscopy.
Microelectronic Engineering 86 (2009) 657
Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda,
Yuichi Haruyama,
and Shinji Matsui.
○ Nanoimprinting using release-agent-coated resins.
Microelectronic Engineering, 86 (2009) 673.
Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda,
Yuichi Haruyama,
and Shinji Matsui.
○ UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by
room,-temperature nanoimprint
Journal of Vacuum Sience and Technology B 27(6) (2009) 2805-2809
Yuji Kang, Makoto Okada, Ken-Ichiro Nakamatsu, Kazuhiro kanda, Yuichi
Haruyama,
and Shinji Matsui
○ Room-Temperature Nanoimprint using Sol-Gel ITO Film
Journal of Photopolymer Science and Techonlogy 22 (2009) 189-192
Yuji Kang, Makoto Okada, Ken-ichiro Nakamatsu, Kazuhiro Kanda, and Shinji
Matsui
○ Room-Temperature Nanoimprint using Liquid-Phase Hydrogen Silsesquioxane with PDMS mold
Journal of Photopolymer Science and Technology 22 (2009) 193-194
Yuji Kang, Makoto Okada, Ken-ichiro Nakamatsu, Yuichi Haruyama, Kazuhiro Kanda,
and Shinji Matsu.
○ DLC(Diamond Like Carbon)の標準化について
PETROTECH 石油学会 32(4) 259-262 (2009)
神田一浩
○ アンジュレータ光源に利用した軟X線励起によるa-Si膜表面のSi原子移動
日本金属学会誌 73(9) 708-712 (2009)
松尾直人, 高梨泰幸, 部家彰, 神田一浩 |