発表論文 2008

○ Comprehensive classification of DLC films formed by various methods using
  NEXAFS measurement.
   Diamond & Related Materials 17 (2008) 1743-1745.
   Akihiko Saikubo, Noriko Yamada, Kazuhiro Kanda, Shinji Matsui, Tsuneo Suzuki,
   Koichi Niihara,and Hidetoshi Saitoh

○ Evaluation of fluorinated diamond like carbon as antisticking layer
  by scanning probe microscopy.
   Journal of Photopolymer Science and Technology 21 (2008) 597-599.
   M. Okada, M. Iwasa, K, Nakamatsu, N. Yamada, K. Kanda, Y. Haruyama, and S. Matsui

○ Polytetrafluoroethylene processing characteristics using high-energy X-ray.
   Microsystem Technologies 14 (2008) 1567-1572.
   Y. Ukita, K. Kanda, S. Matsui, M. Kishihara, Y. Utsumi.

○ Effect of Annealing on Implanted Ga of Diamond-Like Carbon Thin Films Fabricated
  by Focused-Ion-Beam Chemical Vapor Deposition.
   Jpn. J. Appl. Phys. 47(2008) 9010-9012.
   Takahiro Nagata, Yoshiki Samuka, Masamitsu Haemori, Kiyomi Nakajima, Reo Kometani,
   Kazuhiro Kanda, Shinji Matsui, and Toyohiro Chikyow

○ Fabrication of Poly(tetrafluoroethylene) Microparts by High-Energy
  X-ray-Induced Etching.
   Jpn. J. Appl. Phys. 47 (2008) 337-341.
   Yoshiaki Ukita, Mitsuyoshi Kishihara, Kazuhiro Kanda, Shinji Matsui, Kozo Mochiji,
   and Yuichi Utsumi

○ Fabrication of fluorocarbon terminated DLC thin film using soft X-ray.
   Diamond and Related Materials 17 (2008) 655-658.
   Noriko Yamada, Kazuhiro Kanda, Akihiko Saikubo, Masahito Niibe, Yuichi Haruyama,
   and Shinji Matsui

○ XAFS measurement of gallium in DLC thin film fabricated by FIB-CVD method.
   Diamond and Related Materials 17 (2008) 659-663.
   Akihiko Saikubo, Jun-ya Igaki, Reo Kometani, Kazuhiro Kanda, and Shinji Matsui

○ Deposition of mechanically hard amorphous carbon nitride films
  with high [N]/([N]+[C]) ratio.
   Diamond and Related Materials 17 (2008) 688-691.
   Haruhiko Ito, Kazuhiro Kanda, and Hidetoshi Saitoh

○ Hydrogen-storage characteristics of hydrogenated amorphous carbon nitrides
   Thin Solid Films 516 (2008) 6575-6579.
   Haruhiko Ito, Taro Nozaki, Akihiko Saikubo, Noriko Yamada, Kazuhiro Kanda,
   Masahito Niibe, and Hidetoshi Saitoh

○ Characterization of high nitrogen content-amorphous carbon nitride films
  using NEXAFS spectroscopy.
   Diamond & Related Materials 17 (2008), pp. 1755-1758.
   Kazuhiro Kanda, Jun-ya Igaki, Reo Kometani, Shinji Matsui and Haruhiko Ito

○ X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed
  by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition.
   Jpn. J. Appl. Phys. 47 (2008) pp. 3380-3383.
   Yuichi Haruyama, Teruyuki Kitagawa, Kazuhiro Kanda, Shinji Matsui, Tatsuo Gejo,
   Noriaki Toyoda, and Isao Yamada

○ Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited
  by Focused-Ion-Beam Chemical Vapor Deposition.
   Jpn. J. Appl. Phys. 47 (2008) 5032-5035.
   Reo Kometani, Sunao Ishihara, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito,
   and Shinji Matsui

○ Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates.
   Jpn. J. Appl. Phys. 47 (2008) 5160-5163.
   Makoto Okada, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Reo Kometani,
   Takashi Kaito, and Shinji Matsui

○ Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed
  by Focused-Ion-Beam Chemical Vapor Deposition.
   Jpn. J. Appl. Phys. 47 (2008) 7464-7466.
   Kazuhiro Kanda, Jun-ya Igaki, Akihiko Saikubo, Reo Kometani, Tsuneo Suzuki,
   Koichi Niihara, Hidetoshi Saitoh, and Shinji Matsui

○ Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint   
  Characterized by Scanning Probe Microscopy.
   Jpn. J. Appl. Phys. 47 (2008) 7467-7469.
   Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Noriko Yamada,
   Kazuhiro Kanda, Yuichi Haruyama, and Shinji Matsui

○ Structure analysis of thin corrosion product film on hot-dip Zn-Al coationgs
  using soft X-ray synchron radiation.
   Corrosion Engineering, 57 (2008) 103-111
   K. Nishihara, M. Matsumoto, M. Kimoto, T. Kudo, H. Uchida, Y. Haruyama,
   K. Kanda and S. Matsui

○ Application of synchrotron radiation photoemission spectroscopy to structure
  analysis of thin corrosion product films on hot-dip Zn-Al coationgs.
   ECS Trans, 11 (22) 39 (2008)
   K. Nishihara, M. Matsumoto, M. Kimoto, T. Kudo, H. Uchida, Y. Haruyama,
   K. Kanda and S. Matsui

研究実績