○ Nanomechanical switch fabrication by focused-ion-beam chemical vapor
deposition.
J. Vac. Sci. Technol. B, 22(6) (2004) 3137-3142.
Takahiko Morita, Ken-ichi Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama,
Kazushige Kondo, Takayuki Hoshino, Takashi Kaito, Jun-ichi Fujita,
Toshinari Ichihashi, Masahiko Ishida, Yukinori Ochiai, Tsutomu Tajima,
and Shinji Matsui.
○ Namoimprint Mold Repair by Ga+ Focused-Ion-Beam Direct Etching.
Jpn. J. Appl. Phys., 43, Part3, No.11A, (2004) 7769-7772.
Keiichiro Watanabe, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito,
and Shinji Matsui.
○ Synchrotron Radiation Effect in the Soft X-ray Region on the Surface
Properties of Pyromellitic Dianhydride-Oxydianline Polyimide.
Jpn. J. Appl. Phys., 43, No.6B, (2004) 3938-3940.
Yuri Kato, Kazuhiro Kanda, Yuichi Haruyama and Shinji Matsui.
○ Study of Au-Si(100) interface by means of Si 2p core-level photoemission
spectroscopy.
J. Electrosc. and Relat. Phenomena. 137-140 (2004) 97-100.
Yuichi Haruyama, Kazuhiro Kanda and Shinji Matsui.
○ Namoimprint using three-dimensional microlens mold made by focused-ion-
beam chemical vapor deposition.
J. Vac. Sci. Technol., B 22(1), (2004) 22-26.
K. Watanabe, T. Morita, R. Kometani, T. Hoshino, K. Kondo, K. Kanda,
Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima and
S. Matsui.
○ "Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical
vapor deposition"
Reo Kometani, Takahiko Morita, Keiichiro Watanabe, Takayuki Hoshino,
Kazushige Kondo,
Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko
Ishida, Yukinori Ochiai,
Shinji Matsui
Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, 22 (2004) 257.
10.1116/1.1643056
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