○ Free-space-wiring fabrication in nano-space by focused-ion-beam chemical
vapor deposition.
J. Vac. Sci. Technol. B, 21, (2003) 2737-2741.
Takahiko Morita, Reo Kometani, Keiichiro, Watanabe, Kazuhiro Kanda,
Yuichi Haruyama, Takayuki Hoshino, Kazushige Kondo, Takashi Kaito,
Tsutomu Tajima and Shinji Matsui.
○ 放射光によるSOG（スピンオングラス）の微細加工.
レーザ協会誌, 28, No.2, (2003) 54-59.
谷口 淳、宮本 岩男、神田 一浩、春山 雄一、松井 真二
○ Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam
Chemical Vapor Deposition and Etching.
Jpn. J. Appl. Phys., 42, Part1, No.6B, (2003) 4107-4110.
Reo Kometani, Takahiko Morita, Keiichiro, Watanabe, Kazuhiro Kanda,
Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko Ishida,
Yukinori Ochiai and Shinji Matsui.
○ Near Edge X-Ray Absorption Fine Structure Study for Optimization of
Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam.
Jpn. J. Appl. Phys., 42, Part1, No.6B, (2003) 3971-3975.
Teruyuki Kitagawa, Kazuya Miyauchi, Kazuhiro Kanda, Yutaka
Shimizugawa, Noriaki Toyoda, Harushige Tsubakino, Shinji Matsui,
Jiro Matsuo and Isao Yamada.
○ Surface Modification of Fluorocarbon Polymers by Synchrotron Radiation.
Jpn. J. Appl. Phys., 42, Part1, No.6B, (2003) 3983-3985.
Kazuhiro Kanda, Tomoya Ideta, Yuichi Haruyama, Hiroyuki Ishigakiand
Shinji Matsui.
○ Three-Dimensional Nanoimprint using a mold made by Focused-Ion-Beam
Chemical-Vapor-Deposition.
Jpn. J. Appl. Phys., 42, Part1, No.6B, (2003) 3874-3876.
Takahiko Morita, Keiichiro Watanabe, Reo Kometani, Kazuhiro Kanda,
Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko Ishida,
Yukinori Ochiai, Tsutomu Tajima and Shinji Matsui.
○ Influence of residual Ar+ in Ar cluster ion beam for DLC film formation.
Nucl. Inst. Meth. B, 206 (2003) 884-888.
Teruyuki Kitagawa, Kazuya Miyauchi, Noriaki Toyoda, Kazuhiro Kanda,
Tokumi Ikeda, Harushige Tsubakino, Jiro Matsuo, Shinji Matsui and Isao
Yamada.
○ NEXAFS study on substrate temperature dependence of DLC films formed
by Ar cluster ion beam assisted deposition.
Nucl. Inst. Meth. B, 206 (2003) 880-883.
Kazuhiro Kanda, Yutaka Shimizugawa, Yuichi Haruyama, Isao Yamada,
Shinji Matsui, Teruyuki Kitagawa, Harushige Tsubakino and Tatsuo Gejo.
○ X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation
of
a Polytetrafluoroethylene Surface.
Jpn. J. Appl. Phys., 42, Part1, No.4A, (2003) 1722-1724.
Yuichi Haruyama, Tomoya Ideta, Hiroyuki Ishigaki, Kazuhiro Kanda and
Shinji Matsui.
○ "Development of three-dimensional pattern-generating system for focused-ion-beam
chemical-vapor deposition"
T. Hoshino, K. Watanabe, R. Kometani, T. Morita, K. Kanda, Y. Haruyama,
T. Kaito, J. Fujita,
M. Ishida, Y. Ochiai, S. Matsui
Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, 21 (2003) 2732.
10.1116/1.1627812
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