研究業績リスト


    2021
  1. Anisotropic pyrochemical dry etching of　fluorinated ethylene propylene induced by　pre-irradiation with synchrotron radiation
    Kaito Fujitani, Masaya Takeuchi, Yuichi Haruyama, Akinobu Yamaguchi, and Yuichi Utsumi
    AIP Advances 11, 025104-6, 2021
    https://doi.org/10.1063/6.0000702


    2020
  2. X-ray absorption and photoemission spectroscopy of bulk insulating materials using graphene
    Satoru Suzuki , Yuichi Haruyama, Akinobu Yamaguchi , Tomoki Yamamoto, Takuya Yoshizumi, Ayaka Fujii, Seiji Nakashima , Yakumo Fuchiwaki, Hironori Fujisawa , Takuo Ohkochi , Mari Ishihara, and Hirosuke Sumida
    J. Appl. Phys. 128, 015304-8 2020
    https://doi.org/10.1063/5.0010715


  3. Immobilizing a π-Conjugated Catecholato Framework on Surfaces of SiO2 Insulator Films via a One-Atom Anchor of a Platinum Metal Center to Modulate Organic Transistor Performance
    Keishiro Tahara, Yuya Ashihara, Takashi Ikeda, Tomofumi Kadoya, Jun-ichi, Fujisawa, Yoshiki Ozawa, Hiroyuki Tajima, Noriaki Toyoda, Yuichi Haruyama, and Masaaki Abe
    Inorganic Chemistry, 59, 17945–17957, 2020
    https://doi.org/10.1021/acs.inorgchem.0c02163


  4. Control of Molecular Orientation of Spiro-OMeTAD on Substrates
    Naoyuki Shibayama, Hiroyuki Maekawa, Yuiga Nakamura, Yuichi Haruyama, Masahito Niibe, and Seigo Ito
    ACS Applied Materials & Interfaces 12, 50187-50191, 2020
    https://doi.org/10.1021/acsami.0c15509


    2019
  5. Quasi-free-standing monolayer hexagonal boron nitride on Ni
    Satoru Suzuki, Yuichi Haruyama, Masahito Niibe, Takashi Tokushima, Akinobu Yamaguchi, Yuichi Utsumi, Atsushi Ito, Ryo Kadowaki, Akane Maruta and Tadashi Abukawa
    Materials Research Express, 6, Number 1, 016304, 2019


  6. H2O/O2 Vapor Annealing Effect on Spin Coating Alumina Thin Films for Passivation of Silicon Solar Cells
    Abdullah Uzum, Hiroyuki Kanda, Takuma Noguchi, Yuya Nakazawa, Shota Taniwaki, Yasushi Hotta, Yuichi Haruyama, Naoyuki Shibayama, and Seigo Ito
    International Journal of Photoenergy, 2019, Article ID 4604932, 7 pages
    https://doi.org/10.1155/2019/4604932


  7. Water Electrolysis using Flame-Annealed Pencil Graphite Rods
    Ryuki Tsuji, Hideaki Masutani, Yuichi Haruyama, Masahiro Niibe, Satoru Suzuki, Shin-ichi Honda, Yoshiaki Matsuo, Akira Heya, Naoto Matsuo and Seigo Ito
    ACS sustainable chemistry engineering, 7, 5681−5689, 2019


    2017
  8. Depth analysis of molecular orientation induced by nanoimprint graphoepitaxy
    M. Okada, R. Fujii, Y. Haruyama, H. Ono, N. Kawatsuki, and S. Matsui
    Jpn. J. Appl. Phys. 56, pp. 040302, 2017


  9. Formation of complex molecular orientation patterns in nanostructures via double nanoimprint graphoepitaxy
    Makoto Okada, Ryosuke Fujii, Yuichi Haruyama, Hiroshi Ono and Nobuhiro Kawatsuki
    Appl. Phys. Express 10 105201, 2017


    2016
  10. Light stability tests of CH3NH3PbI3 perovskite solar cells using porous carbon counter electrodes
    Seigo Ito, Gai Mizuta, Shusaku Kanaya, Hiroyuki Kanda, Tomoya Nishina, Seiji Nakashima, Hironori Fujisawa, Masaru Shimizu, Yuichi Haruyama and Hitoshi Nishino
    Phys. Chem. Chem. Phys. 18, 27102-27108, 2016


  11. Influence of film thickness on the reorientation structure of photoalignable liquid crystalline polymer films
    Y. Taniguchi, M. Kondo, Y. Haruyama, S. Matsui, and N. Kawatsuki
    Polymer 90, pp. 290–294, 2016


    2015
  12. Comparison of the Photoinduced Orientation Structure in the Bulk and at the Near-Surface of a Photoalignable Liquid Crystalline Polymer Film
    Nobuhiro Kawatsuki, Yusuke Taniguchi, Mizuho Kondo, Yuichi Haruyama, and Shinji Matsui
    Macromolecules 48, pp 2203–2210, 2015.


  13. Evaluation of the fluorinated antisticking layer by using photoemission and NEXAFS spectroscopies
    Yuichi Haruyama, Yasuki Nakai and Shinji Matsui
    Applied Physics A 121, pp 437–441, 2015.


  14. Electronic structure of fluorinated self-assembled monolayer investigated by photoelectron spectroscopy in the valence band region
    Yuichi Haruyama and Shinji Matsui
    2015 Jpn. J. Appl. Phys. 54 075202, 2015.


  15. Three-dimensional hydrogen silsesquioxane nanostructure fabrication by reversal room-temperature nanoimprint using poly(dimethylsiloxane) mold
    Norihiro Sugano, Makoto Okada, Yuichi Haruyama and Shinji Matsui
    2015 Jpn. J. Appl. Phys. 54 06FM05, 2015.


    2014
  16. Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching
    Yuji Kang, Yuichi Haruyama, Shinji Matsui
    Microsystem Technologies, 201420, 1899-1903, 2014.


  17. Fabrication of gold nanoparticle pattern using imprinted hydrogen silsesquioxane pattern for surface-enhanced Ramanscattering
    Yuji Kang, Takao Fukuoka, Ryo Takahashi, Yuichi Utsumi, Yuichi Haruyama and Shinji Matsui
    Microsystem Technologies, 201420, 1993-2000, 2014.


  18. Molecular Orientation at the Near-Surface of Photoaligned Films Determined by NEXAFS
    Nobuhiro Kawatsuki, Yonosuke Inada, Mizuho Kondo, Yuichi Haruyama, and Shinji Matsui
    Macromolecules 47, pp 2080–2087, 2014.


  19. Release Property of HSQ Replica Mold Fabricated by Room Temperature Nanoimprinting with PDMS soft mold
    Norihiro Sugano, Makoto Okada, Yuichi Haruyama, Shinji Matsui
    Journal of Photopolymer Science and Technology, 27, No. 1, pp. 81-84, 2014.


  20. Chemical Patterns Fabricated by Nanoimprinting for Block Copolymer Directed Self-Assembly
    Hitomi Wakaba, Makoto Okada, Syuso Iyoshi, Yuichi Haruyama, Shinji Matsui
    Journal of Photopolymer Science and Technology, 27, No. 1, pp. 99-102, 2014


  21. Localized Abrasion Resistance Test for Antisticking Layer by Atomic Force Microscopy
    Makoto Okada, Yuichi Haruyama, Shinji Matsui
    Journal of Photopolymer Science and Technology, 27, No. 1, pp. 103-106, 2014.


  22. Effect of Fluorosurfactant contained in Resin for Anti-sticking Layer Free UV Nanoimprinting
    Takahiro Oyama, Makoto Okada, Shuso Iyoshi, Yuichi Haruyama, Tsuneo Yamashita, Shinji Matsui
    Journal of Photopolymer Science and Technology, 27, No. 1, pp. 117-120, 2014.


  23. EUV Resist Chemical Analysis by Soft X-ray Absorption Spectroscopy for High Sensitivity Achievement
    Kazuya Emura, Takeo Watanabe, Masato Yamaguchi, Hirohito Tanino, Tsubasa Fukui, Daiju Shiono, Yuichi Haruyama, Yasuji Muramatsu, Katsumi Ohmori, Kazufumi Sato, Tetsuo Harada, Hiroo Kinoshita
    Journal of Photopolymer Science and Technology, 27, No. 5, pp. 631-638, 2014.


  24. Molecular orientation of a photoreactive liquid crystalline polymer induced by thermal nanoimprinting and graphoepitaxy
    M. Okada, R. Hosoda, M. Kondo, Y. Haruyama, T. Sasaki, H. Ono, N. Kawatsuki, S. Matsui
    Microelectronic Engineering, 123, pp. 159-162, 2014.


  25. Evaluation of fluorosurfactant distribution in ultrathin UV nanoimprint resin by X-ray photoelectron spectroscopy
    T. Oyama, M. Okada, S. Iyoshi, Y. Haruyama, and S. Matsui
    Japanese Journal of Applied Physics, 53, pp. 06JK06, 2014.


    2013
  26. Construction of a Wide-range High-resolution Beamline BL05 in NewSUBARU for Soft X-ray Spectroscopic Analysis on Industrial Materials
    K Kanda, T Hasegawa, M Uemura, M Niibe, Y Haruyama, M. Motoyama, K Amemiya, S Fukushima, and T Ohta
    Journal of Physics: Conference Series 425, 132005, 2013.


  27. Comparison Molecular Orientation of Photoinduced Liquid Crystalline Polymer induced by Thermal Nanoimprintingt to that by Graphoepitaxy
    Makoto Okada, Emi Nishioka, Mizuho Kondo, Yuichi Haruyama, Tomoyuki Sasaki, Hiroshi Ono, Nobuhiro Kawatsuki and Shinji Matsui
    Journal of Photopolymer Science and Technology, 26, pp.65-68, 2013.


  28. Molecular Orientation of Photoinduced Liquid Crystalline Polymer with 3D Structure abricated by Thermal Nanoimprinting
    Makoto Okada, Emi Nishioka, Mizuho Kondo, Yuichi Haruyama, Tomoyuki Sasaki, Hiroshi Ono, Nobuhiro Kawatsuki and Shinji Matsui
    Journal of Photopolymer Science and Technology, 26, pp.83-85, 2013.


  29. Surface Evaluation of Cationic UV-curable Resin with Fluorine Additive by X-ray Photoelectron Spectroscopy
    Takahiro Oyama, Makoto Okada, Shuso Iyoshi, Yuichi Haruyama, Hiroto Miyake,Tomoya Mizuta and Shinji Matsui
    Journal of Photopolymer Science and Technology, 26, pp.129-132, 2013.


  30. Release Property Evaluation of Fluorinated Antisticking Layer by a Mixture of Release Agents
    Hitomi Wakaba, Makoto Okada, Syuso Iyoshi, Yuichi Haruyama and Shinji Matsui
    Journal of Photopolymer Science and Technology, 26, pp.143-146, 2013.


  31. EUV Resist Chemical Reaction Analysis using SR
    Takeo Watanabe, Kazuya Emura, Daiji Shiono, Yuichi Haruyama, Yasuji Muramatsu, Katsumi Ohmori, Kazufumi Sato, Tetsuo Harada and Hiroo Kinoshita
    Journal of Photopolymer Science and Technology, 26, pp.635-641, 2013.


  32. Double patterning in nanoimprint lithography
    Makoto Okada, Hiroto Miyake, Shuso Iyoshi, Takao Yukawa, Tetsuya Katase, Katsuhiko Tone, Yuichi Haruyama, Shinji Matsui
    Microelectronic Engineering 112, pp.139-142, 2013.


  33. Reorientation of photoreactive liquid crystalline polymer pattern fabricated by hybrid nanoimprinting
    M. Okada, Y. Haruyama, S. Matsui, E. Nishioka, R. Hosoda, M. Kondo, N. Kawatsuki, T. Sasaki and H. Ono
    Journal Vacuum Science Technology B 31, pp. 06FB04-1-06FB04-4, 2013.


    2012
  34. Step and Repeat Ultraviolet Nanoimprinting under Pentafluoropropane Gas Ambient
    Shuso Iyoshi, Makoto Okada, Tetsuya Katase, Katsuhiko Tone, Kei Kobayashi, Shu Kaneko, Yuichi Haruyama, Masaru Nakagawa, Hiroshi Hiroshima, and Shinji Matsui
    Jpn. J. Appl. Phys. 51, 06FJ08, 2012.


  35. Adhesion and frictional force measurements employing scanning probe microscopy in a pentafluoropropane gas atmosphere
    Makoto Okada, Masayuki Iwasa, Hiroshi Hiroshima, Yuichi Haruyama, Kazuhiro Kanda, and Shinji Matsui
    J. Vac. Sci. Technol. B 30, 011601, 2012.


  36. Development of scattering near-field optical microspectroscopy apparatus using an infrared synchrotron radiation source
    Yuka Ikemoto, Michio Ishikawa, Satoru Nakashima, Hidekazu Okamura, Yuichi Haruyama, Shinji Matsui, Taro Moriwaki, Toyohiko Kinoshita
    Optics Communications 285 pp. 2212–2217, 2012.


  37. Chemical Reaction Analysis of EUV CA Resist using SR Absorption Spectroscopy
    Takeo Watanabe, Yuichi Haruyama, Daiju Shiono, Kazuya Emura, Takuro Urayama, Tetsuo Harada, Hiroo Kinoshita
    Journal of Photopolymer Science and Technology, 25 pp. 569-573, 2012.


    2011
  38. Electronic structure of fluorinated diamond-like carbon thin films as a function of annealing temperature using photoelectron spectroscopy
    Y. Haruyama, Y. Kang, M. Okada, S. Matsui
    J. Electron Spectrosc. Related Phenom Vol. 184, pp. 276-279, 2011.


  39. Fabrication of Fluorine-terminated Diamond-Like Carbon Thin Film Using a Hyperthermal Atomic Fluorine Beam
    K. Kanda, N. Yamada, K. Yokota, M. Tagawa, M. Niibe, M. Okada, Y. Haruyama, and S. Matsui
    Diamond and Related Materials Vol. 20, 703-706, 2011.


  40. Dynamics of Magnetostatically Coupled Vortices Observed byTime-Resolved Photoemission Electron Microscopy
    K. Arai, T. Okuda, K. Fukumoto, M. Kotsugi, T. Ohkouchi, K. Kodama, T. Kimura, Y. Haruyama, T. Nakamura, T. Matsushita, T. Muro, S. Matsui, A. Kakizaki, Y. Otani, and T. Kinoshita
    Jpn. J. Appl. Phys. Vol. 50, 053001-6, 2011.


  41. Characterization of pentafluoropropane dissolved UV-nanoimprint resin
    Mika Chinen, Yohei Sawada, Yuichi Haruyama, Shinji Matsui, Makoto Okada, and Hiroshi Hiroshima
    J. Vac. Sci. Technol. B 29, 06FC18, 2011.


  42. Mechanical characteristics of imprinted nanostructures fabricated with a poly(dimethylsiloxane) mold
    Yuji Kang, Makoto Okada, Yasuki Nakai, Yuichi Haruyama, Kazuhiro Kanda, and Shinji Matsui
    J. Vac. Sci. Technol. B 29, 06FC10-6, 2011.


  43. Suitability of thin poly(dimethylsiloxane) as an antisticking layer for UV nanoimprinting
    Makoto Okada, Yuichi Haruyama, Kazuhiro Kanda, and Shinji Matsui
    J. Vac. Sci. Technol. B 29, 06FC09, 2011.


  44. Evaluation of fluorine additive effect on cationic UV-nanoimprint resin
    Makoto Okada, Yuichi Haruyama, Shinji Matsui, Hiroto Miyake, Shuso Iyoshi, Takao Yukawa, and Hidekazu Takeuchi
    J. Vac. Sci. Technol. B 29, 06FC04, 2011.


  45. Evaluation of the curing process of UV resins in a 1,1,1,3,3-pentafluoropropane gas environment by photo differential scanning calorimetry and Fourier transform infrared spectroscopy
    Yohei Sawada, Yuichi Haruyama, Kazuhiro Kanda, Shinji Matsui, Makoto Okada, Hiroto Miyake, Takeshi Ohsaki, Yoshihiko Hirai, and Hiroshi Hiroshima
    J. Vac. Sci. Technol. B 29, 06FC05, 2011.


  46. Room temperature nanoimprinting using spin-coated hydrogen silsesquioxane with high boiling point solvent
    Yuji Kang, Makoto Okada, Shinya Omoto, Yuichi Haruyama, Kazuhiro Kanda, and Shinji Matsui
    J. Vac. Sci. Technol. B 29, 06FC03-3, 2011.


  47. Nanoimprint replication of nonplanar nanostructure fabricated by focused-ion-beam chemical vapor deposition
    Yuji Kang, Shinya Omoto, Yasuki Nakai, Makoto Okada, Kazuhiro Kanda, Yuichi Haruyama, and Shinji Matsui
    J. Vac. Sci. Technol. B 29, 011005-5, 2011.


    2010
  48. Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas
    Y. Nakai, Y. Kang, M. Okada, Y. Haruyama, K. Kanda, T. Ichihashi, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 49, 06GH07-4, 2010.


  49. Direct Patterning on Sol Gel Low-k Porous Silica by Thermal Nanoimprinting
    M. Okada, T. Nakayama, Y. Kang, Y. Haruyama, K. Kanda, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 49, 06GL08-3, 2010.


  50. Room-Temperature Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane with Hard Poly(dimethylsiloxane) Mold
    Y. Kang, M. Okada, C. Minari, K. Kanda, Y. Haruyama, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 49, 06GL13-5, 2010.


  51. Thermal Nanoimprinting on Prealigned Photoreactive Polymer Liquid Crystal for Molecular Reorientation
    M. Okada, S. Manabe, M. Kurita, M. Kondo, Y. Haruyama, K. Kanda, A. Emoto, H. Ono, N. Kawatsuki, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 49, 128004-2, 2010.


  52. 放射光を照射したPTFE表面に対する加熱効果の光電子分光による観察
    春山　雄一、松井　真二、出田　智也、石垣　博行
    IEEJ Transactions on Electoronics, Information and Systems (電気学会論文誌), Vol. 130-C, pp. 1741-1745, 2010.


  53. Evaluation of oxygen inhibition for UV-curable resins by adhesion force measurement using scanning probe microscope
    Makoto Okada, Masayuki Iwasa, Hiroto Miyake, Takeshi Ohsaki, Yuichi Haruyama, Kazuhiro Kanda, and Shinji Matsui
    J. Vac. Sci. Technol. B 28, C6M17, 2010.


  54. UV Irradiation Effect on Pattern Size Shrinkage of Sol-gel Indium Tin Oxide Replicated by Nanoimprint Lithography
    Yuji Kang, Makoto Okada, Yuichi Haruyama, Kazuhiro Kanda and Shinji Matsui
    Journal of Photopolymer Science and Technology, Vol. 23, No. 1, pp.39-43, 2010.


  55. Evaluation of Heat Durability of Fluorinated Antisticking Layers
    Y. Nakai, S. Omoto, M. Okada, K. Kanda, Y. Haruyama and S. Matsui
    Journal of Photopolymer Science and Technology, Vol. 23, No. 1, pp.55-58, 2010.


  56. Comparison of EB Exposure Characteristics between HSQ and Calix Arene of High Resolution Negative Resist
    S. Omoto, M. Okada, Y. Kang, K. Kanda, Y. Haruyama, S. Tono and S. Matsui
    Journal of Photopolymer Science and Technology, Vol. 23, No. 1, pp.97-100, 2010.


    2009
  57. Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
    M. Okada, K. Nakamatsu, M. Iwasa, K. Kanda, Y. Haruyama, and S. Matsui
    Appl. Phys. Express 2 016502-3, 2009.


  58. Photoemission study of the Au-SrTiO3(100) surface
    Y. Haruyama, Y. Aiura, H. Bando, S. Matsui
    IEEJ Transactions on Electoronics, Information and Systems (電気学会論文誌), Vol. 129, pp. 225-228, 2009.


  59. Nano-Scale Chemical Imaging by Synchrotron Radiation Assisted Scanning Tunneling Microscopy
    T. Okuda, T. Eguchi, K. Akiyama, A. Harasawa, T. Kinoshita, Y. Hasegawa, M. Kawamori, Y.Haruyama, and S. Matsui
    Phys. Rev. Letts. Vol. 102, pp. 105503-4, 2009.


  60. Photoemission Study of Hydrogenated Amorphous Carbon Thin Films as a Function of Annealing Temperature
    Y. Haruyama, M. Tagawa, K. Yokota, S. Matsui
    Jpn. J. Appl. Phys. Vol. 48, 055505-3, 2009.


  61. Characteristics of Antisticking Layer Formed by CHF3 Plasma Irradiation for Nanoimprint Molds
    M. Okada, K. Nakamatsu, Y. Kang, K. Kanda, Y. Haruyama, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 48, 06FH15-4, 2009.


  62. Photoelectron Spectroscopy Study of the Valence Band Region in Diamond-like Carbon Thin Films
    Y. Haruyama, T. Kitagawa, S. Matsui, N. Toyoda, I. Yamada
    Jpn. J. Appl. Phys. Vol. 48, 092301-4, 2009.


  63. Nanostructure Analysis of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
    K. Nakamatsu, T. Ichihashi, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 48, 105001-4, 2009.


  64. Characterization of Nanoimprint Resin and Antisticking Layer by Scanning Probe Microscopy
    Makoto Okada, Yuji Kang, Ken-ichiro Nakamatsu, Masayuki Iwasa, Kazuhiro Kanda, Yuichi Haruyama and Shinji Matsui
    Journal of Photopolymer Science and Technology, Vol. 22, No. 2, pp.167-169, 2009.


  65. Room-Temperature Nanoimprint using Sol-Gel ITO Film
    Yuji Kang, Makoto Okada, Ken-ichiro Nakamatsu, Yuichi Haruyama, Kazuhiro Kanda and Shinji Matsui
    Journal of Photopolymer Science and Technology, Vol. 22, No. 2, pp.189-192, 2009.


  66. Room-Temperature Nanoimprint using Liquid-Phase Hydrogen Silsesquioxane with PDMS mold
    Yuji Kang, Makoto Okada, Ken-ichiro Nakamatsu, Yuichi Haruyama, Kazuhiro Kanda and Shinji Matsui
    Journal of Photopolymer Science and Technology, Vol. 22, No. 2, pp.193-194, 2009.


  67. UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by room-temperature nanoimprint
    Yuji Kang, Makoto Okada, Ken-Ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, and Shinji Matsui
    J. Vac. Sci. Technol. B 27, 2805, 2009.


    2008
  68. X-Ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
    Y. Haruyama, T. Kitagawa, K. Kanda, S. Matsui, T. Gejo, N. Toyoda, I. Yamada
    Jpn. J. Appl. Phys. Vol. 47, pp. 3380- 3383, 2008.


  69. Application of Synchrotron Radiation Photoemission Spectroscopy to Structure Analysis of Thin Corrosion Product Films on Hot-Dip Zn-Al Coatings
    K. Nishihara, M. Matsumoto, M. Kimoto, T. Kudo, H. Uchida, Y. Haruyama, K. Kanda, and S. Matsui
    ECS Trans. 11, Issue 22, pp. 39-44, 2008.


  70. Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition
    R. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 47, pp. 5032-5035, 2008.


  71. Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
    M. Okada, K. Nakamatsu, K. Kanda, Y. Haruyama, R. Kometani, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 47, pp. 5160-5163, 2008.


  72. Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
    M. Okada, M. Iwasa, K. Nakamatsu, N.o Yamada, K. Kanda, Y. Haruyama, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 47, pp. 7467-7469, 2008.


  73. Evaluation of Fluorinated Diamond Like Carbon as Antisticking Layer by Scanning Probe Microscopy
    Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Noriko Yamada, Kazuhiro Kanda, Yuichi Haruyama and Shinji Matsui
    Journal of Photopolymer Science and Technology, Vol. 21, No. 4, pp.597-599, 2008.


    2007
  74. Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics
    K. Nakamatsu, M. Nagase, T. Ichihashi, K. Kanda, Y. Haruyama, T. Kaito
    IEICE TRANCE. ELECTRON, Vol. E90-C, pp. 41-45, 2007.


  75. Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
    R. Kometani, Y. Haruyama, K. Kanda, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol.46, pp. L180-183, 2007.


  76. Electronic and geometric structures of the Au-Si(100) surface observed by photoemission spectroscopy and LEED
    Y. Haruyama, K. Kanda, and S. Matsui
    J. Electron Spectrosc. Related Phenom Vol. 156-158, pp. 463-466, 2007.


  77. Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold
    Noriko Yamada, Kenichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama and Shinji Matsui
    Jpn. J. Appl. Phys. Vol. 46, pp. 6373-6374, 2007.


  78. Evaluation of a Bio Nano-Sensing Probe Fabricated by Focused-Ion-Beam Chemical Vapor Deposition for Single Organelle Analyses
    R. Kometani, H. Koike, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 46, pp. 7963-7965, 2007.


  79. Relationship between Field Emission Properties and Material Characteristics of Diamond-Like Carbon Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
    R. Kometani, Y. Haruyama, K. Kanda, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. Vol. 46, pp. 7987-7990, 2007.


  80. 集束イオンビーム励起表面反応による化学気相成長法を用いた単一オルガネラ操作のためのバイオナノツールの作製と評価
    米谷玲皇，神田一浩，春山雄一，皆藤孝，松井真二
    電子情報通信学会論文誌 Vol. J90－C, pp.88-95, Jan, 2007.


  81. 放射光-光電子分光法を用いた溶融Zn-Al系めっき上腐食生成皮膜の構造解析
    西原克浩，松本雅充，木本雅也，工藤赳夫，内田仁，春山雄一，神田一浩，松井真二
    材料と環境, 56巻7号, pp.314-320, 2007.


    2006
  82. Effect of Oxygen Plasma Irradiation on Hydrogen Silsesquioxane Nanopatterns Replicated by Room-Temperature Nanoimprinting
    M. Kawamori, K. Nakamatsu, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. 8994-8996, 2006.


  83. Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
    K. Nakamatsu, N. Yamada, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. L 954-956, 2006.


  84. Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
    R. Kometani, K. Kanda, Y. Haruyama, T. Kaito and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. L 711-L 713, 2006.


  85. Temperature effect on the chemical composition of a polytetrafluoroethylene surface under the irradiation of synchrotron radiation by means of the x-ray photoelectron spectroscopy
    Y. Haruyama, Y. Kato, K. Kanda, S. Matsui, T. Ideta and H. Ishigaki
    Radiation Physics and Chemistry 75, pp. 479-484, 2006.


  86. Electronic structure of Au-Si(111) interface as a function of Au coverage
    Y. Haruyama, K. Kanda and S. Matsui
    Radiation Physics and Chemistry 75, pp. 1943-1947, 2006.


  87. Formation process of microprotuberances on poly(tetrafluoroethylene) surface by synchrotron radiation exposure
    Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    Radiation Physics and Chemistry 75, pp. 2049-2053, 2006.


  88. Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
    N. Yamada, Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. 6400-6404, 2006.


  89. Etching of Poly(tetrafluoroethylene) Sheet by Synchrotron Radiation Exposure in Soft X-ray Region
    Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. 7978-7979, 2006.


  90. Surface modification of Poly(tetrafluoroethylene) by Synchrotron Radiation Exposure under Several Kinds of Gas Atmosphere
    Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 45, pp. 8839-8841, 2006.


  91. Element specific imaging by scanning tunneling microscopy combined with synchrotron radiation light
    T. Eguchi, T. Okuda, T. Matsushima, A. Kataoka, A. Harasawa, K. Akiyama, T. Kinoshita, Y. Hasegawa, M. Kawamori, Y. Haruyama and S. Matsui
    Appl. Phys. Lett. 89, 243119, 2006.


  92. Cell wall cutting tool and nano-net fabrication by FIB-CVD for subcellular operations and analysis
    R. Kometani, R. Funabiki, T. Hoshino, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, Y. Ochiai, S. Matsui
    Microelectronic Engineering 83, pp. 1642-1645, 2006.


  93. Three-dimentional rotor fabrication by focused-ion-beam chemical-vapor-deposition
    J. Igaki, R. Kometani, K. Nakamatsu, K. Kanda, Y. Haruyama, Y. Ochiai, J. Fujita, T. Kaito, S. Matsui
    Microelectronic Engineering 83, pp. 1221-1224, 2006.


  94. Comparison of FIB-CVD and EB-CVD growth characteristics
    J. Igaki, K. Kanda, Y. Haruyama, M. Ishida, Y. Ochiai, J. Fujita, T. Kaito, S. Matsui
    Microelectronic Engineering 83, pp. 1225-1228, 2006.


  95. 溶融Zn-Al系めっき鋼板上酸化膜の皮膜構造に及ぼすAlの影響
    西原克浩，木本雅也，工藤赳夫，内田仁，春山雄一，神田一浩，松井真二
    材料別冊, ５５巻１１号, pp.986-990, 2006.


    2005
  96. Three-dimentional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition
    R. Kometani, T. Hoshino, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, S. Matsui
    Nucl. Instr. and Meth. In Phys. Res. B232, pp. 363-366, 2005.


  97. Mechanical Characterstics of Diamond-Like-Carbon Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
    K. Nakamatsu, M. Nagase, H. Namatsu and S. Matsui
    Jpn. J. Appl. Phys. 44, L1228-1230, 2005.


  98. Nanomechanical switch fabrication by focused-ion-beam chemical vapor deposition
    T. Morita, K. Nakamatsu, K. Kanda, Y. Haruyama, K. Kondo, T. Hoshino, T. Kaito, J. Fujita, T. Ichihashi, M. Ishida, Y. Ochiai, T. Tajima and S. Matsui
    J. Vac. Sci. Technol. B22, pp. 3137-3142, 2005.


  99. Surface modification of PTFE by synchrotron radiation under the O2 gas atmosphere
    Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    J. Electron Spectrosc. Related Phenom 144-147, pp. 413-415, 2005.


  100. Electronic structure of Au-Si(100) interface as a function of Au coverag
    Y. Haruyama, K. Kanda and S. Matsui
    J. Electron Spectrosc. Related Phenom 144-147, pp. 389-392, 2005.


  101. Photoexcitation Process Leading to Modification on Poly(tetrafluoroethylene) Surface by Irradiation of Synchrotron Radiation In Soft X-ray Region
    K. Kanda, Y. Kato, T. Ideta, Y. Haruyama, H. Ishigaki and S. Matsui
    Jpn. J. Appl. Phys. 44, pp. 3242-3244, 2005.


  102. Fabrication of Nanomanipulator with SiO2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
    R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai and S. Matsui
    Jpn. J. Appl. Phys. 44, pp. 5727-5731, 2005.


  103. Brilliant Blue Observation from a Morpho-Butterfly-Scale Quasi-Structure
    K. Watanabe, T. Hoshino, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 44, pp. L48-L50, 2005.


  104. Nanoimprint and Nanocontact Technologies using Hydrogen Silsesquioxane
    K. Nakamatsu, K. Watanabe, K. Tone, H. Namatsu and S. Matsui
    J. Vac. Sci. Technol. B23, pp. 507, 2005.


  105. Excitation energy dependence for the Li 1s X-ray photoelectron spectra of LiMn2O4
    J. Tsuji, M. Fujita, Y. Haruyama, K. Kanda, S. Matsui, N. Ozawa, T. Yao and K. Taniguchi
    Analytical Sciences 21, pp. 779-781, 2005.


    2004
  106. Three-dimentional and multimetalial microfabrication using focused–ion-beam chemical-vapor-depositionand its application for processing nerve electrodes
    T. Hoshino, M. Kawamori, T. Suzuki, S. Matsui, and K. Mabuchi
    J. Vac. Sci. Technol. B23, pp. 3158-3162, 2004.


  107. Performance of nanomanipulator fabrication on glass capillary by focused-ion-beam chemical-vapor-deposition
    R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita M. Ishida, Y. Ochiai, and S. Matsui
    J. Vac. Sci. Technol. B23, pp. 298-301, 2004.


  108. Bi-layer Resist Method for Room-Temperature Nanoimprint Lithography
    K. Nakamatsu, K. Watanabe, K. Tone, T. Katase, W. Hattori, Y. Ochiai, T. Matsuo M. Sasago, H. Namatsu, K. Komuro, and S. Matsui
    Jpn. J. Appl. Phys. 43, pp.4050-4053, 2004.


  109. Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
    R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai And S. Matsui
    Jpn. J. Appl. Phys. 43, pp. 7187-7191, 2004.


  110. Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor
    K. Watanabe, T. Morita, R. Kometani, T. Hoshino, K. Kondo, K. Kand, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima and S. Matsui
    J. Vac. Sci. Technol. B22, pp. 22-26, 2004.


  111. Synchrotoron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
    Y. Kato, K. Kanda, Y. Haruyama and S. Matsui
    Jpn. J. Appl. Phys. 43, pp. 3938-3940, 2004.


  112. Study of Au-Si(100) interface by means of Si 2p core-level photoemission spectroscopy
    Y. Haruyama, K. Kanda and S. Matsui
    J. Electron Spectrosc. Related Phenom. 137-140, pp. 97-100, 2004.


  113. Structure and Deposition Mechanism of 10-Undecenoic Acid Self-Assembled Layers on H-Si(111) Surfaces Studied by Atomic Force Microscopy and Fourier-Transform Infrared
    Yan Jun Li, R. Tero, T. Nagasawa, T. Nagata, Y. Haruyama, T. Urisu
    Jpn. J. Appl. Phys. 43, pp. 4591-4594, 2004.


  114. Nanoimprint Mold Repair by Ga+ Focused-Ion-Beam Direct Etching
    K. Watanabe, K. Kanda, Y. Haruyama, T. Kaito, and S. Matsui
    Jpn. J. Appl. Phys. 43, pp. 7769-7772, 2004.


  115. Nanomechanical switch fabrication by focused-ion-beam chemical vapor deposition
    T. Morita, K. Nakamatsu, K. Kanda, Y. Haruyama, K. Kondo, T. Hoshino, T. Kaito, J. Fujita, T. Ichihashi, M. Ishida, Y. Ochiai, T. Tajima and S. Matsui
    J. Vac. Sci. Technol. B22, pp. 3137-3142, 2004.


    2003
  116. 放射光によるSOG（スピンオングラス）の微細加工
    谷口淳，宮本岩男，神田一浩，春山雄一，松井真二
    レーザー協会誌 ２８, pp. 54-59, 2003.


  117. Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane
    S. Matsui, Y. Igaku, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Namatsu and M. Komuro
    J. Vac. Sci. Technol. B21, 688-692, 2003.


  118. X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface
    Y. Haruyama, T. Ideta, H. Ishigaki, K. Kanda and S. Matsui
    Jpn. J. Appl. Phys. 42, pp. 1722-1724, 2003.


  119. NEXAFS study on substrate temperature dependence of DLC films formed by Ar cluster ion beam assisted deposition
    K. Kanda, Y. Shimizugawa, Y. Haruyama, I. Yamada, S. Matsui, T. Kitagawa, H. Tsubakino and T. Gejo
    Nuclear Instruments and Methods in Physiscs Research B 206, pp. 880-883, 2003.


  120. Three-Dimensional Nanoimprint Mold Fabrication using a mold made by Focused-Ion-Beam Chemical Vapor Deposition
    T. Morita, K. Watanabe, R. Kometani, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima and S. Matsui
    Jpn. J. Appl. Phys. 42, pp. 3874-3876, 2003.


  121. Surface Modification of Fluorocarbon Polymers by Synchrotron Radiation
    K. Kanda, T. Ideta, Y. Haruyama, H. Ishigaki and S. Matsui
    Jpn. J. Appl. Phys. 42, pp. 3983-3985, 2003.


  122. Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and Etching
    R. Kometani, T. Morita, K. Watanabe, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai and S. Matsui
    Jpn. J. Appl. Phys. 42, pp. 4107-4110, 2003.


  123. Photoemission Study of Mixed-Valent Tm-monochalcogenides: Evidence of Electron-Correlation Effect In Different Tm-Core Levels
    K. G. Nath, Y. Ufuktepe, S. Kimura, Y. Haruyama, T. Kinoshita, T. Matsumura, T. Suzuki, H. Ogasawara and A. Kotani
    J. Phys. Soc. Jpn. 72, pp. 1792-1799, 2003.


    2002
  124. Room temperature nanoimprint technology using hydrogen silsequioxane (HSQ)
    Y. Igaku, S. Matsui, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Namatsu, M. Komuro and H. Hirosawa
    Jpn. J. Appl. Phys. 41, pp. 4198-4202, (2002).


  125. Application of imaging type photoelectron spectromicroscopy to solid state physics
    T. Kinoshita and Y. Haruyama
    Nanoscale Spectroscopy and Its Applications to Semiconductor Research, pp.180-195, ed. Y. Watanabe, S. Heun, G. Salviati and N. Yamamoto, Springer, Berlin, 2002.


  126. Direct etching of spin-on-glass films exposed using synchrotron radiation
    J. Taniguchi, K. Kanda, Y. Haruyama, S. Matsui, M. Tokunaga and I. Miyamoto
    Jpn. J. Appl. Phys. 41, pp. 4304-4306, 2002.


  127. Characterization of hard DLC films formed by Ar gas cluster ion beam-assisted fullerene deposition
    K. Kanda, T. Kitagawa, Y. Shimizugawa, Y. Haruyama, S. Matsui, M. Terasawa, H. Tsubakino and I. Yamada
    Jpn. J. Appl. Phys. 41, pp. 4295-4298, 2002.


  128. Temperature Evolution of the Photoemission Spectra for Si(111) Surface using Laser Annealing Method
    Y. Haruyama, T. Okuda, A. Harasawa, T. Kinoshita, S. Tanaka, H. Makino, K. Wada and S. Matsui
    Surface Science and Letters 9, pp. 769-774, 2002.


  129. Spectroscopy studies of temperature-induced valence transition on EuNi2(Si1-xGex)2 around Eu 3d-4f, 4d-4f and Ni 2p-3d excitation regions
    T. Kinoshita, H. P. N. J. Gunasekara, Y. Takata, S. Kimura, M. Okuno, Y. Haruyama, N. Kosugi, K. G. Nath, H. Wada, A. Mitsuda, M. Shiga, T. Okuda, A. Harasawa, H. Ogasawara and A. Kotani
    J. Phys. Soc. Jpn. 71, pp. 148-155, 2002.


    2001
  130. Collision energy-resolved study of the emission cross-section and the Penning ionization cross-section in the reaction of BrCN with He*(23S)
    K. Kanda, Y. Yamakita and K. Ohno
    Chem. Phys. Lett. 349, pp. 411-420, 2001.


  131. Observation of the satellite signal in Co 2p photoemission spectra: Evidence of a localized electronic structure in thin films
    Krishna G. Nath, Y. Haruyama, and T. Kinoshita
    Phys. Rev. B64, 245417, 2001


  132. Design of the undulator beamline (BL-7) at NewSUBARU
    K. Kanda, Y. Haruyama, M. Fujisawa and S. Matsui
    Nucl. Instr. and Meth. A467-468, pp. 500-503, 2001.


  133. Beam-line systems for pump-probe photoelectron spectroscopy using SR and Laser
    M. Kamada, S. Tanaka, K. Takahashi, Y. Doi, K. Fukui, T. Kinoshita, Y. Haruyama, S. Asaka, Y. Fujii and M. Itoh
    Nucl. Instr. and Meth. A467-468, pp. 1441-1443, 2001.


  134. Metallic electronic states on SrTiO3 (110) surface: An in situ conduction measurement
    H. Bando, Y. Ochiai, Y. Aiura, Y. Haruyama, T. Yasue and Y. Nishihara
    J. Vac. Sci. Technol. A19, pp. 1938-1941, 2001.


  135. Surface superstructure formation, electronic structure modification and magnetic stability of Co films on oxygen-rich Cu(001): confirmation of oxygen-surfactant effect
    Krishna G. Nath, Y. Haruyama, and T. Kinoshita
    Surf. Sci. 486, pp. 185-193, 2001.


  136. Scanning Tunneling Spectroscopy Analysis with a Triangular Inverse Transfer Matrix and its Application to Reduced SrTiO3 (110) surface
    H. Bando, Y. Aiura, T. Shimizu, Y. Ochiai, Y. Haruyama and Y. Nishihara
    JJ. Electron Spectrosc. Related Phenom 114-116, pp. 313-317, 2001.


  137. Electronic structures of organic salt DMTSA-BF4M using photoelectron spectromicroscopy
    Y. Haruyama, T. Kinoshita, K. Takimiya, T. Otsubo, C. Nakano and K. Yakushi
    J. Electron Spectrosc. Related Phenom 114-116, pp. 1013-1018, 2001.


  138. 電子ビーム露光技術の現状と展望
    松井真二(共著)
    応用物理学会誌70,pp.411-417, 2001.




    2000
  139. Photodissociation Spectroscopy of ClCN in the Vacuum Ultraviolet Region
    K. Kanda, M. Kono, T. Nagata, A. Hiraya, K. Tabayashi, K. Shobatake and T. Ibuki
    Chemical Physics, 255, pp. 369-378, 2000.


  140. Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam CVD
    S. Matsui, T. Kaito, M. Komuro, K. Kanda and Y. Haruyama
    J. Vac. Sci. Technol. B18, pp. 3181-3184, 2000.


  141. 光電子顕微鏡
    木下豊彦, 春山雄一
    放射光, 13巻, pp.292-297, 2000.


  142. Sub-Half-Micron Lithography for LSI's
    K. Suzuki, S. Matsui and Y. Ochiai ed.
    CAMBRIDGE UNIVERSITY PRESS, 2000年1月.




    1999
  143. Photodissociation of Some Simple Nitriles in the Extreme Vacuum Ultraviolet Region
    K. Kanda, T. Nagata and T. Ibuki
    Chemical Physics, 243, pp. 89-96, 1999.


  144. Anisotropic optical conductivity of RPtAs (R = La, Ce)
    S. Kimura, K. G. Nath, Y. Haruyama, T. Kinoshita, S. Yoshii and M. Kasaya
    Physica B, 259-261, pp. 1163, 1999.


  145. Study of Magnetic Linear Dichroism (MLD) for different thickness of Ni-thin film grown on ferromagnetic Co (100) in element specific photoemission
    Krishna G. Nath, Y. Haruyama, S. Kimura, Y. Ufuktepe, and T. Kinoshita
    J. Electron Spectrosc. Related Phenom. 101-103, pp. 257-262, 1999.


  146. Electronic structures of organic salts (DI-DCNQI)2M (M = Cu and Ag) using photoelectron spectromicroscopy
    Y. Haruyama, Krishna G. Nath, S. Kimura, Y. Ufuktepe, T. Kinoshita, K. Hiraki and K. Kanoda
    Solid State Communications, 110, pp. 17-22, 1999.


  147. Ｘ線結像光学
    松井真二(共著)
    培風館, 1999年7月.



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