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Nanostructure Science and Technology

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Latest information

Research lists
Fabrication of 3D Nano-structure using FIB-CVD
Quantum effects in nanoscale-materials are observed at less than 10 nm dimensions. Nanotechnology using electron and ion beams can delineate 5-10nm scal patterns, which is applied to create the new nanoscale-materials. The nanoscale-materials developd here are characterized by the soft X-ray spectroscopy at NewSUBARU.
Free-space-wiring fabrication in nano-space by focused-ion-beam chemicalvapor deposition収束イオンビームCVD法により作成した空中配線構造
▲ Free-space-wiring fabrication in nano-space by focused-ion-beam chemicalvapor deposition

Leaning Tower of Pisa by focused-ion-beam chemicalvapor deposition収束イオンビームCVD法により作成したヨット
▲ Leaning Tower of Pisa (left) and yacht (right) by focused-ion-beam chemicalvapor deposition

Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition
▲ Optical measurement and fabrication from a Morpho-butterfly-scale quasistructure by focused ion beam chemical vapor deposition

Creation of the new functional materials by the SR exposure
The novel functional surfaces, whose surface properties, such as wettebility, refractive index, etc., are locally controlled, are modified by the exposure to the SR.
Wettability control of PTFE
▲ Wettability control of PTFE

Experimental equipments

・Nanoimprint
・Electron Beam lithography System
・Scanning Electron Microscope(SEM)
・Scanning Probe Microscope(SPM)
・Evaporator
Experimental equipments

Beamlines
・BL7B (Material analysis beamline)

Members
Members

Papers list
Papers list

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