|
|
We promote the leading and creative researches of light science and related nano technologies with free and viorous sprit in order to contribute the evolution of the society constructing the new platforms of the advanced technology for built-up of expanded industries.
|
|
|
|
|
NewSUBARU facility has a 1.0-1.5 GeV electron storage ring, which provides light beams from IR to Soft X-ray regions. We resarch light sources for next generation through a machine R and D, and industrial appications such as EUVL lithography, LIGA process, material analysis.
|
|
|
|
|
Last modifiedF2020/12/4 |
|
|
|
|
|
|
|
Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
ZIP code 678-1205
3-1-2 Koto, Kamigori-cho, Ako-gun, Hyogo, JAPAN |
|
|
|
|
Contact List |
Phone:+81-791-58-0249 |
Facsimile:+81-791-58-0242 |
|
|
|
|